Class information for:
Level 1: RF MEMS//RF MICROELECTROMECHANICAL SYSTEMS MEMS//DIELECTRIC CHARGING

Basic class information

ID Publications Average number
of references
Avg. shr. active
ref. in WoS
7785 1249 19.6 54%



Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)



ID, lev.
above
Publications Label for level above
358 16774 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//SENSORS AND ACTUATORS A-PHYSICAL//JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Terms with highest relevance score



Rank Term Type of term Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 RF MEMS Author keyword 22 18% 9% 113
2 RF MICROELECTROMECHANICAL SYSTEMS MEMS Author keyword 15 51% 2% 21
3 DIELECTRIC CHARGING Author keyword 12 37% 2% 26
4 CIRFE Address 12 86% 0% 6
5 NLBB Address 9 83% 0% 5
6 CAPACITIVE SWITCHES Author keyword 9 59% 1% 10
7 MICRORELAY Author keyword 9 40% 1% 17
8 RF MEMS SWITCH Author keyword 8 28% 2% 26
9 RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEMS RF MEMS SWITCHES Author keyword 8 100% 0% 5
10 MICROSWITCH Author keyword 7 28% 2% 21

Web of Science journal categories

Author Key Words



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
LCSH search Wikipedia search
1 RF MEMS 22 18% 9% 113 Search RF+MEMS Search RF+MEMS
2 RF MICROELECTROMECHANICAL SYSTEMS MEMS 15 51% 2% 21 Search RF+MICROELECTROMECHANICAL+SYSTEMS+MEMS Search RF+MICROELECTROMECHANICAL+SYSTEMS+MEMS
3 DIELECTRIC CHARGING 12 37% 2% 26 Search DIELECTRIC+CHARGING Search DIELECTRIC+CHARGING
4 CAPACITIVE SWITCHES 9 59% 1% 10 Search CAPACITIVE+SWITCHES Search CAPACITIVE+SWITCHES
5 MICRORELAY 9 40% 1% 17 Search MICRORELAY Search MICRORELAY
6 RF MEMS SWITCH 8 28% 2% 26 Search RF+MEMS+SWITCH Search RF+MEMS+SWITCH
7 RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEMS RF MEMS SWITCHES 8 100% 0% 5 Search RADIO+FREQUENCY+MICROELECTROMECHANICAL+SYSTEMS+RF+MEMS+SWITCHES Search RADIO+FREQUENCY+MICROELECTROMECHANICAL+SYSTEMS+RF+MEMS+SWITCHES
8 MICROSWITCH 7 28% 2% 21 Search MICROSWITCH Search MICROSWITCH
9 DIELECTRIC CHARGING CONTROL 6 100% 0% 4 Search DIELECTRIC+CHARGING+CONTROL Search DIELECTRIC+CHARGING+CONTROL
10 MICROELECTROMECHANICAL SYSTEMS MEMS RELAY 6 100% 0% 4 Search MICROELECTROMECHANICAL+SYSTEMS+MEMS+RELAY Search MICROELECTROMECHANICAL+SYSTEMS+MEMS+RELAY

Key Words Plus



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 RF MEMS 30 36% 5% 66
2 CAPACITIVE SWITCHES 24 53% 3% 32
3 MEMS CAPACITIVE SWITCHES 23 86% 1% 12
4 ETCHING SILICON DIOXIDE 21 85% 1% 11
5 MEMS SWITCHES 19 46% 2% 31
6 MICRORELAYS 19 64% 1% 18
7 SHUNT SWITCH 13 80% 1% 8
8 SHUNT SWITCHES 13 46% 2% 21
9 RF MEMS SWITCH 13 62% 1% 13
10 CAPACITIVE RF MEMS 12 63% 1% 12

Journals

Reviews



Title Publ. year Cit. Active references % act. ref.
to same field
A comprehensive study on RF MEMS switch 2014 1 16 75%
Surface science, MEMS and NEMS: Progress and opportunities for surface science research performed on, or by, microdevices 2013 17 135 22%
A review of micro-contact physics for microelectromechanical systems (MEMS) metal contact switches 2013 6 79 44%
Integrated Magnetic MEMS Relays: Status of the Technology 2014 1 83 51%
The low-complexity RF MEMS switch at EADS: an overview 2011 4 1 100%
A Review of Adhesion in an Ohmic Microswitch 2010 11 33 52%
RF MEMS from a device perspective 2000 294 32 41%
Review of Device and Reliability Physics of Dielectrics in Electrostatically Driven MEMS Devices 2009 26 45 36%
RF MEMS technology 2007 10 22 64%
Review of low actuation voltage RF MEMS electrostatic switches based on metallic and carbon alloys 2013 1 49 43%

Address terms



Rank Address term Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ.
in class
1 CIRFE 12 86% 0.5% 6
2 NLBB 9 83% 0.4% 5
3 MEMS UNIT 5 63% 0.4% 5
4 IMM ROMA 4 75% 0.2% 3
5 ELECT ENGN PHYS SCI ENGN 3 57% 0.3% 4
6 GRP MICRO NANOSYST 3 100% 0.2% 3
7 INTEGRATED RF ENGN 3 50% 0.3% 4
8 MICRO SYST GRP 3 50% 0.3% 4
9 ANTENNA TECHNOL BRANCH 2 44% 0.3% 4
10 YRP DEV 2 67% 0.2% 2

Related classes at same level (level 1)



Rank Relatedness score Related classes
1 0.0000220915 TUNABLE FILTER//MICROWAVE ACTIVE FILTER//TUNABLE BANDPASS FILTER
2 0.0000180238 MODIFIED COUPLE STRESS THEORY//PULL IN INSTABILITY//DYNAMIC PULL IN INSTABILITY
3 0.0000134340 ACCELERATION SWITCH//INERTIAL SWITCH//CONSTANT FORCE MECHANISM
4 0.0000130316 MICROWAVE POWER SENSOR//POWER SENSOR//GAAS MMIC
5 0.0000116883 MICROWAVE CIRCUITS DEVICES GRP//PHASE SHIFTER//STEP ATTENUATOR
6 0.0000100260 THERMOELASTIC DAMPING//MICROMECHANICAL RESONATOR//THERMOELASTIC DISSIPATION
7 0.0000094663 PROBE CARD//POROUS SILICON MICROMACHINING//VERTICAL ACTIVE DEVICES
8 0.0000085177 SPIRAL INDUCTOR//MASTERSLICE//INDUCTOR MODEL
9 0.0000084710 MICROMIRROR//VARIABLE OPTICAL ATTENUATOR VOA//VERTICAL COMBDRIVES
10 0.0000083746 STRIP BENDING TEST//MEMS PROD//HIGH CYCLE FATIGUE TEST