Class information for:
Level 2: PLASMA POLYMERIZATION//PLASMA PROCESSES AND POLYMERS//LOW K

Basic class information

ID Publications Average number
of references
Avg. shr. active
ref. in WoS
824 11237 24.3 61%



Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 3)



ID, lev.
above
Publications Label for level above
216 47094 PLASMA SOURCES SCIENCE & TECHNOLOGY//DIELECTRIC BARRIER DISCHARGE//NON THERMAL PLASMA

Classes in level below (level 1)



ID, lev. below Publications Label for level below
1334 2614 PLASMA POLYMERIZATION//PLASMA PROCESSES AND POLYMERS//PLASMA TREATMENT
2214 2246 LOW K//SIOC H FILMS//PLASMA PROC TECHNOL
7831 1245 FLEXIBLE COPPER CLAD LAMINATE//FLEXIBLE COPPER CLAD LAMINATE FCCL//SILANE MODIFIED POLYVINYLIMIDAZOLE
8497 1179 HMDSO//HEXAMETHYLDISILOXANE//HEXAMETHYLDISILOXANE HMDSO
10896 957 PHOTOGRAFTING//ADV PACKAGING DEV SUPPORT//PHOTOGRAFTING POLYMERIZATION
13106 796 FLUOROCARBON FILMS//FLUORINATED AMORPHOUS CARBON//A C F
14282 714 INITIATED CHEMICAL VAPOR DEPOSITION//ICVD//CHEMICAL VAPOR DEPOSITION POLYMERIZATION
16090 606 LEHRSTUHL MAT VERBUNDE//CHAIR MULTICOMPONENT MAT//BULK AND SURFACE DIFFUSION
21290 365 PLASMA POLYMERIZATION//SINTESIS CARACTERIZAC//GEORGE SUDARSHAN PHYS COMP SCI
23582 286 PLASMA INITIATED POLYMERIZATION//ALPHA ALPHA DIPYRIDINE//DEGENERATIVE TRANSFER POLYMERIZATION
31813 118 DRILLING FLUID//PROTON TRANSPORT NUMBER//SEA SYST COMMAND HEADQUARTERS
32233 111 PLASMA POLYMERIZED PROPARGYL ALCOHOL//BOILER FEED//BIO NANO

Terms with highest relevance score



Rank Term Type of term Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 PLASMA POLYMERIZATION Author keyword 471 56% 5% 571
2 PLASMA PROCESSES AND POLYMERS Journal 142 29% 4% 414
3 LOW K Author keyword 109 44% 2% 187
4 SIOC H FILMS Author keyword 94 97% 0% 28
5 PLASMA TREATMENT Author keyword 70 21% 3% 298
6 PLASMA PROC TECHNOL Address 61 82% 0% 36
7 PLASMA POLYMER Author keyword 61 56% 1% 74
8 HMDSO Author keyword 48 63% 0% 48
9 PLASMA POLYMERISATION Author keyword 47 57% 0% 56
10 PLASMA POLYMERS Author keyword 44 59% 0% 50

Web of Science journal categories

Author Key Words



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
LCSH search Wikipedia search
1 PLASMA POLYMERIZATION 471 56% 5% 571 Search PLASMA+POLYMERIZATION Search PLASMA+POLYMERIZATION
2 LOW K 109 44% 2% 187 Search LOW+K Search LOW+K
3 SIOC H FILMS 94 97% 0% 28 Search SIOC+H+FILMS Search SIOC+H+FILMS
4 PLASMA TREATMENT 70 21% 3% 298 Search PLASMA+TREATMENT Search PLASMA+TREATMENT
5 PLASMA POLYMER 61 56% 1% 74 Search PLASMA+POLYMER Search PLASMA+POLYMER
6 HMDSO 48 63% 0% 48 Search HMDSO Search HMDSO
7 PLASMA POLYMERISATION 47 57% 0% 56 Search PLASMA+POLYMERISATION Search PLASMA+POLYMERISATION
8 PLASMA POLYMERS 44 59% 0% 50 Search PLASMA+POLYMERS Search PLASMA+POLYMERS
9 LOW K MATERIALS 38 62% 0% 39 Search LOW+K+MATERIALS Search LOW+K+MATERIALS
10 LOW K DIELECTRICS 37 46% 1% 59 Search LOW+K+DIELECTRICS Search LOW+K+DIELECTRICS

Key Words Plus



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 LOW DIELECTRIC CONSTANT 177 49% 2% 263
2 INTERLAYER DIELECTRICS 137 92% 0% 55
3 LOW K 122 66% 1% 113
4 HEXAMETHYLDISILOXANE 106 62% 1% 109
5 PLASMA POLYMERIZATION 106 53% 1% 139
6 POLYTETRAFLUOROETHYLENE FILMS 68 54% 1% 88
7 ICVD 67 68% 1% 58
8 FLUORINATED AMORPHOUS CARBON 65 76% 0% 45
9 SIOF FILMS 64 88% 0% 30
10 METHYLSILSESQUIOXANE 60 79% 0% 38

Journals



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 PLASMA PROCESSES AND POLYMERS 142 29% 4% 414
2 APPLIED POLYMER SYMPOSIA 4 26% 0% 15

Reviews



Title Publ. year Cit. Active references % act. ref.
to same field
Plasma methods for the generation of chemically reactive surfaces for biomolecule immobilization and cell colonization - A review 2006 380 156 71%
Low dielectric constant materials for microelectronics 2003 848 147 61%
Mechanisms of Plasma Polymerization - Reviewed from a Chemical Point of View 2011 83 47 77%
Low Dielectric Constant Materials 2010 186 384 54%
Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects-State of the art 2014 13 22 55%
Developments and new applications of UV-induced surface graft polymerizations 2009 172 369 35%
Porous pSiCOH Ultralow-k Dielectrics for Chip Interconnects Prepared by PECVD 2009 58 26 96%
Plasma Surface Modification of Biodegradable Polymers: A Review 2011 83 143 37%
Nonthermal Plasma Technology as a Versatile Strategy for Polymeric Biomaterials Surface Modification: A Review 2009 167 358 33%
PLASMA SURFACE MODIFICATION OF POLYMERS FOR IMPROVED ADHESION - A CRITICAL-REVIEW 1993 473 53 60%

Address terms



Rank Address term Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 PLASMA PROC TECHNOL 61 82% 0.3% 36
2 SUR E SCI PLASMA TECHNOL 36 49% 0.5% 54
3 NANO THIN FILM MAT 35 74% 0.2% 26
4 RUPT 23 62% 0.2% 24
5 XPEQT 21 90% 0.1% 9
6 NANOTHIN FILM MAT 17 79% 0.1% 11
7 SCI ANALYT INTER IAL CHEM 17 72% 0.1% 13
8 LOG TECHNOL DEV 16 39% 0.3% 33
9 LEHRSTUHL MAT VERBUNDE 13 40% 0.2% 26
10 SUR E INTER E ANAL 13 55% 0.1% 16

Related classes at same level (level 2)



Rank Relatedness score Related classes
1 0.0000015834 RADIATION GRAFTING//RADIATION INDUCED GRAFTING//RADIATION INDUCED GRAFT COPOLYMERIZATION
2 0.0000011314 PROTEIN ADSORPTION//PHOSPHOLIPID POLYMER//2 METHACRYLOYLOXYETHYL PHOSPHORYLCHOLINE POLYMER
3 0.0000010744 ELECT DEVICES MAT TECHNOL//PLASMA ETCHING//SIO2 ETCHING
4 0.0000010090 MODERN PLASTICS//CHLORINATED POLYOLEFIN//LATENT ACID CATALYST
5 0.0000009444 DIFFUSION BARRIER//ELECTROMIGRATION//CU METALLIZATION
6 0.0000009421 INTERFACIAL SILICON EMISSION//SILICON OXIDATION//GENIE URBAIN ENVIRONM
7 0.0000009013 NON THERMAL PLASMA//DIELECTRIC BARRIER DISCHARGE//PLASMA MEDICINE
8 0.0000008478 DIAMOND LIKE CARBON//CARBON NITRIDE//DIAMOND AND RELATED MATERIALS
9 0.0000007589 INVERSE GAS CHROMATOGRAPHY//INTER IAL PHENOMENA//SURFACE FREE ENERGY
10 0.0000007492 MATERIALS SCIENCE, TEXTILES//JOURNAL OF THE SOCIETY OF DYERS AND COLOURISTS//DYEING