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Summary of the course
Next scheduled course run: 2013-HT-P2(autumn term 2013, 2nd period, October-December, first course meeting on October 28, 2013)
The course is designed as a “hands-on” project course for students who would like to experience the world of nano/microelectromachnical systems (NEMS/MEMS) by having a "hands-on" experience, i.e. by carrying out a microsystem engineering project by designing, fabricating and evaluating tiny but complex devices of sub-millimeter size. This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; typically last week of October to second week of December).
Course goals:
The students will go through a complete microsystem engineering cycle, as shown in the picture below. Upon completion of the course, they will be able:
* to conceptualize, simulate, and design their own microsystem/microactuator devices for given real-world specifications,
* to model, simulate, and design microsystems by using state-of-the-art FEM simulation and CAD design tools,
* to fabricate their ownmicrosystem devices in a state-of-the-art 200-mm wafer semiconductor clean-room laboratory, and
* to characterize their performance of microsystem devices, including the analysis of theirwhich includes a comparison of the measured to the predicted performance by the simulations
* to analyse failure mechanisms as well asnd to propose design improvements. for a subsequent engineering cycle.
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Course outline
Microsystem Engineering cycle, through which the students will be guided in the course.
clean-room fabrication 2012a
Students (2012 course) fabricating their microsystems in KTH's clean-room. The microsystems are fabricated on such silicon wafers.
clean-room fabrication 2012b
Students (2012 course) in KTH's clean-room during the fabrication part of the microsystems. Here they measure the surface profile of microstructures, to evaluate whether their previous fabrication processes has been successful, before passing on to the next fabrication step.
evaluation
Evaluation of a fabricated chip on a semiconductor wafer measurement probe station (2011 course run). Every student receives such a chip, with his/her own devices and fabricated by himself/herself, as a souvernir after the course.
microscope picture of chip
Microscope picture of a microsystem chip fabricated by the students (2011 course run). The probe needles are used for feeding the microsystem actuators with electrical potential, to generate mechanical movements. This chip worked as expected!
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