Class information for:
Level 1: PLASMA BASED ION IMPLANTATION//PLASMA IMMERSION ION IMPLANTATION//SHUNTING ARC

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
7286 1308 16.8 69%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
2372 3849 VACUUM ARC//CATHODE SPOT//VACUUM ARCS

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 PLASMA BASED ION IMPLANTATION Author keyword 98 73% 6% 75
2 PLASMA IMMERSION ION IMPLANTATION Author keyword 86 39% 13% 172
3 SHUNTING ARC Author keyword 45 94% 1% 16
4 PLASMA SOURCE ION IMPLANTATION Author keyword 27 53% 3% 36
5 PLASMA BASED ION IMPLANTATION PBII Author keyword 24 68% 2% 21
6 PLASMA IMMERSION ION IMPLANTATION PIII Author keyword 18 45% 2% 31
7 PLASMA BASED ION IMPLANTATION AND DEPOSITION PBIID Author keyword 15 82% 1% 9
8 ION SHEATH Author keyword 13 46% 2% 21
9 PLASMA DOPING PLAD Author keyword 13 62% 1% 13
10 ECR PLASMA WITH A MIRROR FIELD Author keyword 11 100% 0% 6

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 PLASMA BASED ION IMPLANTATION 98 73% 6% 75 Search PLASMA+BASED+ION+IMPLANTATION Search PLASMA+BASED+ION+IMPLANTATION
2 PLASMA IMMERSION ION IMPLANTATION 86 39% 13% 172 Search PLASMA+IMMERSION+ION+IMPLANTATION Search PLASMA+IMMERSION+ION+IMPLANTATION
3 SHUNTING ARC 45 94% 1% 16 Search SHUNTING+ARC Search SHUNTING+ARC
4 PLASMA SOURCE ION IMPLANTATION 27 53% 3% 36 Search PLASMA+SOURCE+ION+IMPLANTATION Search PLASMA+SOURCE+ION+IMPLANTATION
5 PLASMA BASED ION IMPLANTATION PBII 24 68% 2% 21 Search PLASMA+BASED+ION+IMPLANTATION+PBII Search PLASMA+BASED+ION+IMPLANTATION+PBII
6 PLASMA IMMERSION ION IMPLANTATION PIII 18 45% 2% 31 Search PLASMA+IMMERSION+ION+IMPLANTATION+PIII Search PLASMA+IMMERSION+ION+IMPLANTATION+PIII
7 PLASMA BASED ION IMPLANTATION AND DEPOSITION PBIID 15 82% 1% 9 Search PLASMA+BASED+ION+IMPLANTATION+AND+DEPOSITION+PBIID Search PLASMA+BASED+ION+IMPLANTATION+AND+DEPOSITION+PBIID
8 ION SHEATH 13 46% 2% 21 Search ION+SHEATH Search ION+SHEATH
9 PLASMA DOPING PLAD 13 62% 1% 13 Search PLASMA+DOPING+PLAD Search PLASMA+DOPING+PLAD
10 ECR PLASMA WITH A MIRROR FIELD 11 100% 0% 6 Search ECR+PLASMA+WITH+A+MIRROR+FIELD Search ECR+PLASMA+WITH+A+MIRROR+FIELD

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 CYLINDRICAL BORE 39 80% 2% 24
2 HIGH VOLTAGE PULSE 34 93% 1% 13
3 FINITE RISE 33 100% 1% 13
4 MULTIPOLAR BUCKET PLASMA 33 100% 1% 13
5 SOURCE ION IMPLANTATION 29 40% 4% 57
6 INNER SURFACE MODIFICATION 26 100% 1% 11
7 MATRIX SHEATH 26 87% 1% 13
8 HV PULSES 23 86% 1% 12
9 IMMERSION ION IMPLANTATION 22 17% 9% 119
10 DISCHARGE CATHODE MATERIALS 21 90% 1% 9

Journals

Reviews


Title Publ. year Cit. Active references % act. ref.
to same field
Plasma-blased ion implantation and deposition: A review of physics, technology, and applications 2005 58 183 68%
Plasma immersion ion implantation - A fledgling technique for semiconductor processing 1996 167 77 65%
Formation of diamond-like carbon films by plasma-based ion implantation and their characterization 2006 7 38 82%
Microcavity engineering by plasma immersion ion implantation 1998 14 49 59%
Simulation methods of ion sheath dynamics in plasma source ion implantation 2004 3 55 95%
Research progress in the inner surface modification of metal tubes by plasma processing 2006 0 34 91%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 MAT COMPONENT DEV 11 100% 0.5% 6
2 ASSOCIADO MAT SENSO 9 67% 0.6% 8
3 702 8 39% 1.2% 16
4 PLASMA SCI MICROELECT 7 67% 0.5% 6
5 ASSOC PLASMA 5 54% 0.5% 7
6 ASSOCIADO PLASMA 4 26% 1.1% 14
7 STATE WELDING PROD TECHNOL 4 38% 0.7% 9
8 ASSOC PLASMAS 4 75% 0.2% 3
9 ASSOCIADO PLASMAS 3 45% 0.4% 5
10 ASSOCIATED PLASMA 3 16% 1.2% 16

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000090076 PLASMA NITRIDING//EXPANDED AUSTENITE//NITRIDING
2 0.0000084806 RADIAT BEAM MAT ENGN//TI AL ZR ALLOY//ION PHYS MAT
3 0.0000069719 VACUUM ARC//CATHODE SPOT//VACUUM ARCS
4 0.0000069250 SHANGHAI CARDIOVASC//BIOMAT SUR E MODIFICAT SICHUAN//TI O FILM
5 0.0000060799 BOHM CRITERION//PLASMA SOLID INTERACTION//EMISSIVE PROBE
6 0.0000059336 DIAMOND LIKE CARBON//DLC//DLC COATINGS
7 0.0000048845 FUSED HOLLOW CATHODE//HOLLOW CATHODE//PLASMA GRP
8 0.0000047004 PL PLASMA PHYS GRP//PLASMA ACTIVATED COATING//PLASMA POLYMERIZED SURFACE
9 0.0000045612 DOUBLE GLOW//LASER NITRIDING//LASER GAS ALLOYING
10 0.0000045458 SELECTIVE REMOVAL OF ATOMS//MACROPOROUS CHAR//COMPOSITE ION BEAM IRRADIATION