Class information for:
Level 1: PROC MEASUREMENT SENSOR TECHNOL//NANOMETROLOGY//MICRO CMM

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
9431 1088 15.8 55%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
1503 6998 PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY//COORDINATE MEASURING MACHINES//COORDINATE METROLOGY

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 PROC MEASUREMENT SENSOR TECHNOL Address 23 64% 2% 23
2 NANOMETROLOGY Author keyword 19 26% 6% 65
3 MICRO CMM Author keyword 13 61% 1% 14
4 OPTICAL DIFFRACTOMETER Author keyword 11 100% 1% 6
5 NANOPOSITIONING AND NANOMEASURING MACHINE Author keyword 10 61% 1% 11
6 SECT PRECIS ENGN Address 9 83% 0% 5
7 DISPLACEMENT INTERFEROMETRY Author keyword 8 100% 0% 5
8 FRINGE INTERPOLATION Author keyword 6 71% 0% 5
9 CHAIR MFG METROL Address 6 100% 0% 4
10 METROLOGICAL ATOMIC FORCE MICROSCOPE Author keyword 6 100% 0% 4

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 NANOMETROLOGY 19 26% 6% 65 Search NANOMETROLOGY Search NANOMETROLOGY
2 MICRO CMM 13 61% 1% 14 Search MICRO+CMM Search MICRO+CMM
3 OPTICAL DIFFRACTOMETER 11 100% 1% 6 Search OPTICAL+DIFFRACTOMETER Search OPTICAL+DIFFRACTOMETER
4 NANOPOSITIONING AND NANOMEASURING MACHINE 10 61% 1% 11 Search NANOPOSITIONING+AND+NANOMEASURING+MACHINE Search NANOPOSITIONING+AND+NANOMEASURING+MACHINE
5 DISPLACEMENT INTERFEROMETRY 8 100% 0% 5 Search DISPLACEMENT+INTERFEROMETRY Search DISPLACEMENT+INTERFEROMETRY
6 FRINGE INTERPOLATION 6 71% 0% 5 Search FRINGE+INTERPOLATION Search FRINGE+INTERPOLATION
7 METROLOGICAL ATOMIC FORCE MICROSCOPE 6 100% 0% 4 Search METROLOGICAL+ATOMIC+FORCE+MICROSCOPE Search METROLOGICAL+ATOMIC+FORCE+MICROSCOPE
8 HETERODYNE INTERFEROMETER 5 20% 2% 23 Search HETERODYNE+INTERFEROMETER Search HETERODYNE+INTERFEROMETER
9 1D GRATING 5 63% 0% 5 Search 1D+GRATING Search 1D+GRATING
10 HETERODYNE INTERFEROMETRY 4 15% 2% 27 Search HETERODYNE+INTERFEROMETRY Search HETERODYNE+INTERFEROMETRY

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 PITCH MEASUREMENTS 29 72% 2% 23
2 PERIODIC NONLINEARITY 22 68% 2% 19
3 NANOMEASURING MACHINE 18 89% 1% 8
4 TRACEABLE CALIBRATION 13 67% 1% 12
5 HETERODYNE INTERFEROMETERS 12 54% 1% 15
6 HETERODYNE INTERFEROMETRY 9 30% 2% 26
7 OPTICAL MOSAIC GRATINGS 6 80% 0% 4
8 HOMODYNE INTERFEROMETER 6 58% 1% 7
9 X RAY INTERFEROMETRY 6 35% 1% 14
10 PHOTOELECTRIC INCREMENTAL ENCODER 6 100% 0% 4

Journals

Reviews


Title Publ. year Cit. Active
references		 % act. ref.
to same field
A review of the existing performance verification infrastructure for micro-CMMs 2015 1 18 67%
Advances in traceable nanometrology at the National Physical Laboratory 2001 41 7 71%
A review of recent work in sub-nanometre displacement measurement using optical and X-ray interferometry 2002 19 52 62%
The European nanometrology landscape 2011 20 70 6%
Nanometrology 2008 4 54 15%
Small absolute distance measurement with nanometer resolution using geometrical optics principles and a SPP, angular sensor 2008 6 9 11%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 PROC MEASUREMENT SENSOR TECHNOL 23 64% 2.1% 23
2 SECT PRECIS ENGN 9 83% 0.5% 5
3 CHAIR MFG METROL 6 100% 0.4% 4
4 PROZESSMESS SENSORTECH 4 44% 0.6% 7
5 LENGTH TIME 3 50% 0.5% 5
6 MEASUREMENT TESTING EAST CHINA 3 50% 0.5% 5
7 BRAUN WEIG INT METROL IGSM 3 100% 0.3% 3
8 COMP SOR DEV GRP 3 100% 0.3% 3
9 GEOMNIA ADV ENGN SOFTWARE SOLUT 3D 3 100% 0.3% 3
10 BASIC THERMAL LENGTH METROL 3 37% 0.6% 7

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000224479 ABSOLUTE LENGTH MEASUREMENT//GAUGE BLOCK//ULTRAFAST OPT ULTR RECIS GRP
2 0.0000183109 ANGLE STANDARD//ANGLE MEASUREMENT//ANGLE MEASUREMENTS
3 0.0000163559 TIP CHARACTERIZATION//TIP CHARACTERIZER//SIDEWALL MEASUREMENT
4 0.0000152912 COMPLICATED STRUCTURAL COMPONENT//CT METROLOGY//CHAIR METROL QUAL MANAGEMENT
5 0.0000104851 FLEXURE HINGE//PLANAR MOTOR//COMPLIANT MECHANISMS
6 0.0000097232 THERMAL ERROR//FIVE AXIS MACHINE TOOL//ERROR COMPENSATION
7 0.0000085694 STANDARD REFERENCE DATA//OPTICAL HETERODYNE INTERFEROMETER//CHAINS OF LINKED VIBRATORS
8 0.0000076768 MINIMUM ZONE//COORDINATE MEASURING MACHINES//REVERSE ENGINEERING
9 0.0000074315 NANONEWTON//SPRING CONSTANT//NORMAL SPRING CONSTANT
10 0.0000074150 WHITE LIGHT INTERFEROMETRY//COMMUNITY TABUK//PRECIS MECH CONTROL