Class information for:
Level 2: EUV LITHOG//UNDULATORS//SPECTROMICROSCOPY

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
1490 7092 19.7 55%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 3)


ID, lev.
above		 Publications Label for level above
280 38393 ULTRAMICROSCOPY//MICROSCOPY//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Classes in level below (level 1)


ID, lev. below Publications Label for level below
2562 2136 EUV LITHOG//SOFT XRAY MICROSCOPY//XRAY OPT
9166 1113 CATHODE LENS//SPECTROMICROSCOPY//PHOTOEMISSION MICROSCOPY
10092 1029 GASSENDI//FRONT ENDS//VARIED LINE SPACING GRATINGS
13182 790 COLLECTOR OPTICS//ADV INTERDISCIPLINARY SCI//MAT EXTREME ENVIRONM
16962 561 UNDULATORS//INSERTION DEVICES//SUPERCONDUCTING UNDULATOR
17151 551 BIMR//STXM//SOFT X RAY SPECTROMICROSCOPY
20009 416 PHOTON MICROFABRICAT//APLANATIC OPTICS//MCP OPTICS
26616 205 SPACE NANOTECHNOL//FREESTANDING TRANSMISSION GRATING//SINGLE ORDER DIFFRACTION
26956 198 CONTACT MICROSCOPY//LEAF DETAILS//SOFT X RAY CONTACT MICROSCOPY
33337 93 HALF BRIGHTNESS DOSE//UNIDAD RADIAC IONIZANTES//ASOCIAC EUROTOM

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 EUV LITHOG Address 38 93% 0% 14
2 UNDULATORS Author keyword 37 50% 1% 52
3 SPECTROMICROSCOPY Author keyword 36 48% 1% 54
4 SOFT XRAY MICROSCOPY Address 30 100% 0% 12
5 XRAY OPT Address 29 24% 1% 104
6 CATHODE LENS Author keyword 23 76% 0% 16
7 PRECIS OPT ENGN Address 20 31% 1% 53
8 INSERTION DEVICES Author keyword 19 48% 0% 29
9 EXTREME ULTRAVIOLET Author keyword 17 19% 1% 81
10 STXM Author keyword 17 37% 1% 36

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 UNDULATORS 37 50% 1% 52 Search UNDULATORS Search UNDULATORS
2 SPECTROMICROSCOPY 36 48% 1% 54 Search SPECTROMICROSCOPY Search SPECTROMICROSCOPY
3 CATHODE LENS 23 76% 0% 16 Search CATHODE+LENS Search CATHODE+LENS
4 INSERTION DEVICES 19 48% 0% 29 Search INSERTION+DEVICES Search INSERTION+DEVICES
5 EXTREME ULTRAVIOLET 17 19% 1% 81 Search EXTREME+ULTRAVIOLET Search EXTREME+ULTRAVIOLET
6 STXM 17 37% 1% 36 Search STXM Search STXM
7 SCHWARZSCHILD OPTICS 17 75% 0% 12 Search SCHWARZSCHILD+OPTICS Search SCHWARZSCHILD+OPTICS
8 X RAY EUV OPTICS 15 67% 0% 14 Search X+RAY+EUV+OPTICS Search X+RAY+EUV+OPTICS
9 UNDULATOR 14 21% 1% 61 Search UNDULATOR Search UNDULATOR
10 SUPERCONDUCTING UNDULATOR 14 65% 0% 13 Search SUPERCONDUCTING+UNDULATOR Search SUPERCONDUCTING+UNDULATOR

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 SPECTROMICROSCOPY 96 46% 2% 155
2 MO SI MULTILAYERS 75 64% 1% 73
3 MO SI 47 52% 1% 64
4 X RAY MIRRORS 46 59% 1% 51
5 PHOTOELECTRON MICROSCOPY 40 69% 0% 34
6 MIRRORS 39 13% 4% 274
7 ADVANCED LIGHT SOURCE 33 33% 1% 82
8 RAY PROJECTION LITHOGRAPHY 31 66% 0% 29
9 PHOTOEMISSION SPECTROMICROSCOPY 31 92% 0% 12
10 CATHODE LENS 30 84% 0% 16

Journals

Reviews


Title Publ. year Cit. Active references % act. ref.
to same field
X-RAY INTERACTIONS - PHOTOABSORPTION, SCATTERING, TRANSMISSION, AND REFLECTION AT E=50-30,000 EV, Z=1-92 1993 2768 25 20%
Physical processes in EUV sources for microlithography 2011 41 34 76%
LOW-ENERGY-ELECTRON MICROSCOPY 1994 363 66 47%
Nanometer interface and materials control for multilayer EUV-optical applications 2011 28 104 75%
NEXAFS microscopy and resonant scattering: Composition and orientation probed in real and reciprocal space 2008 77 152 49%
Photoelectron microscopy and applications in surface and materials science 2002 87 168 65%
Pushing the limits of lithography 2000 322 8 25%
Extreme ultraviolet lithography: A review 2007 29 39 72%
Near-edge X-ray absorption fine-structure microscopy of organic and magnetic materials 2009 62 97 31%
In-situ Scanning Transmission X-Ray Microscopy of Catalytic Solids and Related Nanomaterials 2010 31 60 38%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 EUV LITHOG 38 93% 0.2% 14
2 SOFT XRAY MICROSCOPY 30 100% 0.2% 12
3 XRAY OPT 29 24% 1.5% 104
4 PRECIS OPT ENGN 20 31% 0.7% 53
5 BIMR 16 53% 0.3% 21
6 GASSENDI 15 88% 0.1% 7
7 ADV SCI TECHNOL IND 12 18% 0.9% 63
8 GOLD 12 59% 0.2% 13
9 SIBERIAN SR 11 69% 0.1% 9
10 BEAMLINE GRP 9 83% 0.1% 5

Related classes at same level (level 2)


Rank Relatedness score Related classes
1 0.0000019228 JOURNAL OF SYNCHROTRON RADIATION//DIFFRACTION ENHANCED IMAGING//PHASE RETRIEVAL
2 0.0000014451 WEDGE AND STRIP ANODE//CANONICAL ABERRATION THEORY//OPT PHYS ELECT ENGN
3 0.0000009844 LASER AND PARTICLE BEAMS//LASER ENERGET//PHYSICS OF PLASMAS
4 0.0000009219 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//MICROELECTRONIC ENGINEERING//JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
5 0.0000008678 FREE ELECTRON LASER//PHYSICAL REVIEW SPECIAL TOPICS-ACCELERATORS AND BEAMS//FREE ELECTRON LASERS
6 0.0000008615 X-RAY SPECTROMETRY//TXRF//TOTAL REFLECTION X RAY FLUORESCENCE
7 0.0000008533 THIN SPRAY ON LINER//BRILLOUIN SCATTERING SPECTROSCOPY//ELECTRONIC RADIATION
8 0.0000008521 JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS//JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA//ELECTRON MOMENTUM SPECTROSCOPY
9 0.0000006530 PLASMA FOCUS//Z PINCH//PLASMA PINCH
10 0.0000006193 METROLOGIA//ITS 90//METROL QUAL MIRS UL FE LMK