Summary of the course

Next scheduled course run: 2013-HT-P2(autumn term 2013, 2nd period, October-December)

The course is designed as a “hands-on” project course for students who would like to experience the world of nano/microelectromachnical systems (NEMS/MEMS) by having a "hands-on" experience, i.e. by carrying out a microsystem engineering project by designing, fabricating and evaluating tiny but complex devices of sub-millimeter size. This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; typically last week of October to second week of December).

Course goals:

The students will go through a complete microsystem engineering cycle, as shown in the picture below. Upon completion of the course, they will be able:

* to conceptualize, simulate, and design their own microsystem/microactuator devices for given real-world specifications, by using state-of-the-art simulation and CAD tools,
* to fabricate their own devices in a state-of-the-art 200-mm wafer semiconductor clean-room laboratory, and
* to characterize their device, including the analysis of their failure mechanisms as well as to propose design improvements.
Course outline

¶ Below two pictures of sMicrosystem Engineering cycle, through which the students will be guided in the course.¶

clean-room fabrication 2012a¶

Students (2012 course) fabricating their microsystems in KTH's clean-room.

clean-room fabrication 2012a

clean-room fabrication 2012b

Students (2012 course) fabricating their microsystems in KTH's clean-room.

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