Class information for:
Level 1: ANISOTROPIC ETCHING//MICRONANOSYST ENGN//MEMS MICRO NANO SYST

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
8178 1211 19.7 55%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
358 16774 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//SENSORS AND ACTUATORS A-PHYSICAL//JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 ANISOTROPIC ETCHING Author keyword 28 27% 7% 89
2 MICRONANOSYST ENGN Address 23 86% 1% 12
3 MEMS MICRO NANO SYST Address 13 80% 1% 8
4 MICRO NANOSYST ENGN Address 13 80% 1% 8
5 CONVEX CORNER Author keyword 10 73% 1% 8
6 TMAH Author keyword 8 19% 3% 36
7 TEXTURIZATION Author keyword 7 26% 2% 23
8 TEXTURISATION Author keyword 7 46% 1% 11
9 MICRONANO MED DEVICES Address 6 80% 0% 4
10 TMAH SOLUTION Author keyword 6 80% 0% 4

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 ANISOTROPIC ETCHING 28 27% 7% 89 Search ANISOTROPIC+ETCHING Search ANISOTROPIC+ETCHING
2 CONVEX CORNER 10 73% 1% 8 Search CONVEX+CORNER Search CONVEX+CORNER
3 TMAH 8 19% 3% 36 Search TMAH Search TMAH
4 TEXTURIZATION 7 26% 2% 23 Search TEXTURIZATION Search TEXTURIZATION
5 TEXTURISATION 7 46% 1% 11 Search TEXTURISATION Search TEXTURISATION
6 TMAH SOLUTION 6 80% 0% 4 Search TMAH+SOLUTION Search TMAH+SOLUTION
7 ANISOTROPIC ETCHING OF SILICON 6 71% 0% 5 Search ANISOTROPIC+ETCHING+OF+SILICON Search ANISOTROPIC+ETCHING+OF+SILICON
8 ELECTROCHEMICAL ETCH STOP 6 50% 1% 8 Search ELECTROCHEMICAL+ETCH+STOP Search ELECTROCHEMICAL+ETCH+STOP
9 ETCHING SIMULATION 5 60% 0% 6 Search ETCHING+SIMULATION Search ETCHING+SIMULATION
10 ACIDIC ETCHING 5 54% 1% 7 Search ACIDIC+ETCHING Search ACIDIC+ETCHING

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 AQUEOUS KOH 98 69% 7% 85
2 TMAH 43 50% 5% 62
3 KOH 30 21% 10% 124
4 DISSOLUTION SLOWNESS SURFACE 23 100% 1% 10
5 TEXTURIZATION 17 38% 3% 36
6 CONVEX CORNERS 13 55% 1% 16
7 ROTATED QUARTZ PLATES 12 86% 0% 6
8 KOH SOLUTION 11 46% 1% 18
9 NAOH SOLUTIONS 11 28% 3% 33
10 THICKNESS CONTROL 10 73% 1% 8

Journals

Reviews


Title Publ. year Cit. Active references % act. ref.
to same field
The effect of alcohol additives on etching characteristics in KOH solutions 2002 47 9 100%
Fabrication techniques of convex corners in a (100)-silicon wafer using bulk micromachining: a review 2007 21 56 68%
Texturization of silicon wafers with Na2CO3 and Na2CO3/NaHCO3 solutions for heterojunction solar-cell applications 2013 1 23 65%
Anisotropy in the wet-etching of semiconductors 2005 17 38 45%
In search of perfection: Understanding the highly defect-selective chemistry of anisotropic etching 2003 55 55 25%
Model of anisotropic etching process for single crystal silicon 1999 0 6 100%
Galvanic Cell Formation: A Review of Approaches to Silicon Etching for Sensor Fabrication 2001 13 50 44%
Silicon microstructuring technology 1996 121 24 21%
Etch stop techniques for micromachining 1997 32 218 30%
Surface modification via wet chemical etching of single-crystalline silicon for photovoltaic application 2013 0 19 42%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 MICRONANOSYST ENGN 23 86% 1.0% 12
2 MEMS MICRO NANO SYST 13 80% 0.7% 8
3 MICRO NANOSYST ENGN 13 80% 0.7% 8
4 MICRONANO MED DEVICES 6 80% 0.3% 4
5 INTEGRAT SENSORS ACTUATORS 3 50% 0.3% 4
6 RIM SOLID STATE CHEM 2 19% 0.9% 11
7 ENERGIA FOTOVOLTA 2 67% 0.2% 2
8 MICRO SYST ENGN 2 12% 1.2% 14
9 MICROSENSOR STRUCT 2 43% 0.2% 3
10 MICRO NANO SYST ENGN 2 14% 0.9% 11

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000118394 PIEZORESISTANCE//CAPACITIVE PRESSURE SENSOR//TOUCH MODE
2 0.0000111790 METAL ASSISTED CHEMICAL ETCHING//METAL ASSISTED ETCHING//RADIAL JUNCTION
3 0.0000101558 SPRAY ETCHING//ETCH FACTOR//ETCHING FACTOR
4 0.0000089831 INTER E ENGN GRP//CHAIR GEN MAT SCI//ALCOY ENGN
5 0.0000081268 HYDROGEN TERMINATION//SHIZUOKA TORY//LAYER BY LAYER OXIDATION
6 0.0000076035 IEEE JOURNAL OF PHOTOVOLTAICS//SILICON SOLAR CELLS//PROGRESS IN PHOTOVOLTAICS
7 0.0000066032 ANGULAR RATE SENSOR//VIBRATORY GYROSCOPE//VIBRATORY GYRO SENSOR
8 0.0000061974 ANTIREFLECTION//ANTI REFLECTION//MOTH EYE
9 0.0000060956 SOLAR CELL TEST//6224//POLY SILICON FILM
10 0.0000060281 HIGH RESOLUTION X RAY MICROSCOPY//INNER SHELL ELECTRON EXCITATION//INTENSE X RAYS