Class information for:
Level 2: ATOMIC LAYER DEPOSITION//CHEMICAL VAPOR DEPOSITION//MOLECULAR LAYER DEPOSITION MLD

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
1854 5551 27.2 66%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 3)


ID, lev.
above		 Publications Label for level above
315 35473 SURFACE & COATINGS TECHNOLOGY//PLASMA NITRIDING//HIGH ENTROPY ALLOYS

Classes in level below (level 1)


ID, lev. below Publications Label for level below
3427 1912 ATOMIC LAYER DEPOSITION//MOLECULAR LAYER DEPOSITION MLD//MOLECULAR LAYER DEPOSITION
8966 1133 LANTHANIDE BETA DIKETONATES//BETA DIKETONATES//BETA DIKETONATE CHELATES
10936 954 PERFLUORINATED CARBOXYLATES//COPPER CVD//IR AND NMR
14601 693 RUO2//RUOD3//RU
20543 394 IRIDIUM COATING//IRIDIUM COATINGS//IR COATING
23189 300 NIPF34//SI3H8//VOLATILE COMPLEXES
28624 165 ETHYL BROMIDE//CRISTALLOCHIM REACTIV PROTECT MAT//CVD MODELLING

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 ATOMIC LAYER DEPOSITION Author keyword 171 28% 10% 530
2 CHEMICAL VAPOR DEPOSITION Journal 42 20% 3% 192
3 MOLECULAR LAYER DEPOSITION MLD Author keyword 27 92% 0% 11
4 ALD Author keyword 25 20% 2% 114
5 ATOMIC LAYER DEPOSITION ALD Author keyword 20 25% 1% 70
6 MOLECULAR LAYER DEPOSITION Author keyword 18 55% 0% 22
7 IRIDIUM COATING Author keyword 15 82% 0% 9
8 BETA DIKETONATES Author keyword 13 31% 1% 35
9 PERFLUORINATED CARBOXYLATES Author keyword 11 65% 0% 11
10 BETA DIKETONATE Author keyword 8 25% 0% 27

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 ATOMIC LAYER DEPOSITION 171 28% 10% 530 Search ATOMIC+LAYER+DEPOSITION Search ATOMIC+LAYER+DEPOSITION
2 MOLECULAR LAYER DEPOSITION MLD 27 92% 0% 11 Search MOLECULAR+LAYER+DEPOSITION+MLD Search MOLECULAR+LAYER+DEPOSITION+MLD
3 ALD 25 20% 2% 114 Search ALD Search ALD
4 ATOMIC LAYER DEPOSITION ALD 20 25% 1% 70 Search ATOMIC+LAYER+DEPOSITION+ALD Search ATOMIC+LAYER+DEPOSITION+ALD
5 MOLECULAR LAYER DEPOSITION 18 55% 0% 22 Search MOLECULAR+LAYER+DEPOSITION Search MOLECULAR+LAYER+DEPOSITION
6 IRIDIUM COATING 15 82% 0% 9 Search IRIDIUM+COATING Search IRIDIUM+COATING
7 BETA DIKETONATES 13 31% 1% 35 Search BETA+DIKETONATES Search BETA+DIKETONATES
8 PERFLUORINATED CARBOXYLATES 11 65% 0% 11 Search PERFLUORINATED+CARBOXYLATES Search PERFLUORINATED+CARBOXYLATES
9 BETA DIKETONATE 8 25% 0% 27 Search BETA+DIKETONATE Search BETA+DIKETONATE
10 RUO2 7 16% 1% 39 Search RUO2 Search RUO2

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 BINARY REACTION SEQUENCE 177 74% 2% 130
2 VOLATILE BARIUM 89 92% 1% 35
3 ALD 87 42% 3% 158
4 HEXAFLUOROACETYLACETONATE 69 64% 1% 68
5 ATOMIC LAYER DEPOSITION 51 12% 7% 399
6 RUTHENIUM THIN FILMS 38 76% 0% 26
7 POLYETHER ADDUCTS 32 88% 0% 15
8 RUTHENIUM DIOXIDE NANORODS 31 92% 0% 12
9 BETA DIKETONATE COMPLEXES 28 40% 1% 55
10 VOLATILE PRECURSORS 27 92% 0% 11

Journals


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 CHEMICAL VAPOR DEPOSITION 42 20% 3% 192

Reviews


Title Publ. year Cit. Active references % act. ref.
to same field
Atomic Layer Deposition: An Overview 2010 1008 208 67%
Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends 2013 159 2284 35%
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process 2005 889 1046 33%
Atomic Layer Deposition of Noble Metals and Their Oxides 2014 18 118 85%
Catalyst Design with Atomic Layer Deposition 2015 3 216 60%
Synthesis and surface engineering of complex nanostructures by atomic layer deposition 2007 344 101 44%
Atomic Layer Deposition of Metal Sulfide Materials 2015 4 53 32%
Atomic layer deposition chemistry: Recent developments and future challenges 2003 422 32 50%
Tailoring nanoporous materials by atomic layer deposition 2011 60 85 69%
Applications of atomic layer deposition to nanofabrication and emerging nanodevices 2009 173 195 37%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 COCOON 6 48% 0.2% 10
2 ZENTRUM MIKROTECHNOL 6 41% 0.2% 11
3 ANGTROM SOLAR 4 75% 0.1% 3
4 STATE ADV TECHNOL PLATINUM MET 4 44% 0.1% 7
5 ANGSTROM MICROSTRUCT 4 35% 0.2% 9
6 ASTRAL 4 31% 0.2% 10
7 PL PHYS SENSORS 4 41% 0.1% 7
8 INTERUNIV SEMICONDUCTOR 3 100% 0.1% 3
9 SUPERCONDUCTING PROD DEV 3 100% 0.1% 3
10 EXPT PHYS TECHNOL 3 18% 0.3% 16

Related classes at same level (level 2)


Rank Relatedness score Related classes
1 0.0000034269 HFO2//HIGH K//HIGH K DIELECTRICS
2 0.0000026060 DIFFUSION BARRIER//ELECTROMIGRATION//CU METALLIZATION
3 0.0000023217 LASER MICRO CLADDING//FREEFORM FABRICAT S//DIMETHYLALUMINUM HYDRIDE
4 0.0000008719 TITANIUM OXIDE//TIO2 110//TIO2 THIN FILMS
5 0.0000007916 INTEGRATED FERROELECTRICS//FERROELECTRIC THIN FILMS//PZT
6 0.0000007807 DIATOMITE//CARBON SILICA ADSORBENTS//CARBOSILS
7 0.0000006661 GALLIUM OXIDE//BETA GA2O3//GA2O3
8 0.0000006515 BORON DIFLUORIDE BETA DIKETONATES//DIBENZOYLMETHANATOBORON DIFLUORIDE//INDICATOR REACTION RATE
9 0.0000006278 HYDROGEN EVOLUTION REACTION//OXYGEN EVOLUTION REACTION//WATER ELECTROLYSIS
10 0.0000005854 ENTHALPY OF SUBLIMATION//COMBUSTION CALORIMETRY//ENTHALPY OF COMBUSTION