Class information for:
Level 2: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//SENSORS AND ACTUATORS A-PHYSICAL//JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
358 16774 23.5 61%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 3)


ID, lev.
above		 Publications Label for level above
456 22740 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//SENSORS AND ACTUATORS A-PHYSICAL//JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Classes in level below (level 1)


ID, lev. below Publications Label for level below
1967 2338 CAVITY OPTOMECHANICS//B2//OPTOMECHANICS
2894 2044 MICROCANTILEVER//MICROCANTILEVERS//RESONANT CANTILEVER
4626 1680 MICROMIRROR//VARIABLE OPTICAL ATTENUATOR VOA//VERTICAL COMBDRIVES
5320 1572 MODIFIED COUPLE STRESS THEORY//PULL IN INSTABILITY//DYNAMIC PULL IN INSTABILITY
5420 1559 STRIP BENDING TEST//MEMS PROD//HIGH CYCLE FATIGUE TEST
6174 1456 ANGULAR RATE SENSOR//VIBRATORY GYROSCOPE//VIBRATORY GYRO SENSOR
7785 1249 RF MEMS//RF MICROELECTROMECHANICAL SYSTEMS MEMS//DIELECTRIC CHARGING
8178 1211 ANISOTROPIC ETCHING//MICRONANOSYST ENGN//MEMS MICRO NANO SYST
10259 1014 PIEZORESISTANCE//CAPACITIVE PRESSURE SENSOR//TOUCH MODE
13549 765 THERMOELASTIC DAMPING//MICROMECHANICAL RESONATOR//THERMOELASTIC DISSIPATION
19155 453 ELECTROSTATIC MOTOR//ELECTROSTATIC MICROMOTORS//MICROMOTOR
19689 430 MICROPHONE//TELECOMMUN ELE OACOUST//CONDENSER MICROPHONES
21027 375 SMALL MOTOR//PHOTOTHERMAL VIBRATION//FLEXURALLY VIBRATING BAR
22766 314 ACCELERATION SWITCH//INERTIAL SWITCH//CONSTANT FORCE MECHANISM
22768 314 MRFM//MAGNETIC RESONANCE FORCE MICROSCOPY//IDS

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of publ.
in class
1 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Journal 450 38% 6% 935
2 SENSORS AND ACTUATORS A-PHYSICAL Journal 327 18% 10% 1643
3 JOURNAL OF MICROMECHANICS AND MICROENGINEERING Journal 323 23% 7% 1208
4 MODIFIED COUPLE STRESS THEORY Author keyword 218 88% 1% 105
5 MEMS Author keyword 141 12% 6% 1056
6 MICROELECTROMECHANICAL SYSTEMS MEMS Author keyword 131 35% 2% 299
7 MICROCANTILEVER Author keyword 125 46% 1% 205
8 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS Journal 72 15% 3% 438
9 PULL IN INSTABILITY Author keyword 63 67% 0% 56
10 ELECTROSTATIC ACTUATION Author keyword 61 41% 1% 116

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of publ.
in class		 LCSH search Wikipedia search
1 MODIFIED COUPLE STRESS THEORY 218 88% 1% 105 Search MODIFIED+COUPLE+STRESS+THEORY Search MODIFIED+COUPLE+STRESS+THEORY
2 MEMS 141 12% 6% 1056 Search MEMS Search MEMS
3 MICROELECTROMECHANICAL SYSTEMS MEMS 131 35% 2% 299 Search MICROELECTROMECHANICAL+SYSTEMS+MEMS Search MICROELECTROMECHANICAL+SYSTEMS+MEMS
4 MICROCANTILEVER 125 46% 1% 205 Search MICROCANTILEVER Search MICROCANTILEVER
5 PULL IN INSTABILITY 63 67% 0% 56 Search PULL+IN+INSTABILITY Search PULL+IN+INSTABILITY
6 ELECTROSTATIC ACTUATION 61 41% 1% 116 Search ELECTROSTATIC+ACTUATION Search ELECTROSTATIC+ACTUATION
7 MICROMIRROR 55 34% 1% 133 Search MICROMIRROR Search MICROMIRROR
8 MICROELECTROMECHANICAL DEVICES 48 30% 1% 135 Search MICROELECTROMECHANICAL+DEVICES Search MICROELECTROMECHANICAL+DEVICES
9 PULL IN 46 47% 0% 73 Search PULL+IN Search PULL+IN
10 SQUEEZE FILM DAMPING 45 55% 0% 56 Search SQUEEZE+FILM+DAMPING Search SQUEEZE+FILM+DAMPING

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 MICROMIRROR 492 74% 2% 366
2 QUANTUM GROUND STATE 488 83% 2% 278
3 CAVITY OPTOMECHANICS 345 86% 1% 178
4 MICROMECHANICAL RESONATOR 209 91% 1% 88
5 MEMS 187 21% 5% 785
6 RESOLVED SIDE BAND 168 91% 0% 70
7 MICROCANTILEVERS 168 53% 1% 224
8 MICROMECHANICAL OSCILLATOR 155 90% 0% 66
9 COUPLE STRESS THEORY 149 65% 1% 143
10 RADIATION PRESSURE 135 25% 3% 467

Journals


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of publ.
in class
1 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 450 38% 6% 935
2 SENSORS AND ACTUATORS A-PHYSICAL 327 18% 10% 1643
3 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 323 23% 7% 1208
4 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 72 15% 3% 438
5 SENSORS AND ACTUATORS 13 14% 1% 91
6 SENSORS AND MATERIALS 13 12% 1% 102
7 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 12 12% 1% 96

Reviews


Title Publ. year Cit. Active references % act. ref.
to same field
Cavity optomechanics: Back-action at the mesoscale 2008 706 50 80%
Optoelectromechanical transducer: Reversible conversion between microwave and optical photons 2015 6 90 81%
Nanoelectromechanical systems 2005 649 97 70%
Review of cavity optomechanics in the weak-coupling regime: from linearization to intrinsic nonlinear interactions 2015 6 141 76%
Comparative advantages of mechanical biosensors 2011 269 119 50%
A short walk through quantum optomechanics 2013 73 93 74%
Mechanical systems in the quantum regime 2012 117 314 68%
Micro- and nanomechanical sensors for environmental, chemical, and biological detection 2007 280 115 80%
Micromachined inertial sensors 1998 731 29 90%
Cantilever transducers as a platform for chemical and biological sensors 2004 590 166 66%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 B2 29 59% 0.2% 33
2 MICRONANOSYST ENGN 23 86% 0.1% 12
3 OXIDEMEMS 21 90% 0.1% 9
4 MEMS 20 15% 0.7% 124
5 MEMS BUSINESS UNIT 17 79% 0.1% 11
6 STATE TRANSDUCER TECHNOL 16 12% 0.7% 124
7 SCI TECHNOL MICRO NANO FABRICAT 15 27% 0.3% 49
8 COMPETENCE NANOSCI 15 68% 0.1% 13
9 GRP MICROSYST ACTUATORS SENSORS 15 88% 0.0% 7
10 EXCELLENCE DESIGN ROBOT AUTOMAT 13 24% 0.3% 47

Related classes at same level (level 2)


Rank Relatedness score Related classes
1 0.0000017520 THERMAL FLOW SENSOR//MICROHOTPLATE//THERMOPILE
2 0.0000013243 FLEXURE HINGE//PIEZOELECTRIC ACTUATOR//NANOPOSITIONING
3 0.0000010234 FLUXGATE//FLUXGATE SENSOR//FLUXGATE SENSORS
4 0.0000008908 NANOIMPRINT//NANOIMPRINT LITHOGRAPHY//UV NANOIMPRINT
5 0.0000008793 POLARIZATION INTERFERENCE IMAGING SPECTROMETER//CORRELATION CHROMATOGRAPHY//SPE AL IMAGING TECH
6 0.0000008364 RABI MODEL//CIRCUIT QED//FLUX QUBIT
7 0.0000006609 STRETCHABLE ELECTRONICS//ENGN HLTH//SURFACE WRINKLING
8 0.0000006471 NANOTRIBOLOGY//DRY ADHESIVE//DRY ADHESION
9 0.0000006344 ATOMIC FORCE MICROSCOPE//DISSENY PROGRAMACIO SISTEMES ELECT//LOCAL ANODIC OXIDATION
10 0.0000006303 PHOTORESIST REMOVAL//WET OZONE//HYDROGEN TERMINATION