Class information for:
Level 1: RANGE PARAMETERS//SOFT ERROR MAPPING//HIGH ENERGY ION IMPLANTATION

Basic class information

ID Publications Average number
of references
Avg. shr. active
ref. in WoS
7565 1273 16.8 44%



Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)



ID, lev.
above
Publications Label for level above
372 16511 SWAMP//OXYGEN PRECIPITATION//GROWN IN DEFECT

Terms with highest relevance score



Rank Term Type of term Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 RANGE PARAMETERS Author keyword 6 80% 0% 4
2 SOFT ERROR MAPPING Author keyword 6 100% 0% 4
3 HIGH ENERGY ION IMPLANTATION Author keyword 5 35% 1% 12
4 NEUTRON DEPTH PROFILING Author keyword 5 30% 1% 14
5 LATERAL STRAGGLING Author keyword 5 63% 0% 5
6 ION RANGES Author keyword 4 67% 0% 4
7 ATSUGI SEMICOND Address 4 75% 0% 3
8 CESIA SETTORE RETI COMUNICAZ Address 3 100% 0% 3
9 LONGITUDINAL RANGE STRAGGLING Author keyword 3 100% 0% 3
10 RANGE STRAGGLING Author keyword 2 28% 1% 7

Web of Science journal categories

Author Key Words



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
LCSH search Wikipedia search
1 RANGE PARAMETERS 6 80% 0% 4 Search RANGE+PARAMETERS Search RANGE+PARAMETERS
2 SOFT ERROR MAPPING 6 100% 0% 4 Search SOFT+ERROR+MAPPING Search SOFT+ERROR+MAPPING
3 HIGH ENERGY ION IMPLANTATION 5 35% 1% 12 Search HIGH+ENERGY+ION+IMPLANTATION Search HIGH+ENERGY+ION+IMPLANTATION
4 NEUTRON DEPTH PROFILING 5 30% 1% 14 Search NEUTRON+DEPTH+PROFILING Search NEUTRON+DEPTH+PROFILING
5 LATERAL STRAGGLING 5 63% 0% 5 Search LATERAL+STRAGGLING Search LATERAL+STRAGGLING
6 ION RANGES 4 67% 0% 4 Search ION+RANGES Search ION+RANGES
7 LONGITUDINAL RANGE STRAGGLING 3 100% 0% 3 Search LONGITUDINAL+RANGE+STRAGGLING Search LONGITUDINAL+RANGE+STRAGGLING
8 RANGE STRAGGLING 2 28% 1% 7 Search RANGE+STRAGGLING Search RANGE+STRAGGLING
9 ELECTRIC CHARGE ACCUMULATION 2 67% 0% 2 Search ELECTRIC+CHARGE+ACCUMULATION Search ELECTRIC+CHARGE+ACCUMULATION
10 RANGE DISTRIBUTIONS 2 67% 0% 2 Search RANGE+DISTRIBUTIONS Search RANGE+DISTRIBUTIONS

Key Words Plus



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 PROJECTED RANGE 21 73% 1% 16
2 IMPURITY CONCENTRATION PROFILES 18 89% 1% 8
3 STOPPING POWER MODEL 8 70% 1% 7
4 MEAN PROJECTED RANGE 8 100% 0% 5
5 AMORPHOUS TARGETS 8 48% 1% 12
6 BORON IMPLANTATION 8 48% 1% 12
7 PEARSON DISTRIBUTIONS 6 80% 0% 4
8 LITHIUM IMPLANTATION 6 100% 0% 4
9 PROJECTED RANGES 6 100% 0% 4
10 AR IMPLANTATION 4 75% 0% 3

Journals

Reviews



Title Publ. year Cit. Active
references
% act. ref.
to same field
NEUTRON DEPTH PROFILING - OVERVIEW AND DESCRIPTION OF NIST FACILITIES 1993 49 58 60%
RANGES IN SI AND LIGHTER MONO AND MULTIELEMENT TARGETS 1995 31 67 55%
CHANNELING IMPLANTS IN SILICON-CRYSTALS 1994 10 34 56%
DAMAGE FORMATION AND ANNEALING OF ION-IMPLANTATION IN SI 1991 42 66 24%
A Monte Carlo simulation study of high-dose and low-energy boron implantation into LPCVD-NiDoS polycrystalline thin films 2008 0 14 50%
NEAR-SURFACE PROFILING OF SEMICONDUCTOR-MATERIALS USING NEUTRON DEPTH PROFILING 1995 4 9 33%
APPLICATION OF NEUTRON DEPTH PROFILING TO MICROELECTRONIC MATERIALS PROCESSING 1986 5 25 64%
ON THE PERFORMANCE AND LIFETIME OF SOLAR MIRROR FOILS IN SPACE 1985 1 4 50%
ION-IMPLANTATION FOR VERY LARGE-SCALE INTEGRATION 1982 5 10 40%

Address terms



Rank Address term Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ.
in class
1 ATSUGI SEMICOND 4 75% 0.2% 3
2 CESIA SETTORE RETI COMUNICAZ 3 100% 0.2% 3
3 DESIGN MODELING HIGH SPEED BIPOLAR MOS TRANSI 1 100% 0.2% 2
4 SEMICOND INTEGRATED SYST 1 100% 0.2% 2
5 COMMUN ELE ENGN 1 50% 0.1% 1
6 DEUT ELE ONEN SYNCHROTRON 1 50% 0.1% 1
7 DPTO ELE ICIDAD ELECT 1 50% 0.1% 1
8 FESTKORPERELEK 1 50% 0.1% 1
9 MAT CHARACTERISAT PREPARAT 1 50% 0.1% 1
10 MEASURING SYST 1 50% 0.1% 1

Related classes at same level (level 1)



Rank Relatedness score Related classes
1 0.0000131523 IBIEC//SOLID PHASE EPITAXIAL GROWTH//LATERAL SOLID PHASE EPITAXY
2 0.0000123144 VIBRATING CAPACITOR//SEMICOND EQUIPMENT OPERAT//SURFACE VOLTAGE
3 0.0000108313 TRANSIENT ENHANCED DIFFUSION//SWAMP//PAIR DIFFUSION MODEL
4 0.0000097396 STOPPING POWER//STOPPING FORCE//ENERGY LOSS
5 0.0000097136 MOLECULAR HYDRINO//NOVEL HYDRIDE ION//NEW ENERGY SOURCE
6 0.0000069562 MEV ION IMPLANTATION//ACTIVATION EFFICIENCY//COLD IMPLANTS
7 0.0000067761 RFQ ACCELERATOR//RFQ//SFRFQ
8 0.0000060491 ELASTIC RECOIL DETECTION//ION BEAM ANALYSIS//TOF ERDA
9 0.0000057531 ION CUT//SURFACE BLISTERING//SMART CUT
10 0.0000055519 ION BEAM MIXING//BALLISTIC MIXING//ION MIXING