Class information for:
Level 3: ULTRAMICROSCOPY//MICROSCOPY//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
280 38393 21.1 53%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 4)


ID, lev.
above		 Publications Label for level above
5 1620399 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY

Classes in level below (level 2)


ID, lev.
below		 Publications Label for level below
740 11887 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//MICROELECTRONIC ENGINEERING//JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
803 11388 ULTRAMICROSCOPY//MICROSCOPY//ELECTRON HOLOGRAPHY
1490 7092 EUV LITHOG//UNDULATORS//SPECTROMICROSCOPY
2051 4868 SCANNING//LAMACOP//BACKSCATTERED ELECTRONS
2880 2335 WEDGE AND STRIP ANODE//CANONICAL ABERRATION THEORY//OPT PHYS ELECT ENGN
3659 823 GRAIN BOUNDARY DETECTION//SCANNING X RAY ANALYTICAL MICROSCOPE//QUANTUM DOT QUANTUM WELL QDQW

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of publ.
in class
1 ULTRAMICROSCOPY Journal 1341 44% 6% 2326
2 MICROSCOPY WoS category 1206 18% 16% 6098
3 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B Journal 659 19% 8% 3092
4 ELECTRON HOLOGRAPHY Author keyword 187 60% 1% 206
5 JOURNAL OF ELECTRON MICROSCOPY Journal 177 28% 1% 529
6 SCANNING Journal 143 28% 1% 436
7 MICROELECTRONIC ENGINEERING Journal 141 12% 3% 1125
8 MICROSCOPY AND MICROANALYSIS Journal 131 27% 1% 419
9 ELECTRON TOMOGRAPHY Author keyword 120 40% 1% 239
10 ABERRATION CORRECTION Author keyword 118 50% 0% 171

Web of Science journal categories


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of publ.
in class
1 Microscopy 1206 18% 16% 6098

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 ELECTRON HOLOGRAPHY 187 60% 1% 206 Search ELECTRON+HOLOGRAPHY Search ELECTRON+HOLOGRAPHY
2 ELECTRON TOMOGRAPHY 120 40% 1% 239 Search ELECTRON+TOMOGRAPHY Search ELECTRON+TOMOGRAPHY
3 ABERRATION CORRECTION 118 50% 0% 171 Search ABERRATION+CORRECTION Search ABERRATION+CORRECTION
4 ELECTRON BEAM INDUCED DEPOSITION 91 65% 0% 87 Search ELECTRON+BEAM+INDUCED+DEPOSITION Search ELECTRON+BEAM+INDUCED+DEPOSITION
5 FOCUSED ION BEAM 91 25% 1% 311 Search FOCUSED+ION+BEAM Search FOCUSED+ION+BEAM
6 ELECTRON BEAM LITHOGRAPHY 81 22% 1% 327 Search ELECTRON+BEAM+LITHOGRAPHY Search ELECTRON+BEAM+LITHOGRAPHY
7 CHEMICALLY AMPLIFIED RESISTS 78 34% 0% 188 Search CHEMICALLY+AMPLIFIED+RESISTS Search CHEMICALLY+AMPLIFIED+RESISTS
8 FOCUSED ELECTRON BEAM INDUCED DEPOSITION 69 91% 0% 29 Search FOCUSED+ELECTRON+BEAM+INDUCED+DEPOSITION Search FOCUSED+ELECTRON+BEAM+INDUCED+DEPOSITION
9 EELS 67 23% 1% 255 Search EELS Search EELS
10 LITHOGRAPHY 62 14% 1% 415 Search LITHOGRAPHY Search LITHOGRAPHY

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of publ.
in class
1 MICROGRAPHS 248 62% 1% 259
2 INELASTICALLY SCATTERED ELECTRONS 192 98% 0% 49
3 CRYOMICROSCOPY 186 63% 0% 188
4 LITHOGRAPHY 168 13% 3% 1223
5 CHEMICALLY AMPLIFIED RESISTS 124 48% 0% 189
6 INDUCED DEPOSITION 120 66% 0% 112
7 LINE EDGE ROUGHNESS 119 44% 1% 207
8 RESIST 114 28% 1% 343
9 CBED PATTERNS 102 95% 0% 35
10 SPECTROMICROSCOPY 102 47% 0% 159

Journals


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of publ.
in class
1 ULTRAMICROSCOPY 1341 44% 6% 2326
2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 659 19% 8% 3092
3 JOURNAL OF ELECTRON MICROSCOPY 177 28% 1% 529
4 SCANNING 143 28% 1% 436
5 MICROELECTRONIC ENGINEERING 141 12% 3% 1125
6 MICROSCOPY AND MICROANALYSIS 131 27% 1% 419
7 JOURNAL OF STRUCTURAL BIOLOGY 105 17% 1% 553
8 JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY 104 23% 1% 404
9 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 96 32% 1% 253
10 JOURNAL OF MICROSCOPY-OXFORD 64 14% 1% 442

Reviews


Title Publ. year Cit. Active references % act. ref.
to same field
How cryo-EM is revolutionizing structural biology 2015 12 77 73%
X-RAY INTERACTIONS - PHOTOABSORPTION, SCATTERING, TRANSMISSION, AND REFLECTION AT E=50-30,000 EV, Z=1-92 1993 2768 25 28%
Gas-assisted focused electron beam and ion beam processing and fabrication 2008 349 439 71%
Pushing the limits of lithography 2000 322 8 88%
Electron tomography and holography in materials science 2009 229 76 70%
Electron microscopy of specimens in liquid 2011 146 84 56%
A review of focused ion beam milling techniques for TEM specimen preparation 1999 423 6 67%
Lithographic imaging techniques for the formation of nanoscopic features 1999 361 52 75%
A critical literature review of focused electron beam induced deposition 2008 161 156 88%
Focused, nanoscale electron-beam-induced deposition and etching 2006 204 121 75%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 XRAY OPT 54 32% 0.4% 139
2 ADV MAT DEV 1 49 94% 0.0% 17
3 XRAY LITHOG 44 85% 0.1% 23
4 TRIEBENBERG 41 63% 0.1% 42
5 EUV LITHOG 41 100% 0.0% 15
6 SUPER FINE SR LITHOG 37 100% 0.0% 14
7 ADV SCI TECHNOL IND 31 27% 0.3% 97
8 SOFT XRAY MICROSCOPY 30 100% 0.0% 12
9 EUV PROC TECHNOL 30 84% 0.0% 16
10 MACROMOL IMAGING 29 37% 0.2% 64

Related classes at same level (level 3)


Rank Relatedness score Related classes
1 0.0000003767 JOURNAL OF APPLIED CRYSTALLOGRAPHY//JOURNAL OF SYNCHROTRON RADIATION//ULTRA COLD NEUTRONS
2 0.0000002571 ANTIGEN RETRIEVAL//IN VIVO CRYOTECHNIQUE//JOURNAL OF HISTOTECHNOLOGY
3 0.0000002196 X-RAY SPECTROMETRY//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//ARCHAEOMETRY
4 0.0000001520 PHYSICAL REVIEW SPECIAL TOPICS-ACCELERATORS AND BEAMS//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIAT//GYROTRON
5 0.0000001384 ATOMIC FORCE MICROSCOPY//SELF ASSEMBLED MONOLAYERS//ATOMIC FORCE MICROSCOPE
6 0.0000001336 JOURNAL OF THE AMERICAN SOCIETY FOR MASS SPECTROMETRY//RAPID COMMUNICATIONS IN MASS SPECTROMETRY//PROTEOMICS
7 0.0000001306 IEEE TRANSACTIONS ON MAGNETICS//JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS//PERPENDICULAR RECORDING
8 0.0000001194 LAB ON A CHIP//MICROFLUIDICS//MICROFLUIDICS AND NANOFLUIDICS
9 0.0000001156 NUCLEAR TRACKS AND RADIATION MEASUREMENTS//CR 39//NANOPORE
10 0.0000001146 PLASMA SOURCES SCIENCE & TECHNOLOGY//DIELECTRIC BARRIER DISCHARGE//NON THERMAL PLASMA