Publications by Joachim Oberhammer

Peer reviewed

Articles

[1]

A. Karimi et al., "A 220–260-GHz Silicon-Micromachined Waveguide MEMS Crossover Switch," IEEE transactions on microwave theory and techniques, pp. 1-11, 2024.

[2]

B. Beuerle et al., "A CPW Probe to Rectangular Waveguide Transition for On-Wafer Micromachined Waveguide Characterization," IEEE Transactions on Terahertz Science and Technology, vol. 14, no. 1, pp. 98-108, 2024.

[3]

A. Karimi et al., "A High-Performance 220–290 GHz Micromachined Waveguide Switch Based on Interference Between MEMS Reconfigurable Surfaces," IEEE Transactions on Terahertz Science and Technology, vol. 14, no. 2, pp. 188-198, 2024.

[4]

K. Boonlom et al., "Advanced Studies on Optical Wireless Communications for in-Pipe Environments : Bandwidth Exploration and Thermal Management," IEEE Access, vol. 12, pp. 80607-80632, 2024.

[5]

M. Reza Seidi Goldar, U. Shah and J. Oberhammer, "Analysis of a Minimalistic Imaging Radar Concept Employing Beam Shape Switching and Compressed Sensing," IEEE Transactions on Geoscience and Remote Sensing, vol. 62, 2024.

[6]

G. Savvides et al., "Curved HSIW : an affordable performance for non-planar millimeter-wave applications," Engineering Research Express, vol. 6, no. 3, 2024.

[7]

N. Xenidis et al., "Dichroic absorption of aligned graphene-augmented inorganic nanofibers in the terahertz regime," Applied Materials Today, vol. 39, 2024.

[8]

A. Karimi et al., "Full-Band Silicon-Micromachined E-Plane Waveguide Bend for Flange-to-Chip Connection," IEEE Transactions on Terahertz Science and Technology, vol. 14, no. 1, pp. 130-133, 2024.

[9]

A. Madannejad et al., "High-Gain Circularly Polarized 500-750 GHz Lens Antenna Enabled by Silicon Micromachining," IEEE Transactions on Antennas and Propagation, vol. 72, no. 5, pp. 4077-4085, 2024.

[10]

A. Karimi et al., "Silicon-Micromachined Subterahertz Frequency Beam-Steered Dual-Port Array Antenna," IEEE Transactions on Terahertz Science and Technology, vol. 14, no. 2, pp. 258-268, 2024.

[11]

M. Mehrabi Gohari, O. Glubokov and J. Oberhammer, "Ultra-Narrowband Silicon-Micromachined Sub-THz Filter With Wide Spurious-Free Rejection Band Employing High-Q TM₃₃₀ Resonators," IEEE transactions on microwave theory and techniques, vol. 72, no. 6, pp. 3554-3563, 2024.

[12]

A. Krivovitca et al., "Cross-Over Wire-Bonding for Millimeter-Wave Applications," IEEE Electron Device Letters, vol. 44, no. 12, pp. 2019-2022, 2023.

[13]

B. Beuerle et al., "Integrating InP MMICs and Silicon Micromachined Waveguides for Sub-THz Systems," IEEE Electron Device Letters, vol. 44, no. 10, pp. 1800-1803, 2023.

[14]

M. Mehrabi Gohari et al., "On-Chip Integration of Orthogonal Subsystems Enabled by Broadband Twist at 220–325 GHz," IEEE transactions on microwave theory and techniques, pp. 1-0, 2023.

[15]

M. Seidi et al., "A Novel Demixing Algorithm for Joint Target Detection and Impulsive Noise Suppression," IEEE Communications Letters, vol. 26, no. 11, pp. 2750-2754, 2022.

[16]

X. Zhao, O. Glubokov and J. Oberhammer, "A Silicon-Micromachined Waveguide Platform with Axial Ports for Integrated Sub-THz Filters," IEEE transactions on microwave theory and techniques, vol. 70, no. 2, pp. 1221-1232, 2022.

[17]

C. Bartlett et al., "Compact Triangular-Cavity Singlet-Based Filters in Stackable Multi-Layer Technologies," IEEE Transactions on Terahertz Science and Technology, vol. 12, no. 5, pp. 540-543, 2022.

[18]

P. A. Drozdz et al., "Highly efficient absorption of THz radiation using waveguide-integrated carbon nanotube/cellulose aerogels," APPLIED MATERIALS TODAY, vol. 29, 2022.

[19]

S. Smirnov et al., "Sub‐THz Phase Shifters Enabled by Photoconductive Single‐Walled Carbon Nanotube Layers," Advanced Photonics Research, pp. 2200042-2200042, 2022.

[20]

J. Campion et al., "Ultra‐Wideband Integrated Graphene‐Based Absorbers for Terahertz Waveguide Systems," Advanced Electronic Materials, vol. 8, no. 9, pp. 2200106-2200106, 2022.

[21]

M. Horberg et al., "A 110-170-GHz Non-Galvanic Interface for Integrating Silicon Micromachined Chips With Metallic Waveguide Systems," IEEE transactions on microwave theory and techniques, vol. 69, no. 8, pp. 3667-3674, 2021.

[22]

A. Przewłoka et al., "Characterization of Silver Nanowire Layers in the Terahertz Frequency Range," Materials, vol. 14, no. 23, pp. 7399, 2021.

[23]

X. Zhao and J. Oberhammer, "HF Under-Etching Prevention for Advanced THz Micromachined Waveguide Devices," Journal of microelectromechanical systems, vol. 30, no. 3, pp. 334-336, 2021.

[24]

X. Zhao et al., "Micromachined Subterahertz Waveguide-Integrated Phase Shifter Utilizing Supermode Propagation," IEEE transactions on microwave theory and techniques, vol. 69, no. 7, pp. 3219-3227, 2021.

[25]

J. Campion and J. Oberhammer, "Silicon Micromachined Waveguide Calibration Standards for Terahertz Metrology," IEEE transactions on microwave theory and techniques, vol. 69, no. 8, pp. 3927-3942, 2021.

[26]

A. Gomez-Torrent et al., "A 38 dBi Gain, Low-Loss, Flat Array Antenna for 320 GHz to 400 GHz Enabled by Silicon-On-Insulator Micromachining," IEEE Transactions on Antennas and Propagation, vol. 68, no. 6, pp. 4450-4458, 2020.

[27]

A. Gomez-Torrent et al., "A Low-Profile and High-Gain Frequency Beam Steering Subterahertz Antenna Enabled by Silicon Micromachining," IEEE Transactions on Antennas and Propagation, vol. 68, no. 2, pp. 672-682, 2020.

[28]

A. Krivovitca et al., "Micromachined Silicon-Core Substrate-Integrated Waveguides at 220-330 GHz," IEEE transactions on microwave theory and techniques, vol. 68, no. 12, pp. 5123-5131, 2020.

[29]

A. Gomez-Torrent, "Micromachined Waveguide Interposer for the Characterization of Multi-port Sub-THz Devices," Journal of Infrared, Millimeter and Terahertz Waves, 2020.

[30]

X. Zhao et al., "Silicon Micromachined D-Band Diplexer Using Releasable Filling Structure Technique," IEEE transactions on microwave theory and techniques, vol. 68, no. 8, pp. 3448-3460, 2020.

[31]

O. Glubokov et al., "Investigation of Fabrication Accuracy and Repeatability of High-Q Silicon-Micromachined Narrowband Sub-THz Waveguide Filters," IEEE transactions on microwave theory and techniques, vol. 67, no. 9, pp. 3696-3706, 2019.

[32]

O. Glubokov et al., "Micromachined Filters at 450 GHz With 1% Fractional Bandwidth and Unloaded Q Beyond 700," IEEE Transactions on Terahertz Science and Technology, vol. 9, no. 1, 2019.

[33]

P. B. Makhalov, D. Lioubtchenko and J. Oberhammer, "Semiconductor-Metal-Grating Slow Wave Amplifier for Sub-THz Frequency Range," IEEE Transactions on Electron Devices, vol. 66, no. 10, pp. 4413-4418, 2019.

[34]

S. Smirnov, D. Lioubtchenko and J. Oberhammer, "Single-walled carbon nanotube layers for millimeter-wave beam steering," Nanoscale, 2019.

[35]

J. Campion et al., "Toward Industrial Exploitation of THz Frequencies : Integration of SiGe MMICs in Silicon-Micromachined Waveguide Systems," IEEE Transactions on Terahertz Science and Technology, vol. 9, no. 6, pp. 624-636, 2019.

[36]

S. Smirnov et al., "Wavelength-dependent photoconductivity of single-walled carbon nanotube layers," RSC Advances, vol. 9, no. 26, pp. 14677-14682, 2019.

[37]

B. Beuerle et al., "A Very Low Loss 220–325 GHz Silicon Micromachined Waveguide Technology," IEEE Transactions on Terahertz Science and Technology, vol. 8, no. 2, pp. 248-250, 2018.

[38]

A. Gomez-Torrent, U. Shah and J. Oberhammer, "Compact silicon-micromachined wideband 220 – 330 GHz turnstile orthomode transducer," IEEE Transactions on Terahertz Science and Technology, vol. 9, no. 1, pp. 38-46, 2018.

[39]

I. V. Anoshkin et al., "Freeze-Dried Carbon Nanotube Aerogels for High-Frequency Absorber Applications," ACS Applied Materials and Interfaces, vol. 10, no. 23, pp. 19806-19811, 2018.

[40]

U. Shah et al., "Low Loss High Linearity RF Interposers Enabled by Through-Glass Vias," IEEE Microwave and Wireless Components Letters, vol. 28, no. 11, pp. 960-962, 2018.

[41]

S. Smirnov et al., "Optically controlled dielectric properties of single-walled carbon nanotubes for terahertz wave applications," Nanoscale, vol. 10, no. 26, pp. 12291-12296, 2018.

[42]

U. Shah et al., "A 500–750 GHz RF MEMS Waveguide Switch," IEEE Transactions on Terahertz Science and Technology, vol. 7, no. 3, pp. 326-334, 2017.

[43]

F. Töpfer, L. Emtestam and J. Oberhammer, "Long-Term Monitoring of Skin Recovery by Micromachined Microwave Near-Field Probe," IEEE Microwave and Wireless Components Letters, vol. 27, no. 6, pp. 605-607, 2017.

[44]

H. Frid et al., "Optimization of Micromachined Millimeter-Wave Planar Silicon Lens Antennas with Concentric and Shifted Matching Regions," Progress In Electromagnetics Research C, vol. 79, pp. 17-29, 2017.

[45]

U. Shah et al., "Submillimeter-Wave 3.3-bit RF MEMS Phase Shifter Integrated in Micromachined Waveguide," IEEE Transactions on Terahertz Science and Technology, vol. 6, no. 5, pp. 706-715, 2016.

[46]

S. J. Bleiker et al., "High-Aspect-Ratio Through Silicon Vias for High-Frequency Application Fabricated by Magnetic Assembly of Gold-Coated Nickel Wires," IEEE Transactions on Components, Packaging, and Manufacturing Technology, vol. 5, no. 1, pp. 21-27, 2015.

[47]

F. Töpfer, S. Dudorov and J. Oberhammer, "Millimeter-Wave Near-Field Probe Designed for High-Resolution Skin Cancer Diagnosis," IEEE transactions on microwave theory and techniques, vol. 63, no. 6, pp. 2050-2059, 2015.

[48]

F. Töpfer and J. Oberhammer, "Millimeter-Wave Tissue Diagnostics : The most promising fields for medical applications," IEEE Microwave Magazine, vol. 16, no. 4, pp. 97-113, 2015.

[49]

U. Shah, M. Sterner and J. Oberhammer, "Analysis of Linearity Deterioration in Multidevice RF MEMS Circuits," IEEE Transactions on Electron Devices, vol. 61, no. 5, pp. 1529-1535, 2014.

[50]

D. Dancila et al., "Millimeter wave silicon micromachined waveguide probe as an aid for skin diagnosis - results of measurements on phantom material with varied water content," Skin research and technology, vol. 20, no. 1, pp. 116-123, 2014.

[51]

U. Shah et al., "Permeability Enhancement by Multilayer Ferromagnetic Composites for Magnetic-Core On-Chip Inductors," IEEE Microwave and Wireless Components Letters, vol. 24, no. 10, pp. 677-679, 2014.

[52]

T. Ebefors and J. Oberhammer, "Through-Silicon Vias and 3D Inductors for RF Applications," Microwave journal (International ed.), vol. 57, no. 2, pp. 80, 2014.

[53]

Z. Baghchehsaraei et al., "Waveguide-integrated MEMS-based phase shifter for phased array antenna," IET Microwaves, Antennas & Propagation, vol. 8, no. 4, pp. 235-243, 2014.

[54]

U. Shah, M. Sterner and J. Oberhammer, "High-Directivity MEMS-Tunable Directional Couplers for 10–18-GHz Broadband Applications," IEEE transactions on microwave theory and techniques, vol. 61, no. 9, pp. 3236-3246, 2013.

[55]

Z. Baghchehsaraei et al., "Integration of microwave MEMS devices into rectangular waveguide with conductive polymer interposers," Journal of Micromechanics and Microengineering, vol. 23, no. 12, pp. 125020, 2013.

[56]

Z. Baghchehsaraei et al., "MEMS reconfigurable millimeter-wave surface for V-band rectangular-waveguide switch," International Journal of Microwave and Wireless Technologies, vol. 5, no. 3, pp. 341-349, 2013.

[57]

U. Shah, M. Sterner and J. Oberhammer, "Multi-Position RF MEMS Tunable Capacitors Using Laterally Moving Sidewalls of 3-D Micromachined Transmission Lines," IEEE transactions on microwave theory and techniques, vol. 61, no. 6, pp. 2340-2352, 2013.

[58]

Z. Baghchehsaraei and J. Oberhammer, "Parameter Analysis of Millimeter-Wave Waveguide Switch Based on a MEMS-Reconfigurable Surface," IEEE transactions on microwave theory and techniques, vol. 61, no. 12, pp. 4396-4406, 2013.

[59]

M. Sterner and J. Oberhammer, "Symmetrical Anti-Directional Metallization for Stress-Compensation of Transfer-Bonded Monocrystalline Silicon Membranes," Journal of microelectromechanical systems, vol. 22, no. 1, pp. 195-205, 2013.

[60]

N. Somjit and J. Oberhammer, "Three-dimensional micromachined silicon-substrate integrated millimetre-wave helical antennas," IET Microwaves, Antennas & Propagation, vol. 7, no. 4, pp. 291-298, 2013.

[61]

N. Somjit and J. Oberhammer, "Design Approach for Return-Loss Optimisation of Multi-Stage Millimetre-Wave MEMS Dielectric-Block Phase Shifters," IET Microwaves, Antennas & Propagation, vol. 6, pp. 1429-1436, 2012.

[62]

D. Chicherin et al., "Analog-type millimeter-wave phase shifters based on MEMS tunable high-impedance surface and dielectric rod waveguide," International Journal of Microwave and Wireless Technologies, vol. 3, no. 5, pp. 533-538, 2011.

[63]

M. Sterner et al., "Electrochemically Assisted Maskless Selective Removal of Metal Layers for Three-Dimensional Micromachined SOI RF MEMS Transmission Lines and Devices," Journal of microelectromechanical systems, vol. 20, no. 4, pp. 899-908, 2011.

[64]

M. Sterner et al., "Microwave MEMS Devices Designed for Process Robustness and Operational Reliability," International Journal of Microwave and Wireless Technology, vol. 3, no. 5, pp. 547-563, 2011.

[65]

N. Somjit, G. Stemme and J. Oberhammer, "Power Handling Analysis of High-Power W-Band All-Silicon MEMS Phase Shifters," IEEE Transactions on Electron Devices, vol. 58, no. 5, pp. 1548-1555, 2011.

[66]

N. Somjit, G. Stemme and J. Oberhammer, "Deep-Reactive-Ion-Etched Wafer-Scale-Transferred All-Silicon Dielectric-Block Millimeter-Wave MEMS Phase Shifters," Journal of microelectromechanical systems, vol. 19, no. 1, pp. 120-128, 2010.

[67]

M. Sterner et al., "Static Zero-Power-Consumption Coplanar Waveguide Embedded DC-to-RF Metal-Contact MEMS Switches in Two-Port and Three-Port Configuration," IEEE Transactions on Electron Devices, vol. 57, no. 7, pp. 1659-1669, 2010.

[68]

N. Somjit, G. Stemme and J. Oberhammer, "Binary-Coded 4.25-bit W-Band Monocrystalline-Silicon MEMS Multistage Dielectric-Block Phase Shifters," IEEE transactions on microwave theory and techniques, vol. 57, no. 11, pp. 2834-2840, 2009.

[69]

F. Ke, J. Miao and J. Oberhammer, "A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm," Journal of microelectromechanical systems, vol. 17, no. 6, pp. 1447-1459, 2008.

[70]

M. Tang, A. Q. Liu and J. Oberhammer, "A silicon-on-glass single-pole-double-throw (SPDT) switching circuit integrated with a silicon-core metal-coated transmission line," Journal of Micromechanics and Microengineering, vol. 18, no. 9, 2008.

[71]

S. Braun, J. Oberhammer and G. Stemme, "Row/column addressing scheme for large electrostatic actuator MEMS switch arrays and optimization of the operational reliability by statistical analysis," Journal of microelectromechanical systems, vol. 17, no. 5, pp. 1104-1113, 2008.

[72]

S. Braun, J. Oberhammer and G. Stemme, "Single-chip MEMS 5x5 and 20x20 double-pole single-throw switch arrays for automating telecommunication networks," Journal of Micromechanics and Microengineering, vol. 18, no. 1, pp. 015014, 2008.

[73]

A. B. Yu et al., "Characterization and optimization of dry releasing for the fabrication of RF MEMS capacitive switches," Journal of Micromechanics and Microengineering, vol. 17, no. 10, pp. 2024-2030, 2007.

[74]

P. Gkotsis et al., "Thin film crystal growth template removal : Application to stress reduction in lead zirconate titanate microstructures," Applied Physics Letters, vol. 91, no. 16, 2007.

[75]

J. Oberhammer, A. Q. Liu and G. Stemme, "Time-efficient quasi-static algorithm for simulation of complex single-sided clamped electrostatic actuators," Journal of microelectromechanical systems, vol. 16, no. 2, pp. 373-382, 2007.

[76]

J. Oberhammer and G. Stemme, "Active opening force and passive contact force electrostatic switches for soft metal contact materials," Journal of microelectromechanical systems, vol. 15, no. 5, pp. 1235-1242, 2006.

[77]

J. Oberhammer et al., "Mechanically tri-stable, true single-pole-double-throw (SPDT) switches," Journal of Micromechanics and Microengineering, vol. 16, no. 11, pp. 2251-2258, 2006.

[78]

J. Oberhammer and G. Stemme, "BCB contact printing for patterned adhesive full-wafer bonded 0-level packages," Journal of microelectromechanical systems, vol. 14, no. 2, pp. 419-425, 2005.

[79]

J. Oberhammer and G. Stemme, "Design and fabrication aspects of an S-shaped film actuator based DC to RF MEMS switch," Journal of microelectromechanical systems, vol. 13, no. 3, pp. 421-428, 2004.

[80]

J. Oberhammer and G. Stemme, "Low-voltage high-isolation DC-to-RF MEMS switch based on an S-shaped film actuator," IEEE Transactions on Electron Devices, vol. 51, no. 1, pp. 149-155, 2004.

[81]

J. Oberhammer, F. Niklaus and G. Stemme, "Sealing of adhesive bonded devices on wafer level," Sensors and Actuators A-Physical, vol. 110, no. 1-3, pp. 407-412, 2004.

[82]

J. Oberhammer, F. Niklaus and G. Stemme, "Selective wafer-level adhesive bonding with benzocyclobutene for fabrication of cavities," Sensors and Actuators A-Physical, vol. 105, no. 3, pp. 297-304, 2003.

Conference papers

[83]

M. Reza Seidi Goldar, A. Karimi and J. Oberhammer, "A Novel Frequency-Sweeping Scanning Notch Beam Radar at 238-248 GHz," in EuRAD 2024, 2024 21st European Radar Conference, 22-27 September 2024, Paris, France, 2024.

[84]

M. Rezaei Golghand et al., "Analysis of the Interaction of laser-induced Solid-State Plasma with Electromagnetic Waves in Silicon Waveguides at 67-220 GHz," in Proceedings 18th European Conference on Antennas and Propagation (EuCAP), 2024.

[85]

A. Madannejad et al., "Graded Index Lens Antenna in Silicon Micromachining with Circular Polarization at 500-750 GHz," in 27th European Microwave Conference (EuMC 2024), Paris, France, 24-26 Sep 2024, 2024.

[86]

A. Madannejad et al., "High-Gain and Circular Polarization Silicon-Micromachined Lens Antennas at 500-750 GHz," in 18th European Conference on Antennas and Propagation, EuCAP 2024, 2024.

[87]

A. Karimi, U. Shah and J. Oberhammer, "Micromachined Waveguide-Integrated Sub-THz Crossover Switch," in 2024 IEEE/MTT-S International Microwave Symposium, IMS 2024, 2024, pp. 227-230.

[88]

M. Mehrabi Gohari, O. Glubokov and J. Oberhammer, "Novel Negative Coupling Structure for Rectangular Waveguide Cavity Filters," in Proceedings IEEE International Microwave Filter Workshop IMFW 2024, 2024.

[89]

O. Glubokov et al., "On Modelling of Balanced Filters," in IThe 2nd IEEE International Microwave Filter Workshop (IMFW), February 21-23, 2024 Cocoa Beach, Florida, USA, 2024.

[90]

M. Rezaei Golghand et al., "Attenuation of Electromagnetic waves in Plasma in Ku band," in Swedish Microwave Days 2023, 2023.

[91]

S. An et al., "Automotive In-Cabin Object Detection and Passenger Monitoring with Sub-THz Radar System," in Swedish Microwave Days 2023, 2023.

[92]

A. Madannejad and J. Oberhammer, "Channel Bounding modeling for THz Communication," in Swedish Microwave days 2023, 2023.

[93]

A. Karimi, U. Shah and J. Oberhammer, "Compact High-isolation Sub-THz Micro-electromechanical SPST Switch," in 2023 53rd European Microwave Conference, EuMC 2023, 2023.

[94]

O. Glubokov et al., "On Modelling of Balanced Filters," in 2024 Ieee International Microwave Filter Workshop, IMFW, 2023, pp. 183-186.

[95]

A. Karimi, U. Shah and J. Oberhammer, "Silicon-Micromachined THz Radar Frontend," in Swedish Microwave Days 2023, 2023.

[96]

A. Karimi, U. Shah and J. Oberhammer, "Sub-THz Silicon-Micromachined Reconfigurable Beam-Steering Frontend," in 2023 53rd European Microwave Conference, EuMC 2023, 2023.

[97]

A. Karimi, U. Shah and J. Oberhammer, "Sub-THz Single-Pole-Single-Thru Microelectromechanical Switch," in Swedish Microwave Days, KTH, Stockholm, 23-25 May 2023, 2023.

[98]

N. Xenidis et al., "Waveguide Measurements of Highly Anisotropic Graphene Augmented Inorganic Nanofibers," in 2023 53rd European Microwave Conference, EuMC 2023, 2023, pp. 576-579.

[99]

O. Glubokov et al., "Compact W-band Silicon-Micromachined Filters with Increased Fabrication Robustness," in 2022 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM (IMS 2022), 2022, pp. 329-332.

[100]

A. Karimi and J. Oberhammer, "Design of an Amplitude-Tapered Corporate-Feed Slot Array Antenna with Reduced Side-Lobe Level for Silicon Micromachining," in 2022 16TH EUROPEAN CONFERENCE ON ANTENNAS AND PROPAGATION (EUCAP), 2022.

[101]

S. Smirnov et al., "Generation of High-order Modes in Sub-THz Dielectric Waveguides by Misalignment of the Transition Structure," in 2022 IEEE/MTT-S International Microwave Symposium - IMS 2022, 2022, pp. 479-482.

[102]

M. Reza Seidi Goldar, J. Hassanpour and J. Oberhammer, "Concept analysis of a frequency-sweeping delta/sigma beam-switching radar using machine learning," in 2021 18Th European Radar Conference (EURAD), 2021, pp. 145-148.

[103]

O. Glubokov et al., "Micromachined Bandpass Filters with Enhanced Stopband Performance and Q-factor of 950 at 700 GHz," in Proceedings IEEE MTT-S International Microwave Symposium Digest, 2021, pp. 204-206.

[104]

A. Przewłoka et al., "Single-walled carbon nanotube phase shifters for low THz frequencies," in The 11th International Conference on Metamaterials, Photonic Crystals and Plasmonics, META 2021, 2021, pp. 1058-1059.

[105]

J. Campion et al., "Ultra-wideband waveguide embedded graphene-based THz absorber," in The 11th International Conference on Metamaterials, Photonic Crystals and Plasmonics, META 2021, 2021, pp. 926-927.

[106]

P. Drozdz et al., "W-band waveguide embedded nanofiber absorber," in 2021 46Th International Conference On Infrared, Millimeter And Terahertz Waves (IRMMW-THZ), 2021.

[107]

A. Gomez-Torrent, U. Shah and J. Oberhammer, "Silicon Micromachined Receiver Calibration Waveguide Switch for THz Frequencies," in International Symposium on Space Terahertz Technology (ISSTT),Gothenburg, Sweden, April 15-17, 2019, 2020.

[108]

X. Zhao, O. Glubokov and J. Oberhammer, "Silicon-on-Insulator based Micromachining Technology for Sub-Terahertz Waveguide Devices," in 2020 IEEE Asia-pacific Microwave Conference (APMC), 2020, pp. 920-922.

[109]

Y. Li et al., "D-band SiGe transceiver modules based on silicon-micromachined integration," in Asia-Pacific Microwave Conference Proceedings, APMC, 2019, pp. 883-885.

[110]

S. Smirnov et al., "Dielectric Rod Antenna Array for Photonic-Based Sub-Terahertz Beamforming," in International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, 2019.

[111]

Z. Xinghai et al., "Highly compact silicon micromachined filter with axial ports at sub-terahertz band," in Asia-Pacific Microwave Conference Proceedings, APMC, 2019, pp. 768-770.

[112]

D. Dancila et al., "Leaky Wave Antenna at 300 GHz in Silicon Micromachined Waveguide Technology," in 2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2019.

[113]

J. Oberhammer, "Overview and recent achievements in silicon micromachining for THz systems," in Proceedings of European Microwave Conference in Central Europe, EuMCE 2019, 2019, pp. 23-26.

[114]

A. Morales et al., "Photonic-Based Beamforming System for Sub-THz Wireless Communications," in 2019 European Microwave Conference in Central Europe (EuMCE), Prague, Czech Republic, May 13-15 2019, 2019, pp. 253-256.

[115]

J. Campion, U. Shah and J. Oberhammer, "Silicon-Micromachined Waveguide Calibration Shims for Terahertz Frequencies," in Proceedings 2019 IEEE MTT-S International Microwave Symposium (IMS), 2019.

[116]

U. Shah, A. Gomez Torrent and J. Oberhammer, "Ultra-Compact Micromachined Beam-Steering Antenna Front-End for High-Resolution Sub-Terahertz Radar," in 2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2019.

[117]

W. Kuramoto et al., "Wideband Design of a 350GHz-band Corporate-feed Waveguide Slot Array Antenna using Gold-coating Silicon Wafers with Different Thickness," in 2019 International Symposium on Antennas and Propagation, ISAP 2019 - Proceedings, 2019.

[118]

Z. S. He et al., "A 140 GHz Transmitter with an Integrated Chip-to-Waveguide Transition using 130nm SiGe BiCMOS Process," in 2018 ASIA-PACIFIC MICROWAVE CONFERENCE PROCEEDINGS (APMC), 2018, pp. 28-30.

[119]

A. Gomez-Torrent, U. Shah and J. Oberhammer, "A Silicon Micromachined 220-330 GHz Turnstile Orthomode Transducer (OMT) in a Low-Loss Micromachining Fabrication Platform," in The 8th ESA Workshop on Millimetre-Wave Technology and Applications, 10-12 December 2018, ESA/ESTEC, Noordwijk, The Netherlands, 2018.

[120]

U. Shah and J. Oberhammer, "A Very High Isolation (>50 dB) and Low Insertion Loss (<0.55 dB) 140-220 GHz MEMSWaveguide Switch," in The 8th ESA Workshop on Millimetre-Wave Technology and Applications, 2018.

[121]

A. Gomez-Torrent, U. Shah and J. Oberhammer, "Advanced Millimetre-Wave Waveguide Components Enabled by Silicon Micromachining," in Swedish Microwave Days, 2018.

[122]

J. Campion et al., "An Ultra Low-Loss Silicon-Micromachined Waveguide Filter for D-Band Telecommunication Applications," in 2018 IEEE/MTT-S International Microwave Symposium, 2018, pp. 583-586.

[123]

S. Smirnov et al., "Carbon Nanotube Layer Modeling for Computer Simulation of Optically Controlled Phase Shifters," in 2018 48th European Microwave Conference (EuMC), 2018, pp. 827-830.

[124]

B. Beuerle et al., "Low-Loss Silicon Micromachined Waveguides Above 100 GHz Utilising Multiple H-plane Splits," in Proceedings of the 48th European Microwave Conference, Madrid, October 1-3, 2018, 2018, pp. 1041-1044.

[125]

A. Krivovitca et al., "Micromachined Silicon-core Substrate-integrated Waveguides with Coplanar-probe Transitions at 220-330 GHz," in Transmission-line structures : Advances in Millimeter-Wave Integrated Waveguide Components and Transitions, 2018, pp. 190-193.

[126]

J. Oberhammer, "Micromachined THz Systems - enabling the large-scale exploitation of the THz frequency spectrum," in 2018 ASIA-PACIFIC MICROWAVE CONFERENCE PROCEEDINGS (APMC), 2018, pp. 25-27.

[127]

B. Beuerle, U. Shah and J. Oberhammer, "Micromachined Waveguides with Integrated Silicon Absorbers and Attenuators at 220–325 GHz," in IEEE MTT-S International Microwave Symposium, IEEE conference proceedings, 2018, 2018.

[128]

D. Lyubchenko et al., "Millimeter Wave Beam Steering Based on Optically Controlled Carbon Nanotube Layers," in 2018 43rd International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2018.

[129]

S. Smirnov et al., "Millimeter Wave Phase Shifter Based on Optically Controlled Carbon Nanotube Layers," in 2018 43rd International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2018.

[130]

O. Glubokov et al., "Multilayer Micromachined Dual-Mode Elliptic Cavities Filter With Axial Feeding at 270 GHz," in 14th GigaHertz Symposium (Swedish Microwave Days), Lund, Sweden, 24-25 May 2018, 2018.

[131]

J. Oberhammer, "THz MEMS - Micromachining enabling new solutions at millimeter and submillimeter-wave frequencies (invited paper)," in Asia-Pacific Microwave Conference Proceedings, APMC, 2018, pp. 81-84.

[132]

A. Gomez-Torrent, U. Shah and J. Oberhammer, "Wideband 220 – 330 GHz Turnstile OMT Enabled by Silicon Micromachining," in 2018 IEEE MTT-S International Microwave Symposium (IMS), 2018, pp. 1511-1514.

[133]

R. Malmqvist et al., "A 220-325 GHz Low-Loss Micromachined Waveguide Power Divider," in Proceedings of the 2017 Asia-Pacific Microwave Conference (APMC), 2017, pp. 291-294.

[134]

J. Svedin et al., "A 230-300 GHz Low-Loss Micromachined Waveguide Hybrid Coupler," in Proceedings of the 47th European Microwave Conference,, 2017, pp. 616-619.

[135]

A. Hassona et al., "A non-galvanic D-band MMIC-to-waveguide transition using eWLB packaging technology," in 2017 IEEE MTT-S International Microwave Symposium (IMS), 2017, pp. 510-512.

[136]

J. Campion, U. Shah and J. Oberhammer, "Elliptical alignment holes enabling accurate direct assembly of micro-chips to standard waveguide flanges at sub-THz frequencies," in 2017 IEEE MTT-S International Microwave Symposium (IMS), 2017, pp. 1262-1265.

[137]

B. Beuerle et al., "Integrated Micromachined Waveguide Absorbers at 220 – 325 GHz," in Proceedings of the 47th European Microwave Conference, Nuremberg, October 8-13, 2017, 2017, pp. 695-698.

[138]

D. Dancila et al., "Micromachined Cavity Resonator Sensors for on Chip Material Characterisation in the 220–330 GHz band," in Proceedings of the 47th European Microwave Conference, Nuremberg, October 8-13, 2017, 2017, pp. 938-941.

[139]

O. Glubokov et al., "Micromachined Multilayer Bandpass Filter at 270 GHz Using Dual-Mode Circular Cavities," in 2017 IEEE MTT-S International Microwave Symposium, 2017, pp. 1449-1452.

[140]

P. B. Makhalov, D. Lioubtchenko and J. Oberhammer, "Simulations of a semiconductor/metal-grating slow-wave amplifier for sub-THz range," in 2017 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, 2017.

[141]

P. B. Makhalov, D. Lioubtchenko and J. Oberhammer, "Study of the slow-wave interaction in a three valley semiconductor in high electric fields," in 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, 2017.

[142]

D. V. Lioubtchenko et al., "W-band phase shifter based on optimized optically controlled carbon nanotube layer," in 2017 IEEE MTT-S International Microwave Symposium (IMS), 2017, pp. 1188-1191.

[143]

U. Shah et al., "500-550 GHz Waveguide Integrated RF MEMS Phase Sifter," in GigaHertz Symposium 2016, Swedish Microwave days. 15-16 March., 2016.

[144]

U. Shah et al., "500-750 GHz submillimeter-wave MEMS waveguide switch," in 2016 IEEE MTT-S International Microwave Symposium (IMS), 2016.

[145]

F. Töpfer, L. Emtestam and J. Oberhammer, "Diagnosis of malignant melanoma by micromachined near-field millimeter-wave probe," in International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, 2016.

[146]

U. Shah et al., "Micromachined Waveguide Integrated RF MEMS Switch Operating between 500-750 GHz," in The 17th edition of the International Symposium on RF-MEMS and RF-MICROSYSTEMS (MEMSWAVE 2016), 2016.

[147]

J. Oberhammer, "THz MEMS - Micromachining enabling new solutions at millimeter and submillimeter frequencies," in 2016 Global Symposium on Millimeter Waves, GSMM 2016 and ESA Workshop on Millimetre-Wave Technology and Applications, 2016.

[148]

J. Liljeholm et al., "Through-Glass-Via Enabling Low Loss High-Linearity RF Components," in 11th Micronano System Workshop 2016 (MSW 2016), 2016.

[149]

U. Shah et al., "500-600 GHz RF MEMS Based Tunable Stub Integrated in Micromachined Rectangular Waveguide," in 2015 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM (IMS), 2015.

[150]

U. Shah et al., "500-600 GHz Submillimeter-Wave 3.3 bit RF MEMS Phase Shifter Integrated in Micromachined Waveguide," in Microwave Symposium (IMS), 2015 IEEE MTT-S International, 2015, pp. 1-4.

[151]

U. Shah et al., "Micromachined Waveguide Integrated RF MEMS Phase Sifter Operating between 500-600 GHz," in 16th edition of the International Symposium on RF-MEMS and RF-MICROSYSTEMS. 29 june -1 July, 2015.

[152]

J. Liljeholm et al., "Multilayer ferromagnetic composites enabling on-chip magnetic-core inductors beyond 1 GHZ," in Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on, 2015, pp. 811-814.

[153]

F. Töpfer, L. Emtestam and J. Oberhammer, "Dermatological verification of micromachined millimeter-wave skin-cancer probe," in IEEE MTT-S International Microwave Symposium Digest, 2014.

[154]

Z. Baghchehsaraei and J. Oberhammer, "MEMS-reconfigurable wavguide iris for switchable V-band cavity resonators," in 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), 2014, pp. 206-209.

[155]

Z. Baghchehsaraei, J. Åberg and J. Oberhammer, "Mems-reconfigurable millimeter-wave surfaces for waveguide switches, irises and resonators," in The GigaHertz 2014 Symposium, 2014.

[156]

F. Töpfer, S. Dudorov and J. Oberhammer, "2-Dimensional near-field millimeter-wave scanning with micromachined probe for skin cancer diagnosis," in Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, 2013, pp. 1057-1060.

[157]

U. Shah, M. Sterner and J. Oberhammer, "Analysis of linearity degradation in multi-stage RF MEMS circuits," in Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, 2013, pp. 749-752.

[158]

U. Shah and J. Oberhammer, "Characterization of High-Q Laterally Moving RF MEMS Tuneable Capacitor," in European Microwave Week 2013, EuMW 2013 - Conference Proceedings; EuMC 2013 : 43rd European Microwave Conference, 2013, pp. 1323-1326.

[159]

U. Shah and J. Oberhammer, "Characterization of High-Q Laterally Moving RF MEMS Tuneable Capacitor," in 2013 8TH EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC), 2013, pp. 352-355.

[160]

F. Töpfer et al., "Micromachined near-field millimeter-wave medical sensor for skin cancer diagnosis," in 2013 7th European Conference on Antennas and Propagation (EuCAP), 2013, pp. 1550-1553.

[161]

Z. Baghchehsaraei et al., "Millimeter-Wave SPST Waveguide Switch Based on Reconfigurable MEMS Surface," in 2013 IEEE MTT-S International Microwave Symposium Digest (IMS), 2013, p. 6697774.

[162]

J. Oberhammer et al., "Monocrystalline‐Silicon Microwave MEMS," in Proceedings of PIERS 2013 in Stockholm, August 12-15, 2013, 2013, pp. 1933-1941.

[163]

U. Shah, M. Sterner and J. Oberhammer, "Nonlinearity Determination and Linearity Degradation in RF MEMS Multi-Device Circuits," in 14th International Symposium on RF MEMS and RF Microsystems (MEMSWAVE 2013); Potsdam, Germany, July 1-3, 2013, 2013.

[164]

Z. Baghchehsaraei and J. Oberhammer, "V-Band Single-Pole-Single-Throw Mems Rectangular waveguide Switch," in MME 2013 24th Micromechanics and Microsystems Europe Conference, 2013.

[165]

U. Shah, M. Sterner and J. Oberhammer, "Basic Concept of Tuneable MEMS Directional Couplers for Ultra‐Wideband Applications," in 13th International Symposium on RF MEMS and RF Microsystems (MEMSWAVE 2012),02-04 July 2012, Antalya, Turkey, 2012.

[166]

U. Shah, M. Sterner and J. Oberhammer, "Compact MEMS reconfigurable ultra-wideband 10-18 GHz directional couplers," in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2012, pp. 684-687.

[167]

A. Vorobyov et al., "Iris-based 2-bit waveguide phase shifters and transmit-array for automotive radar applications," in Proceedings of 6th European Conference on Antennas and Propagation, EuCAP 2012, 2012, pp. 3711-3715.

[168]

Z. Baghchehsaraei et al., "MEMS 30 µm-thick W-band Waveguide Switch," in 2012 42ND EUROPEAN MICROWAVE CONFERENCE (EUMC), 2012, pp. 1055-1058.

[169]

Z. Baghchehsaraei et al., "MEMS 30μm-thick W-band Waveguide Switch," in European Microwave Week 2012: "Space for Microwaves", EuMW 2012, Conference Proceedings - 7th European Microwave Integrated Circuits Conference, EuMIC 2012, 2012, pp. 675-678.

[170]

Z. Baghchehsaraei et al., "MEMS 30μm-thick W-band waveguide switch," in European Microwave Week 2012 : "Space for Microwaves", EuMW 2012, Conference Proceedings - 42nd European Microwave Conference, EuMC 2012, 2012, pp. 1055-1058.

[171]

F. Töpfer, S. Dudorov and J. Oberhammer, "Micromachined 100GHz near-field measurement probe for high-resolution microwave skin-cancer diagnosis," in IEEE MTT-S International Microwave Symposium Digest : 2012 IEEE MTT-S International Microwave Symposium, IMS 2012; Montreal, QC; Canada; 17 June 2012 through 22 June 2012, 2012, p. 6259671.

[172]

S. Dudorov, F. Töpfer and J. Oberhammer, "Micromachined-silicon W-band planar-lens antenna with metamaterial free-space matching," in Microwave Symposium Digest (MTT), 2012 IEEE MTT-S International, 2012, p. 6259654.

[173]

Z. Baghchehsaraei et al., "PHASED-ARRAY ANTENNA BASED ON MEMS FIN-LINE PHASESHIFTERS FOR W-BAND BEAM-STEERING APPLICATIONS," in GigaHertz Symposium 2012, 2012.

[174]

N. Somjit, G. Stemme and J. Oberhammer, "Performance optimization of multi-stage MEMS W-band dielectric-block phase-shifters," in European Microwave Week 2012: "Space for Microwaves", EuMW 2012, Conference Proceedings - 7th European Microwave Integrated Circuits Conference, EuMIC 2012, 2012, pp. 433-436.

[175]

Z. Du et al., "Reflection phase characterization of the MEMS-based high impedance surface," in European Microwave Week 2012: "Space for Microwaves", EuMW 2012, Conference Proceedings - 42nd European Microwave Conference, EuMC 2012, 2012, pp. 617-620.

[176]

N. Somjit and J. Oberhammer, "Semiconductor-Substrate Integrated 3D-Micromachined W-Band Helical Antennas," in Antennas and Propagation Society International Symposium (APSURSI), 2012 IEEE, 2012, p. 6349415.

[177]

J. Ala-Laurinaho et al., "TUMESA - MEMS tuneable metamaterials for smart wireless applications," in European Microwave Week 2012: "Space for Microwaves", EuMW 2012, Conference Proceedings - 7th European Microwave Integrated Circuits Conference, EuMIC 2012, 2012, pp. 95-98.

[178]

N. Somjit, G. Stemme and J. Oberhammer, "Thermal Characteristics and Power-Handling Capability of High-Power Millimeter-Wave MEMS Dielectric-Block Phase Shifters," in Gigahertz Symposium 2012. Stockholm, Sweden. March 6-7 2012, 2012.

[179]

G. E. H. Shhade et al., "Antenne à ondes de fuite à balayage angulaireà fréquence fixe à 77GHz," in 17èmes Journées Nationales Micro-ondes, 2011.

[180]

U. Shah, M. Sterner and J. Oberhammer, "Basic Concepts of Moving-Sidewall Tuneable Capacitors for RF MEMS Reconfigurable Filters," in 6th European Microwave Integrated Circuits (EuMIC) Conference, 2011, pp. 526-529.

[181]

U. Shah, M. Sterner and J. Oberhammer, "Basic Concepts of Moving-Sidewall Tuneable Capacitors for RF MEMS Reconfigurable Filters," in 2011 41ST EUROPEAN MICROWAVE CONFERENCE, 2011, pp. 1087-1090.

[182]

T. Zvolensky et al., "Leaky-wave antenna at 77 GHz," in Proceedings of the 41st European Microwave Conference, 2011, pp. 1039-1042.

[183]

A. Vorobyov et al., "MEMS based waveguide phase shifters for phased arrays in automotive radar applications," in Proceedings of the 5th European Conference on Antennas and Propagation (EUCAP), 2011, pp. 2087-2090.

[184]

U. Shah et al., "MULTI-POSITION LARGE TUNING-RANGE DIGITALLY TUNEABLE CAPACITORS EMBEDDED IN 3D MICROMACHINED TRANSMISSION LINES," in IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS), 2011, 2011, pp. 165-168.

[185]

U. Shah, M. Sterner and J. Oberhammer, "Quasi-Analog Multi-Step Tuning of Laterally-Moving Capacitive Elements Integrated in 3D MEMS Transmission Lines," in 12th International Symposium on RF MEMS and RF Microsystems, Athens, June 27-29, 2011, 2011.

[186]

D. Chicherini et al., "Analog type millimeter wave phase shifters based on MEMS tunable high-impedance surface in rectangular metal waveguide," in 2010 IEEE MTT-S International Microwave Symposium : May 23-28, 2010, Anahaeim, California, 2010, pp. 61-64.

[187]

N. Somjit, G. Stemme and J. Oberhammer, "Comparison of Thermal Characteristics of Novel RF MEMS Dielectric-Block Phase Shifter to Conventional MEMS Phase-Shifter Concepts," in European Microwave Week 2010, EuMW2010 : Connecting the World, Conference Proceedings, 2010, pp. 509-512.

[188]

M. Sterner et al., "Integration of microwave MEMS reconfigurable reflective surfaces in rectangular waveguide stubs," in 2010 Asia-Pacific Microwave Conference, APMC 2010, 2010, pp. 1825-1828.

[189]

N. Somjit, G. Stemme and J. Oberhammer, "Investigation of Power Handling Capability of Conventional and Novel All-Silicon RF MEMS Phase Shifters," in 11th International Symposium on RF MEMS and RF Microsystems (MEMSWAVE 2010). Otranto, Italy. June 28-30 2010, 2010.

[190]

F. Saharil et al., "LOW-TEMPERATURE CMOS-COMPATIBLE 3D-INTEGRATION OF MONOCRYSTALLINE-SILICON BASED PZT RF MEMS SWITCH ACTUATORS ON RF SUBSTRATES," in MEMS 2010 : 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2010, pp. 47-50.

[191]

D. Chicherin et al., "MEMS based high-impedance surface for millimetre wave dielectric rod waveguide phase shifter," in European Microwave Week 2010, EuMW2010 : Connecting the World, Conference Proceedings - European Microwave Conference, EuMC 2010, 2010, pp. 950-953.

[192]

D. Chicherin et al., "MEMS tunable metamaterials surfaces and their applications," in APMC 2010 : 2010 Asia-Pacific Microwave Conference proceedings : Dec. 7-10 Yokohama, Japan, 2010, pp. 239-242.

[193]

J. Oberhammer, M. Sterner and N. Somjit, "Monocrystalline-Silicon Microwave MEMS Devices," in Advanced Materials And Technologies For Micro/Nano-Devices, Sensors And Actuators, 2010, pp. 89-100.

[194]

N. Somjit, G. Stemme and J. Oberhammer, "Novel Low-loss 4.25-Bit All-Silicon Millimeter-Wave MEMS Phase Shifters for High-Performance W-Band Applications," in The 8th Micronano System Workshop. Stockholm, SWE. 04 May 2010 - 05 May 2010, 2010.

[195]

U. Shah et al., "RF MEMS tuneable capacitors based on moveable sidewalls in 3D micromachined coplanar transmission lines," in Microwave Conference Proceedings (APMC), 2010 Asia-Pacific, 2010, pp. 1821-1824.

[196]

N. Somjit, G. Stemme and J. Oberhammer, "Ultra-Wideband Low-loss All-Silicon MEMS Phase Shifters for High-Performance Electronic Beam-Steering Applications," in GigaHertz Symposium 2010. Lund, SWE. March 9-10 2010, 2010.

[197]

N. Somjit, G. Stemme and J. Oberhammer, "Novel concept of microwave mems reconfigurable 7X45^o multi-stage dielectric-block phase shifter," in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, 2009, pp. 15-18.

[198]

N. Somjit, G. Stemme and J. Oberhammer, "Phase Error and Nonlinearity Investigation of Millimeter-Wave MEMS 7-Stage Dielectric-Block Phase Shifters," in 2009 European microwave conference : Vols 1-3, 2009, pp. 1872-1875.

[199]

N. Somjit, G. Stemme and J. Oberhammer, "Phase Error and Nonlinearity Investigation of Millimeter-Wave MEMS 7-Stage Dielectric-Block Phase Shifters," in 2009 EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC 2009), 2009, pp. 519-522.

[200]

M. Sterner et al., "RF MEMS high-impedance tuneable metamaterials for millimeter-wave beam steering," in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, 2009, pp. 896-899.

[201]

F. Ke, J. Miao and J. Oberhammer, "Ruthenium/Gold hard-surface/low-resistivity contact metallization for polymer-encapsulated microswitch with stress-reduced corrugated SIN/SIO2 diaphragm," in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, 2009, pp. 860-863.

[202]

M. Sterner, G. Stemme and J. Oberhammer, "Wafer counter-bonding for integrating CTE-mismatched substrates and its application to MEMS tuneable metamaterials," in TRANSDUCERS 2009 : 15th International Conference on Solid-State Sensors, 2009, pp. 1722-1725.

[203]

M. Sterner et al., "Maskless selective electrochemically assisted wet etching of metal layers for 3D micromachined SOI RF MEMS devices," in MEMS 2008 : 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, pp. 383-386.

[204]

D. Chicherin et al., "Micro-fabricated High-impedance Surface for Millimeter Wave Beam Steering Applications," in 33RD INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES : VOLS 1 AND 2, 2008, pp. 574-576.

[205]

J. Oberhammer et al., "Microwave MEMS activities at the Royal Institute of Technology," in GigaHertz Symposium 2008. Göteborg, SWE. 5-6 March 2008, 2008.

[206]

N. Somjit, G. Stemme and J. Oberbammer, "Novel RF MEMS Mechanically Tunable Dielectric Phase Shifter," in 33RD INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES : VOLS 1 AND 2, 2008, pp. 643-644.

[207]

N. Somjit, G. Stemme and J. Oberhammer, "Reconfigurable Three-Dimensional Micromachined Dielectric-Loaded CPW Phase-Shifter," in 9th International Symposium on RF MEMS and RF Microsystems. Heraklion, Greece. 1-3 July 2008, 2008.

[208]

D. Chicherin et al., "Rectangular metal waveguide phase shifter controlled with MEMS high-impedance surface," in Proc. of the XXXI Finnish URSI Convention on Radio Science Electromagnetics 2008, 2008.

[209]

J. Oberhammer and G. Stemme, "Accuracy of quasi-static simulation methods as compared to full-dynamic analysis of nonlinear electrostatic MEMS actuators," in PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS : VOLS 1 AND 2, 2007, pp. 5-8.

[210]

M. Sterner et al., "Coplanar-waveguide embedded mechanically-bistable DC-to-RF MEMS switches," in 2007 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST : VOLS 1-6, 2007, pp. 359-362.

[211]

P. Gkotsis et al., "Crystal growth template removal : application to stress reduction in PZT microstructures," in Proc. International Symposium on Integrated Ferroelectrics 2007, 2007.

[212]

M. Sterner et al., "Deep-reactive-ion-etched 3D transmission lines with integrated mechanically multi-stable SPST and SPDT RF MEMS switches," in Proc. International Symposium on RF MEMS and RF Microsystems MEMSWAVE 2007, 2007.

[213]

S. Braun, J. Oberhammer and G. Stemme, "MEMS single-chip 5x5 and 20x20 double-switch arrays for telecommunication networks," in IEEE 20th International Conference on Micro Electro Mechanical Systems, 2007. MEMS, 2007, pp. 811-814.

[214]

M. Sterner et al., "Mechanically bi-stable in-plane switch with dual-stiffness actuators," in TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS : VOLS 1 AND 2, 2007, pp. U709-U710.

[215]

M. Stemer et al., "Mechanically tri-stable SPDT metal-contact MEMS switch embedded in 3D transmission line," in European Microwave Week 2007 Conference Proceedings, EuMW 2007 - 2nd European Microwave Integrated Circuits Conference, EuMIC 2007, 2007, pp. 153-156.

[216]

M. Sterner et al., "Mechanically tri-stable SPDT metal-contact MEMS switch embedded in 3D transmission line," in Proceedings of the 37th European Microwave Conference, EUMC, 2007, pp. 1225-1228.

[217]

S. Braun, J. Oberhammer and G. Stemme, "MEMS single-chip microswitch array for re-configuration of telecommunication networks," in 2006 European Microwave Conference : Vols 1-4, 2006, pp. 315-318.

[218]

J. Oberhammer et al., "Mechanically tri-stable in-line single-pole-double-throw all-metal switch," in MEMS 2006 : 19th IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest, 2006, pp. 898-901.

[219]

J. Oberhammer and G. Stemme, "Passive contact force and active opening force electrostatic switches for soft metal contact materials," in MEMS 2006 : 19th IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest, 2006, pp. 162-165.

[220]

M. Mowlér et al., "A 2-bit reconfigurable meander slot antenna with RF-MEMS switches," in Antennas and Propagation Society International Symposium, 2005 IEEE : volym 2A, 2005, pp. 396-399.

[221]

J. Oberhammer, A. Q. Liu and G. Stemme, "Numerical algorithm for quasi-static nonlinear simulation of touch-mode actuators with complex geometries and pre-stressed materials," in Transducers '05, Digest of Technical Papers, Vols 1 and 2, 2005, pp. 2119-2122.

[222]

J. Oberhammer and G. Stemme, "Contact printing for improved bond-strength of patterned adhesive full-wafer bonded 0-level packages," in MEMS 2004 : 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, pp. 713-716.

[223]

J. Oberhammer and G. Stemme, "S-shaped film actuator for low-voltage high-isolation mems metal contact switches," in MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, pp. 637-640.

[224]

J. Oberhammer and G. Stemme, "Incrementally etched electrical feedthroughs for wafer-level transfer of glass lid packages," in BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS : VOLS 1 AND 2, 2003, pp. 1832-1835.

[225]

J. Oberhammer, B. Lindmark and G. Stemme, "RF characterization of low-voltage high-isolation MEMS series switch based on a S-shaped film actuator," in PROCEEDINGS OF THE INTERNATIONAL 2003 SBMO/IEEE MTT-S INTERNATIONAL MICROWAVE AND OPTOELECTRONICS CONFERENCE - IMOC 2003 : VOLS I AND II, 2003, pp. 537-540.

[226]

J. Oberhammer, F. Niklaus and G. Stemme, "Sealing of Adhesive Bonded Devices on Wafer Level," in Proc. Eurosensors XVI, 2002, pp. 298-299.

[227]

J. Oberhammer, F. Niklaus and G. Stemme, "Selective Wafer Level Adhesive Bonding with Benzocyclobutene," in Proc. Micromechanics Europe MME 2001, 2001, pp. 54-57.

Chapters in books

[228]

R. Malmqvist et al., "Reconfigurable RF Circuits and RF-MEMS," in Microwave and Millimeter Wave Circuits and Systems : Emerging Design, Technologies, and Applications, : John Wiley & Sons, 2012, pp. 325-356.

[229]

N. Somjit, G. Stemme and J. Oberhammer, "Reconfigurable Three-Dimensional Micromachined Dielectric-Loaded CPW Phase Shifter," in Series in Micro and Nanoengineering : New developments in micro electro mechanical systems for radio frequency and millimeter wave applications, George Konstantinidis, Alexandru Müller, Dan Dascălu, Robert Plana Ed., 15th ed. : Publishing House of the Romanian Academy, 2009, pp. 163-167.

Non-peer reviewed

Conference papers

[230]

D. Dancila et al., "Leaky Wave Antenna at 300 GHz in KTH’s Micromachined Waveguide Technology," in AntennEMB Symposium 2018, 2018.

[231]

J. Campion et al., "Low-Loss Hollow and Silicon-Core Micromachined Waveguide Technologies Above 100 GHz," in GigaHertz Symposium 2018, Swedish Microwave Days 24-25 June, Lund, Sweden, 2018.

[232]

J. Oberhammer et al., "3D silicon micromachining – an enabling technology for high-performance millimeter and submillimeter-wave frequencies reconfigurable satellite front-ends," in 38th ESA Antenna Workshop on Innovative Antenna Systems and Technologies for Future Space Missions, 3-6 October 2017 Noordwijk, The Netherlands, 2017.

[233]

F. Töpfer, S. Dudorov and J. Oberhammer, "Characterization of high-resolution millimeter-wave measurement probe for skin tissue analysis," in 13th International Symposium on RF-MEMS and RF-Microsystems (MEMSWAVE 2012), 2012.

[234]

F. Töpfer et al., "High-resolution microwave skin cancer diagnostic tool based on micromachined interface," in Micronano System Workshop (MSW) 2012, 2012.

[235]

M. Sterner et al., "MEMS-tunable high-impedance surface millimeter-wave phase shifterfor dielectric-rod antenna beam forming," in GigaHertz 2012, 2012.

[236]

U. Shah, M. Sterner and J. Oberhammer, "RF MEMS RECONFIGURABLE FILTERS BASED ON MOVABLE SIDEWALLS OF A 3D MICROMACHINED TRANSMISSION LINE," in GigaHertz Symposium 2012, 2012.

[237]

U. Shah, M. Sterner and J. Oberhammer, "TUNEABLE DIRECTIONAL COUPLERS IN 3D MICROMACHINEDTRANSMISSION LINE FOR ULTRA-WIDEBAND APPLICATIONS," in GigaHertz Symposium 2012, 2012.

[238]

J. Oberhammer et al., "Microwave MEMS Activities at KTH- Royal Institute of Technology," in 8th Micronano System Workshop 2010 (MSW 2010). Stockholm, Sweden. May 4-5, 2010, 2010.

[239]

M. Sterner et al., "Millimeter-Wave RF MEMS Reconfigurable High-Impedance Surfaces for Radar Applications," in GigaHertz Symposium 2010, 2010.

[240]

M. Sterner, G. Stemme and J. Oberhammer, "Nanometer-scale flatness and reliability investigation of stress-compensated symmetrically-metallized monocrystalline-silicon multi-layer membranes," in 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2010, pp. 959-962.

[241]

M. Sterner et al., "RF MEMS Tuneable High-Impedance Metamaterial Surfaces for Millimeter-Wave Applications," in Proc. Micro Structure Workshop 2010, 2010.

[242]

M. Sterner et al., "Reliability investigation of stress-compensated metal-coated monocrystalline-silicon membranes for MEMS tuneable high-impedance surfaces," in 11th International Symposium on RF MEMS and RF Microsystems. Otranto, Italy. June 29 - July 1 2010, 2010.

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D. Chicherin et al., "MEMS tunable metamaterials for beam steering millimeter wave applications," in NATO-Advanced Research Workshop : Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators, 2009.

[244]

S. Braun, J. Oberhammer and G. Stemme, "MEMS crossbar switches for telecommunication networks," in Micro System Workshop 08, 2008.

[245]

D. Bhattacharyya et al., "Material aspects for batch integration of PZT thin films using transfer bonding technologies : Q2M development," in Proc. 4M 2008 Conference on Multi-Material Micro Manufacture, 2008.

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S. Braun, J. Oberhammer and G. Stemme, "Smart individual switch addressing of 5×5 and 20×20 MEMS double-switch arrays," in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, 2007, pp. 153-156.

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M. Mowler et al., "A 2-bit Reconfigurable Meander Slot Antenna with High-Displacement Low-Voltage RF MEMS Switches," in Proc. MEMSWave – Workshop on MEMS for Millimeterwave Communication 2004, 2004, pp. D20-D24.

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A. Thorsén et al., "Summit RF MEMS packaging," in Fifth Micro Structure Workshop (MSW 2004), 2004.

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F. Niklaus, J. Oberhammer and G. Stemme, "Adhesive Wafer Bonding for Packaging Applications," in Workshop on MEMS Sensor Packaging 2003; Copenhagen, Denmark, 20-21 March 2003, 2003.

Chapters in books

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F. Töpfer and J. Oberhammer, "Microwave cancer diagnosis," in Principles and Applications of RF/Microwave in Healthcare and Biosensing, : Elsevier Inc., 2016, pp. 103-149.

[251]

J. Oberhammer et al., "RF MEMS for automotive radar," in Handbook of Mems for Wireless and Mobile Applications, : Elsevier, 2013, pp. 518-549.

[252]

J. Oberhammer et al., "RF MEMS for automotive radar sensors," in Mems for Automotive and Aerospace Applications, : Elsevier, 2013, pp. 106-136.

[253]

J. Oberhammer et al., "RF MEMS for Automotive and Radar Applications : MEMS for Automotive and Radar Applications," in MEMS for Automotive and Radar Applications : RF MEMS for Automotive and Radar Applications, : Woodhead Publishing Limited, 2012.