Class information for:
Level 2: INTERFACIAL SHEARS//MICROBENDING LOSS//RAPID THERMAL PROCESSING RTP

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
2847 2446 18.8 50%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 3)


ID, lev.
above		 Publications Label for level above
315 35473 SURFACE & COATINGS TECHNOLOGY//PLASMA NITRIDING//HIGH ENTROPY ALLOYS

Classes in level below (level 1)


ID, lev. below Publications Label for level below
10693 975 PARASITIC REACTION//CVD REACTOR//MOCVD REACTOR
18318 492 MICROBENDING LOSS//OPTICAL FIBER MECHANICAL FACTORS//AEM GRP
20709 388 RAPID THERMAL PROCESSING RTP//RAPID THERMAL PROCESSING//CTOD FRACTURE TOUGHNESS TESTING
22037 339 MEASUREMENT ENGN SENSOR TECHNOL//PHYS TECHNOL LOW DIMENS STRUCT//PLANAR MICROCAVITIES
27909 179 INTERFACIAL SHEARS//NON LOCAL STRESS CURVATURE RELATIONS//NON UNIFORM MISFIT STRAIN
34356 73 PIN CHUCK//VACUUM PIN CHUCK//WAFER FLATNESS

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 INTERFACIAL SHEARS Author keyword 20 100% 0% 9
2 MICROBENDING LOSS Author keyword 12 63% 0% 12
3 RAPID THERMAL PROCESSING RTP Author keyword 10 38% 1% 20
4 RAPID THERMAL PROCESSING Author keyword 9 20% 2% 41
5 PIN CHUCK Author keyword 9 67% 0% 8
6 NON LOCAL STRESS CURVATURE RELATIONS Author keyword 8 100% 0% 5
7 NON UNIFORM MISFIT STRAIN Author keyword 8 100% 0% 5
8 VACUUM PIN CHUCK Author keyword 8 100% 0% 5
9 SURFSCAN ADE Address 6 80% 0% 4
10 CTOD FRACTURE TOUGHNESS TESTING Author keyword 6 100% 0% 4

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 INTERFACIAL SHEARS 20 100% 0% 9 Search INTERFACIAL+SHEARS Search INTERFACIAL+SHEARS
2 MICROBENDING LOSS 12 63% 0% 12 Search MICROBENDING+LOSS Search MICROBENDING+LOSS
3 RAPID THERMAL PROCESSING RTP 10 38% 1% 20 Search RAPID+THERMAL+PROCESSING+RTP Search RAPID+THERMAL+PROCESSING+RTP
4 RAPID THERMAL PROCESSING 9 20% 2% 41 Search RAPID+THERMAL+PROCESSING Search RAPID+THERMAL+PROCESSING
5 PIN CHUCK 9 67% 0% 8 Search PIN+CHUCK Search PIN+CHUCK
6 NON LOCAL STRESS CURVATURE RELATIONS 8 100% 0% 5 Search NON+LOCAL+STRESS+CURVATURE+RELATIONS Search NON+LOCAL+STRESS+CURVATURE+RELATIONS
7 NON UNIFORM MISFIT STRAIN 8 100% 0% 5 Search NON+UNIFORM+MISFIT+STRAIN Search NON+UNIFORM+MISFIT+STRAIN
8 VACUUM PIN CHUCK 8 100% 0% 5 Search VACUUM+PIN+CHUCK Search VACUUM+PIN+CHUCK
9 CTOD FRACTURE TOUGHNESS TESTING 6 100% 0% 4 Search CTOD+FRACTURE+TOUGHNESS+TESTING Search CTOD+FRACTURE+TOUGHNESS+TESTING
10 CTOD R RESISTANCE CURVE 6 100% 0% 4 Search CTOD+R+RESISTANCE+CURVE Search CTOD+R+RESISTANCE+CURVE

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 MOCVD REACTORS 54 75% 2% 39
2 WALL TUBULAR REACTORS 32 85% 1% 17
3 INDUCED MICROBENDING LOSSES 31 92% 0% 12
4 INDUCED STRESS VOIDS 30 84% 1% 16
5 VAPOR DEPOSITION REACTOR 25 66% 1% 23
6 CVD CARBON 23 100% 0% 10
7 HORIZONTAL REACTORS 19 80% 0% 12
8 COMPLEX FLOW PHENOMENA 17 79% 0% 11
9 CVD REACTORS 17 72% 1% 13
10 FILM SUBSTRATE SYSTEMS 16 54% 1% 21

Journals

Reviews


Title Publ. year Cit. Active references % act. ref.
to same field
FLOW PHENOMENA IN CHEMICAL VAPOR-DEPOSITION OF THIN-FILMS 1991 108 63 67%
Chemical vapour deposition of coatings 2003 524 205 6%
Metal organic vapour phase epitaxy of AlN, GaN, InN and their alloys: A key chemical technology for advanced device applications 2013 12 159 13%
MODELING AND CONTROL OF MICROELECTRONICS MATERIALS PROCESSING 1995 31 105 43%
Predictive Analytical Thermal Stress Modeling in Electronics and Photonics 2009 5 59 63%
DESIGN AND MODELING OF CHEMICAL VAPOR-DEPOSITION REACTORS 1992 28 96 75%
Fluid-dynamics during vapor epitaxy and modeling 2003 6 34 94%
Temperature Measurement in Rapid Thermal Processing with Focus on the Application to Flash Lamp Annealing 2011 2 13 46%
Effect of temperature rise and hydrostatic pressure on microbending loss and refractive index change in double-coated optical fiber 2006 2 12 83%
Kinetic approach to materials synthesis by gas-phase deposition 1998 11 60 57%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 SURFSCAN ADE 6 80% 0.2% 4
2 SILICON NANOELECT 5 44% 0.3% 8
3 AEM GRP 2 67% 0.1% 2
4 FUNDAMENTAL SCI DEF WIDE BAND G SE 2 67% 0.1% 2
5 MEASUREMENT ENGN SENSOR TECHNOL 2 67% 0.1% 2
6 MECH ENGN MARIBOR 2 67% 0.1% 2
7 PHYS TECHNOL LOW DIMENS STRUCT 2 67% 0.1% 2
8 RTP PROD BUSINESS UNIT 2 67% 0.1% 2
9 ISOBE RD 2 31% 0.2% 5
10 DIPARTIMENTO CHIM FIS PLICATA 2 14% 0.4% 11

Related classes at same level (level 2)


Rank Relatedness score Related classes
1 0.0000015531 INTERFACIAL SILICON EMISSION//SILICON OXIDATION//GENIE URBAIN ENVIRONM
2 0.0000013906 GAAS ON SI//GAAS SI//GAINP
3 0.0000013170 DIFFUSION BARRIER//ELECTROMIGRATION//CU METALLIZATION
4 0.0000010288 SIGE//GERMANIUM//STRAINED SI
5 0.0000009379 ELECT DEVICES MAT TECHNOL//PLASMA ETCHING//SIO2 ETCHING
6 0.0000008624 ELLIPSOMETRY//MUELLER MATRIX//NANOOPT PROPERTY
7 0.0000008562 DRAW RESONANCE//FILM CASTING//MELT BLOWING
8 0.0000007044 LASER MICRO CLADDING//FREEFORM FABRICAT S//DIMETHYLALUMINUM HYDRIDE
9 0.0000006933 GAN//NITRIDES//GALLIUM NITRIDE
10 0.0000006849 PROPER ORTHOGONAL DECOMPOSITION//REDUCED BASIS METHOD//REDUCED BASIS METHODS