Class information for: |
Basic class information |
| ID | Publications | Average number of references |
Avg. shr. active ref. in WoS |
|---|---|---|---|
| 7803 | 1247 | 16.4 | 51% |
Classes in level above (level 2) |
| ID, lev. above |
Publications | Label for level above |
|---|---|---|
| 740 | 11887 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//MICROELECTRONIC ENGINEERING//JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY |
Terms with highest relevance score |
| Rank | Term | Type of term | Relevance score (tfidf) |
Class's shr. of term's tot. occurrences |
Shr. of publ. in class containing term |
Num. of publ. in class |
|---|---|---|---|---|---|---|
| 1 | LIQUID METAL ION SOURCE | Author keyword | 19 | 64% | 1% | 18 |
| 2 | LIQUID METAL ION SOURCES | Author keyword | 17 | 79% | 1% | 11 |
| 3 | ION BEAMS MAT | Address | 8 | 100% | 0% | 5 |
| 4 | SECT PL PHYS | Address | 3 | 25% | 1% | 10 |
| 5 | FEEP | Author keyword | 3 | 50% | 0% | 4 |
| 6 | NERIME PROCESS | Author keyword | 3 | 60% | 0% | 3 |
| 7 | ADV VEHICLE EXTREME ENVIRONM ELECT CAVE3 | Address | 1 | 50% | 0% | 2 |
| 8 | ALLOY LIQUID METAL ION SOURCE | Author keyword | 1 | 100% | 0% | 2 |
| 9 | ALLOY LIQUID METAL ION SOURCES | Author keyword | 1 | 100% | 0% | 2 |
| 10 | BOOSTER PRINCIPLE | Author keyword | 1 | 100% | 0% | 2 |
Web of Science journal categories |
Author Key Words |
Key Words Plus |
| Rank | Web of Science journal category | Relevance score (tfidf) |
Class's shr. of term's tot. occurrences |
Shr. of publ. in class containing term |
Num. of publ. in class |
|---|---|---|---|---|---|
| 1 | SPLINE LENSES | 8 | 100% | 0% | 5 |
| 2 | METAL ION SOURCES | 7 | 57% | 1% | 8 |
| 3 | NEGATIVE RESIST IMAGE | 6 | 100% | 0% | 4 |
| 4 | METAL ION SOURCE | 4 | 42% | 1% | 8 |
| 5 | EQUILIBRIUM CONDITION | 3 | 50% | 0% | 5 |
| 6 | DROPLET EMISSION | 3 | 57% | 0% | 4 |
| 7 | ALLOY ION SOURCES | 3 | 100% | 0% | 3 |
| 8 | BEAM TECHNOLOGY | 3 | 100% | 0% | 3 |
| 9 | SELF DEVELOPING RESIST | 3 | 45% | 0% | 5 |
| 10 | PROCESSING STABILITY | 3 | 50% | 0% | 4 |
Journals |
Reviews |
| Title | Publ. year | Cit. | Active references | % act. ref. to same field |
|---|---|---|---|---|
| FOCUSED ION-BEAM TECHNOLOGY AND APPLICATIONS | 1987 | 340 | 97 | 75% |
| HIGH-RESOLUTION FOCUSED ION-BEAMS | 1993 | 169 | 123 | 70% |
| Focused ion beam applications to solid state devices | 1996 | 107 | 80 | 46% |
| Focused ion beam technology and ultimate applications | 2009 | 27 | 52 | 38% |
| LIQUID-METAL ION SOURCES AND THEIR APPLICATIONS | 1992 | 4 | 25 | 92% |
| DESIGN PRINCIPLES OF AN OPTIMIZED FOCUSED ION-BEAM SYSTEM | 1991 | 9 | 33 | 64% |
| ION SOURCES FOR ACCELERATORS IN MATERIALS RESEARCH | 1993 | 27 | 105 | 22% |
| LIQUID-METAL ION EMITTERS | 1983 | 48 | 12 | 83% |
| From the scanning electron microscope to nanolithography | 2004 | 0 | 25 | 40% |
| METAL-ION AND CLUSTER BEAMS FOR MICROELECTRONIC RESEARCH AND DEVELOPMENT - A REVIEW | 1988 | 1 | 30 | 90% |
Address terms |
| Rank | Address term | Relevance score (tfidf) |
Class's shr. of term's tot. occurrences |
Shr. of publ. in class containing term |
Num. of publ. in class |
|---|---|---|---|---|---|
| 1 | ION BEAMS MAT | 8 | 100% | 0.4% | 5 |
| 2 | SECT PL PHYS | 3 | 25% | 0.8% | 10 |
| 3 | ADV VEHICLE EXTREME ENVIRONM ELECT CAVE3 | 1 | 50% | 0.2% | 2 |
| 4 | IONENSTRAHIPHYS MAT FOR | 1 | 50% | 0.1% | 1 |
| 5 | NUCL SYST BRANCH | 1 | 50% | 0.1% | 1 |
| 6 | PHYS ENGN TEACHING | 1 | 50% | 0.1% | 1 |
| 7 | IPP HPK H32 | 0 | 33% | 0.1% | 1 |
| 8 | SILVACO TECHNOL | 0 | 33% | 0.1% | 1 |
| 9 | SPACE PROP ADV CONCEPTS | 0 | 33% | 0.1% | 1 |
| 10 | WAFER FABRICAT | 0 | 33% | 0.1% | 1 |
Related classes at same level (level 1) |
| Rank | Relatedness score | Related classes |
|---|---|---|
| 1 | 0.0000258140 | NANOSYST MFG//NANOELECT PROC IL//ION PROJECTION |
| 2 | 0.0000235280 | FOCUSED ION BEAM//SHAVE OFF//SHAVE OFF DEPTH PROFILING |
| 3 | 0.0000102059 | MICROCOLUMN//SCHOTTKY EMITTER//PROD DESIGN TECHNOL |
| 4 | 0.0000094075 | ELECTRON BEAM INDUCED DEPOSITION//FOCUSED ELECTRON BEAM INDUCED DEPOSITION//FOCUSED ION BEAM CHEMICAL VAPOR DEPOSITION FIB CVD |
| 5 | 0.0000086138 | SUR E PHYS ELECT//ELECTRIC EXPLOSION OF CONDUCTORS//PL THEORET MECH |
| 6 | 0.0000078677 | EPITROPIC LIQUID CRYSTALS//MOTOR OIL INTERLAYER//ELECTROCAPILLARY WAVES |
| 7 | 0.0000074545 | NANOPYRAMID ARRAY//DOPANT ION IMPLANTATION//FIS SUPERFICIES INTER ES |
| 8 | 0.0000072761 | CANONICAL ABERRATION THEORY//OPT PHYS ELECT ENGN//ACCURACY OF COMPUTATION |
| 9 | 0.0000068245 | LADDER SILICONE SPIN ON GLASS LS SOG//POLYSILOXENE BASED FILM//SIO2 PATTERN GENERATION |
| 10 | 0.0000066632 | SINGLE ATOM TIP//SUR E MODIFICAT//SINGLE ATOM TIPS |