Class information for:
Level 1: PZT THICK FILM//PIEZOELECTRIC THICK FILM//PZT THICK FILMS

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
7525 1278 19.6 67%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
178 21135 INTEGRATED FERROELECTRICS//FERROELECTRIC THIN FILMS//PZT

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 PZT THICK FILM Author keyword 11 54% 1% 14
2 PIEZOELECTRIC THICK FILM Author keyword 8 56% 1% 10
3 PZT THICK FILMS Author keyword 7 53% 1% 10
4 TRANSVERSE PIEZOELECTRIC COEFFICIENT Author keyword 7 67% 0% 6
5 IN PLANE POLARIZATION Author keyword 6 80% 0% 4
6 MIMM Address 6 53% 1% 8
7 COMPOSITE THICK FILM Author keyword 4 75% 0% 3
8 PNEUMATIC LOADING METHOD Author keyword 4 75% 0% 3
9 THICK FILM PZT Author keyword 4 75% 0% 3
10 TUKUBA Address 3 57% 0% 4

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 PZT THICK FILM 11 54% 1% 14 Search PZT+THICK+FILM Search PZT+THICK+FILM
2 PIEZOELECTRIC THICK FILM 8 56% 1% 10 Search PIEZOELECTRIC+THICK+FILM Search PIEZOELECTRIC+THICK+FILM
3 PZT THICK FILMS 7 53% 1% 10 Search PZT+THICK+FILMS Search PZT+THICK+FILMS
4 TRANSVERSE PIEZOELECTRIC COEFFICIENT 7 67% 0% 6 Search TRANSVERSE+PIEZOELECTRIC+COEFFICIENT Search TRANSVERSE+PIEZOELECTRIC+COEFFICIENT
5 IN PLANE POLARIZATION 6 80% 0% 4 Search IN+PLANE+POLARIZATION Search IN+PLANE+POLARIZATION
6 COMPOSITE THICK FILM 4 75% 0% 3 Search COMPOSITE+THICK+FILM Search COMPOSITE+THICK+FILM
7 PNEUMATIC LOADING METHOD 4 75% 0% 3 Search PNEUMATIC+LOADING+METHOD Search PNEUMATIC+LOADING+METHOD
8 THICK FILM PZT 4 75% 0% 3 Search THICK+FILM+PZT Search THICK+FILM+PZT
9 PIEZOELECTRIC COEFFICIENT 3 16% 1% 18 Search PIEZOELECTRIC+COEFFICIENT Search PIEZOELECTRIC+COEFFICIENT
10 PIEZOELECTRIC THIN FILMS 2 17% 1% 13 Search PIEZOELECTRIC+THIN+FILMS Search PIEZOELECTRIC+THIN+FILMS

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 ELECTROSTRICTIVE STRAINS 27 71% 2% 22
2 D31 11 65% 1% 11
3 PZT THIN FILMS 7 20% 3% 32
4 MULTIDEPOSITED COATINGS 6 100% 0% 4
5 METAL FOILS 4 31% 1% 12
6 OPTICAL MICRO SCANNER 4 75% 0% 3
7 TRANSVERSE PIEZOELECTRIC COEFFICIENT 3 57% 0% 4
8 E31 F 3 100% 0% 3
9 PIEZOELECTRIC THICK FILMS 3 50% 0% 4
10 INFILTRATIONS 3 60% 0% 3

Journals

Reviews


Title Publ. year Cit. Active references % act. ref.
to same field
Recent progress in materials issues for piezoelectric MEMS 2008 104 86 30%
Piezoelectric MEMS sensors: state-of-the-art and perspectives 2009 131 120 24%
PZT thin films for microsensors and actuators: Where do we stand? 2000 186 72 31%
Measurement of longitudinal piezoelectric coefficient of film with scanning-modulated interferometer 2006 5 7 100%
Processing Technologies for High-Permittivity Thin Films in Capacitor Applications 2010 31 130 15%
Properties of piezoelectric actuator on silicon membrane, prepared by screen printing method 2005 9 7 57%
Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging 2015 0 53 51%
Piezoelectric films for MEMS applications 2001 7 21 52%
PZT ferroelectrics thin films used in MEMS 2005 0 6 50%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 MIMM 6 53% 0.6% 8
2 TUKUBA 3 57% 0.3% 4
3 GREMAN CNRS UMR7347 3 100% 0.2% 3
4 MI MIT COOPERAT PROGRAM 3 100% 0.2% 3
5 SENSORS SYST SECTOR 3 100% 0.2% 3
6 USITT 3 100% 0.2% 3
7 NIH TRANSDUCER OURCE 2 20% 0.7% 9
8 MICROSYST NANOTECHNOL 2 13% 1.0% 13
9 UNDERWATER ROBOT GRP 2 36% 0.3% 4
10 ICPR 1 38% 0.2% 3

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000219797 PZT//PZT THIN FILMS//INTEGRATED FERROELECTRICS
2 0.0000194258 AEROSOL DEPOSITION METHOD//AEROSOL DEPOSITION//AEROSOL DEPOSITION METHOD ADM
3 0.0000174420 IMPRINT ELECTRICAL FIELD//SHAPE MEMORY PIEZOELECTRIC ACTUATOR//PZT POLYCRYSTALLINE FILM
4 0.0000125312 MEMS PATTERNING//ETCHING DAMAGE//RUOX PT
5 0.0000120040 MICROPHONE//TELECOMMUN ELE OACOUST//CONDENSER MICROPHONES
6 0.0000101586 NIH TRANSDUCER OURCE//MEDICAL ARRAY TRANSDUCERS//TRANSDUCER OURCE
7 0.0000092484 DOMAIN SWITCHING//CERAM MECH ENGN//FERROELECTRIC CERAMICS
8 0.0000087424 CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER CMUT//AIR COUPLED//CMUT
9 0.0000079474 PIEZOELECTRIC PROPERTIES//PZT POWDERS//PMS PZT
10 0.0000078882 ENERGY HARVESTING//ENERGY HARVESTER//PIEZOELECTRIC ENERGY HARVESTING