Class information for:
Level 3: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//SENSORS AND ACTUATORS A-PHYSICAL//JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Basic class information

ID Publications Average number
of references
Avg. shr. active
ref. in WoS
456 22740 21.8 59%



Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 4)



ID, lev.
above
Publications Label for level above
18 835618 OPTICS//PHYSICAL REVIEW A//PHYSICS, APPLIED

Classes in level below (level 2)



ID, lev.
below
Publications Label for level below
358 16774 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//SENSORS AND ACTUATORS A-PHYSICAL//JOURNAL OF MICROMECHANICS AND MICROENGINEERING
2574 3220 THERMAL FLOW SENSOR//MICROHOTPLATE//THERMOPILE
2729 2746 POLARIZATION INTERFERENCE IMAGING SPECTROMETER//CORRELATION CHROMATOGRAPHY//SPE AL IMAGING TECH

Terms with highest relevance score



Rank Term Type of term Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of publ.
in class
1 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Journal 560 42% 5% 1028
2 SENSORS AND ACTUATORS A-PHYSICAL Journal 548 23% 9% 2095
3 JOURNAL OF MICROMECHANICS AND MICROENGINEERING Journal 423 27% 6% 1369
4 MODIFIED COUPLE STRESS THEORY Author keyword 218 88% 0% 105
5 MEMS Author keyword 194 15% 5% 1231
6 MICROELECTROMECHANICAL SYSTEMS MEMS Author keyword 168 40% 1% 334
7 MICROCANTILEVER Author keyword 136 47% 1% 212
8 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS Journal 94 17% 2% 497
9 MICROELECTROMECHANICAL DEVICES Author keyword 79 37% 1% 169
10 ELECTROSTATIC ACTUATION Author keyword 66 42% 1% 120

Web of Science journal categories

Author Key Words



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of publ.
in class
LCSH search Wikipedia search
1 MODIFIED COUPLE STRESS THEORY 218 88% 0% 105 Search MODIFIED+COUPLE+STRESS+THEORY Search MODIFIED+COUPLE+STRESS+THEORY
2 MEMS 194 15% 5% 1231 Search MEMS Search MEMS
3 MICROELECTROMECHANICAL SYSTEMS MEMS 168 40% 1% 334 Search MICROELECTROMECHANICAL+SYSTEMS+MEMS Search MICROELECTROMECHANICAL+SYSTEMS+MEMS
4 MICROCANTILEVER 136 47% 1% 212 Search MICROCANTILEVER Search MICROCANTILEVER
5 MICROELECTROMECHANICAL DEVICES 79 37% 1% 169 Search MICROELECTROMECHANICAL+DEVICES Search MICROELECTROMECHANICAL+DEVICES
6 ELECTROSTATIC ACTUATION 66 42% 1% 120 Search ELECTROSTATIC+ACTUATION Search ELECTROSTATIC+ACTUATION
7 PULL IN INSTABILITY 63 67% 0% 56 Search PULL+IN+INSTABILITY Search PULL+IN+INSTABILITY
8 MICROMIRROR 62 36% 1% 141 Search MICROMIRROR Search MICROMIRROR
9 POLARIZATION INTERFERENCE IMAGING SPECTROMETER 53 95% 0% 18 Search POLARIZATION+INTERFERENCE+IMAGING+SPECTROMETER Search POLARIZATION+INTERFERENCE+IMAGING+SPECTROMETER
10 PULL IN 51 49% 0% 76 Search PULL+IN Search PULL+IN

Key Words Plus



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 MICROMIRROR 496 74% 2% 367
2 QUANTUM GROUND STATE 488 83% 1% 278
3 CAVITY OPTOMECHANICS 345 86% 1% 178
4 MEMS 232 23% 4% 868
5 MICROMECHANICAL RESONATOR 209 91% 0% 88
6 MICROCANTILEVERS 171 53% 1% 226
7 RESOLVED SIDE BAND 168 91% 0% 70
8 MICROMECHANICAL OSCILLATOR 155 90% 0% 66
9 COUPLE STRESS THEORY 149 65% 1% 143
10 MICROCANTILEVER 137 61% 1% 147

Journals



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of publ.
in class
1 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 560 42% 5% 1028
2 SENSORS AND ACTUATORS A-PHYSICAL 548 23% 9% 2095
3 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 423 27% 6% 1369
4 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 94 17% 2% 497
5 SENSORS AND ACTUATORS 27 19% 1% 127
6 SENSORS AND MATERIALS 22 15% 1% 132
7 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 20 15% 1% 121
8 JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS 4 12% 0% 30

Reviews



Title Publ. year Cit. Active references % act. ref.
to same field
Cavity optomechanics: Back-action at the mesoscale 2008 706 50 80%
Optoelectromechanical transducer: Reversible conversion between microwave and optical photons 2015 6 90 81%
Nanoelectromechanical systems 2005 649 97 72%
Review of cavity optomechanics in the weak-coupling regime: from linearization to intrinsic nonlinear interactions 2015 6 141 76%
Comparative advantages of mechanical biosensors 2011 269 119 50%
A short walk through quantum optomechanics 2013 73 93 74%
Mechanical systems in the quantum regime 2012 117 314 68%
Micromachined inertial sensors 1998 731 29 90%
Micro- and nanomechanical sensors for environmental, chemical, and biological detection 2007 280 115 80%
Cantilever transducers as a platform for chemical and biological sensors 2004 590 166 70%

Address terms



Rank Address term Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 MEMS 41 21% 0.8% 174
2 B2 29 59% 0.1% 33
3 STATE TRANSDUCER TECHNOL 26 15% 0.7% 154
4 SCI TECHNOL MICROSYST 25 44% 0.2% 42
5 MICRONANOSYST ENGN 23 86% 0.1% 12
6 OXIDEMEMS 21 90% 0.0% 9
7 SCI TECHNOL MICRO NANO FABRICAT 20 31% 0.2% 56
8 MICRO NANO ELE OMECH SYST 20 59% 0.1% 22
9 MEMS BUSINESS UNIT 17 79% 0.0% 11
10 ME EI 15 82% 0.0% 9

Related classes at same level (level 3)



Rank Relatedness score Related classes
1 0.0000003990 ATOMIC FORCE MICROSCOPY//SELF ASSEMBLED MONOLAYERS//ATOMIC FORCE MICROSCOPE
2 0.0000003377 LAB ON A CHIP//MICROFLUIDICS//MICROFLUIDICS AND NANOFLUIDICS
3 0.0000002536 THERMAL LENS SPECTROMETRY//THERMAL DIFFUSIVITY//PHOTOTHERMAL OPTOELECT DIAGNOST S
4 0.0000002286 SHAPE MEMORY POLYMER//SHAPE MEMORY POLYMERS//PRESSURE SENSITIVE ADHESIVE
5 0.0000001807 IEEE TRANSACTIONS ON RELIABILITY//MICROELECTRONICS AND RELIABILITY//RELIABILITY ENGINEERING & SYSTEM SAFETY
6 0.0000001652 SURFACE & COATINGS TECHNOLOGY//PLASMA NITRIDING//HIGH ENTROPY ALLOYS
7 0.0000001569 PVC MEMBRANE//ION SELECTIVE ELECTRODES//ELECTRONIC NOSE
8 0.0000001553 ULTRASONICS//IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL//MATERIALS EVALUATION
9 0.0000001527 ENGINEERING FRACTURE MECHANICS//INTERNATIONAL JOURNAL OF FRACTURE//INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES
10 0.0000001493 MAGNETOSTRICTION//IEEE TRANSACTIONS ON MAGNETICS//ND FE B