Class information for:
Level 1: SCATTEROMETRY//RIGOROUS COUPLED WAVE ANALYSIS//MODAL METHOD

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
3213 2038 18.8 63%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
10 4 OPTICS//PHYSICS, PARTICLES & FIELDS//PHYSICS, MULTIDISCIPLINARY 1131262
245 3       PHOTONIC CRYSTAL//OPTICS//INTEGRATED OPTICS 46930
297 2             PHOTONIC CRYSTAL//PHOTONIC BAND GAP//PHOTONIC CRYSTAL WAVEGUIDE 18652
3213 1                   SCATTEROMETRY//RIGOROUS COUPLED WAVE ANALYSIS//MODAL METHOD 2038

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 SCATTEROMETRY authKW 243273 2% 35% 47
2 RIGOROUS COUPLED WAVE ANALYSIS authKW 206367 2% 34% 41
3 MODAL METHOD authKW 183576 1% 51% 24
4 FOURIER MODAL METHOD authKW 176233 1% 59% 20
5 JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION journal 167568 16% 3% 331
6 RCWA authKW 158477 1% 46% 23
7 OPTICAL SCATTEROMETRY authKW 139437 1% 85% 11
8 REFLECTIVE EFFICIENCY authKW 134831 0% 100% 9
9 SANDWICHED GRATING authKW 119850 0% 100% 8
10 TWO LAYER GRATING authKW 106531 0% 89% 8

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with term
in class
1 Optics 67087 74% 0% 1516
2 Physics, Applied 985 17% 0% 340
3 Engineering, Electrical & Electronic 686 13% 0% 267
4 Nanoscience & Nanotechnology 277 5% 0% 100
5 Telecommunications 205 3% 0% 67
6 Physics, Multidisciplinary 81 5% 0% 96
7 Instruments & Instrumentation 41 2% 0% 47
8 Spectroscopy 31 2% 0% 36
9 Materials Science, Coatings & Films 24 1% 0% 26
10 Engineering, Manufacturing 17 1% 0% 16

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 THZ OPTOELECT 48931 0% 47% 7
2 BEIJING THZ SPECT IMAGING 31717 0% 35% 6
3 EQUIPE COMPOSANTS OPT MICROSTRUCT 29962 0% 100% 2
4 SIMULAT MODELISAT ELE OMAGNETISME 29962 0% 100% 2
5 UNITE PROPRE RECH ENSEIGNEMENT SUPER A 6079 26964 0% 60% 3
6 LITHOG OPT 22469 0% 50% 3
7 PHYS OPTOELECT ENGN 22332 3% 3% 54
8 DISPLAY COMPONENTS 19974 0% 67% 2
9 OPT QUANTUM RADIOPHYS 19974 0% 67% 2
10 UNITE MIXTE RECH 6602 19258 0% 43% 3

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION 167568 16% 3% 331
2 APPLIED OPTICS 26903 12% 1% 251
3 JOURNAL OF MODERN OPTICS 19137 4% 1% 90
4 OPTICA ACTA 13493 1% 3% 28
5 JOURNAL OF THE EUROPEAN OPTICAL SOCIETY-RAPID PUBLICATIONS 7630 1% 3% 17
6 JOURNAL OF THE OPTICAL SOCIETY OF AMERICA 7103 1% 2% 20
7 OPTICS LETTERS 6355 6% 0% 113
8 OPTICS EXPRESS 6116 6% 0% 119
9 OPTICS COMMUNICATIONS 5292 5% 0% 97
10 JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS 5041 1% 1% 27

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 SCATTEROMETRY 243273 2% 35% 47 Search SCATTEROMETRY Search SCATTEROMETRY
2 RIGOROUS COUPLED WAVE ANALYSIS 206367 2% 34% 41 Search RIGOROUS+COUPLED+WAVE+ANALYSIS Search RIGOROUS+COUPLED+WAVE+ANALYSIS
3 MODAL METHOD 183576 1% 51% 24 Search MODAL+METHOD Search MODAL+METHOD
4 FOURIER MODAL METHOD 176233 1% 59% 20 Search FOURIER+MODAL+METHOD Search FOURIER+MODAL+METHOD
5 RCWA 158477 1% 46% 23 Search RCWA Search RCWA
6 OPTICAL SCATTEROMETRY 139437 1% 85% 11 Search OPTICAL+SCATTEROMETRY Search OPTICAL+SCATTEROMETRY
7 REFLECTIVE EFFICIENCY 134831 0% 100% 9 Search REFLECTIVE+EFFICIENCY Search REFLECTIVE+EFFICIENCY
8 SANDWICHED GRATING 119850 0% 100% 8 Search SANDWICHED+GRATING Search SANDWICHED+GRATING
9 TWO LAYER GRATING 106531 0% 89% 8 Search TWO+LAYER+GRATING Search TWO+LAYER+GRATING
10 SUBWAVELENGTH GRATING 103972 1% 26% 27 Search SUBWAVELENGTH+GRATING Search SUBWAVELENGTH+GRATING

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref. in
cl.		 Shr. of ref. in
cl.		 Citations
1 TURUNEN, J , KUITTINEN, M , WYROWSKI, F , (2000) DIFFRACTIVE OPTICS: ELECTROMAGNETIC APPROACH.PROGRESS IN OPTICS, VOL XL. VOL. 40. ISSUE . P. 343 -388 104 66% 15
2 BONOD, N , NEAUPORT, J , (2016) DIFFRACTION GRATINGS: FROM PRINCIPLES TO APPLICATIONS IN HIGH-INTENSITY LASERS.ADVANCES IN OPTICS AND PHOTONICS. VOL. 8. ISSUE 1. P. 156 -199 57 50% 6
3 JING, XF , ZHANG, JC , JIN, SZ , LIANG, P , TIAN, Y , (2012) DESIGN OF HIGHLY EFFICIENT TRANSMISSION GRATINGS WITH DEEP ETCHED TRIANGULAR GROOVES.APPLIED OPTICS. VOL. 51. ISSUE 33. P. 7920 -7933 32 89% 10
4 LEE, YM , LI, JH , WANG, M , CHENG, HH , SHEN, YT , TSAI, KY , SHIEH, JJ , CHEN, AC , (2014) OPTICAL SCATTEROMETRY SYSTEM FOR DETECTING SPECIFIC LINE EDGE ROUGHNESS OF RESIST GRATINGS SUBJECTED TO DETECTOR NOISES.JOURNAL OF OPTICS. VOL. 16. ISSUE 6. P. - 27 100% 0
5 LIU, V , FAN, SH , (2012) S-4: A FREE ELECTROMAGNETIC SOLVER FOR LAYERED PERIODIC STRUCTURES.COMPUTER PHYSICS COMMUNICATIONS. VOL. 183. ISSUE 10. P. 2233-2244 28 67% 111
6 LU, WT , LU, YY , (2012) HIGH ORDER INTEGRAL EQUATION METHOD FOR DIFFRACTION GRATINGS.JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION. VOL. 29. ISSUE 5. P. 734-740 25 89% 3
7 PASSILLY, N , KARVINEN, P , VENTOLA, K , LAAKKONEN, P , TURUNEN, J , TERVO, J , (2008) POLARIZATION CONVERSION BY DIELECTRIC SUBWAVELENGTH GRATINGS IN CONICAL MOUNTING.JOURNAL OF THE EUROPEAN OPTICAL SOCIETY-RAPID PUBLICATIONS. VOL. 3. ISSUE . P. - 29 85% 1
8 ZHU, JL , LIU, SY , CHEN, XG , ZHANG, CW , JIANG, H , (2014) ROBUST SOLUTION TO THE INVERSE PROBLEM IN OPTICAL SCATTEROMETRY.OPTICS EXPRESS. VOL. 22. ISSUE 18. P. 22031 -22042 24 89% 0
9 ZHU, JL , SHI, YT , GODDARD, LL , LIU, SY , (2016) APPLICATION OF MEASUREMENT CONFIGURATION OPTIMIZATION FOR ACCURATE METROLOGY OF SUB-WAVELENGTH DIMENSIONS IN MULTILAYER GRATINGS USING OPTICAL SCATTEROMETRY.APPLIED OPTICS. VOL. 55. ISSUE 25. P. 6844 -6849 23 88% 0
10 NI, XJ , LIU, ZT , BOLTASSEVA, A , KILDISHEV, AV , (2010) THE VALIDATION OF THE PARALLEL THREE-DIMENSIONAL SOLVER FOR ANALYSIS OF OPTICAL PLASMONIC BI-PERIODIC MULTILAYER NANOSTRUCTURES.APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING. VOL. 100. ISSUE 2. P. 365-374 25 93% 1

Classes with closest relation at Level 1


Rank Class id link
1 8028 GUIDED MODE RESONANCE//NANO SENSORS GRP//HIGH CONTRAST GRATINGS
2 10404 KINOFORM//BEAM SHAPING//COMPUTER GENERATED HOLOGRAM
3 21111 PHYS OPT CHAIR//SPONTANEOUS GRATINGS//THIN LIGHT SENSITIVE FILMS
4 18223 GRATING COUPLER//BULK OPTICAL WAVES//DIFFRACTIONAL DIVERGENCE
5 22103 BACKLIGHT//BACKLIGHT UNIT BLU//LIGHT GUIDE PLATE
6 6128 ANTIREFLECTION//ANTIREFLECTIVE COATING//ANTIREFLECTIVE
7 30199 TRANSMISSION GRATING//FREESTANDING TRANSMISSION GRATING//HIGH TEMP HIGH DENS PLASMA PHYS
8 26088 QUARTERWAVE RETARDERS//ABSORBING SUBSTRATE//BROAD AND WIDE ANGLE
9 804 ENHANCED TRANSMISSION//EXTRAORDINARY OPTICAL TRANSMISSION//SURFACE PLASMONS
10 14951 HOLOGRAPHIC OPTICAL ELEMENTS//HYBRID REFRACTIVE DIFFRACTIVE SYSTEM//HOLOGRAPHIC LENSES

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