Class information for:
Level 1: TRANSIENT ENHANCED DIFFUSION//SWAMP//PAIR DIFFUSION MODEL

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
709 3076 21.4 60%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
372 16511 SWAMP//OXYGEN PRECIPITATION//GROWN IN DEFECT

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 TRANSIENT ENHANCED DIFFUSION Author keyword 83 69% 2% 72
2 SWAMP Address 40 79% 1% 26
3 PAIR DIFFUSION MODEL Author keyword 23 100% 0% 10
4 MOLECULAR ION IMPLANTATION Author keyword 21 85% 0% 11
5 SHALLOW JUNCTION Author keyword 16 30% 1% 43
6 ION IMPLANTAT GRP Address 15 67% 0% 14
7 IMETEM Address 13 25% 1% 46
8 MATIS Address 9 17% 1% 45
9 311 DEFECTS Author keyword 8 100% 0% 5
10 PARAMETR CONDUCT IMPLANT Address 8 100% 0% 5

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 TRANSIENT ENHANCED DIFFUSION 83 69% 2% 72 Search TRANSIENT+ENHANCED+DIFFUSION Search TRANSIENT+ENHANCED+DIFFUSION
2 PAIR DIFFUSION MODEL 23 100% 0% 10 Search PAIR+DIFFUSION+MODEL Search PAIR+DIFFUSION+MODEL
3 MOLECULAR ION IMPLANTATION 21 85% 0% 11 Search MOLECULAR+ION+IMPLANTATION Search MOLECULAR+ION+IMPLANTATION
4 SHALLOW JUNCTION 16 30% 1% 43 Search SHALLOW+JUNCTION Search SHALLOW+JUNCTION
5 311 DEFECTS 8 100% 0% 5 Search 311+DEFECTS Search 311+DEFECTS
6 END OF RANGE DEFECTS 8 62% 0% 8 Search END+OF+RANGE+DEFECTS Search END+OF+RANGE+DEFECTS
7 TRANSIENT ENHANCED DIFFUSION TED 8 62% 0% 8 Search TRANSIENT+ENHANCED+DIFFUSION+TED Search TRANSIENT+ENHANCED+DIFFUSION+TED
8 DOPANT DIFFUSION 7 30% 1% 19 Search DOPANT+DIFFUSION Search DOPANT+DIFFUSION
9 BORON DIFFUSION 7 27% 1% 21 Search BORON+DIFFUSION Search BORON+DIFFUSION
10 311 DEFECT 6 80% 0% 4 Search 311+DEFECT Search 311+DEFECT

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 TRANSIENT ENHANCED DIFFUSION 371 72% 9% 291
2 DOPANT DIFFUSION 307 67% 9% 275
3 B DIFFUSION 115 85% 2% 61
4 BORON DIFFUSION 103 49% 5% 151
5 ION IMPLANTED SILICON 66 46% 3% 106
6 ELECTRICAL DEACTIVATION 59 84% 1% 32
7 BORON INTERSTITIAL CLUSTERS 42 94% 0% 15
8 PREAMORPHIZED SILICON 40 76% 1% 28
9 ENHANCED DIFFUSION 38 31% 3% 101
10 IMPLANTED SILICON 35 29% 3% 102

Journals

Reviews


Title Publ. year Cit. Active references % act. ref.
to same field
Transient enhanced diffusion of boron in Si 2002 167 83 90%
Mechanisms of boron diffusion in silicon and germanium 2013 25 106 62%
POINT-DEFECTS AND DOPANT DIFFUSION IN SILICON 1989 946 130 65%
Physical mechanisms of transient enhanced dopant diffusion in ion-implanted silicon 1997 460 70 83%
Fundamentals of silicon material properties for successful exploitation of strain engineering in modern CMOS manufacturing 2006 83 109 40%
Front-end process modeling in silicon 2009 14 294 66%
Boron diffusion in silicon: the anomalies and control by point defect engineering 2003 43 160 74%
Damage Formation and Evolution in Ion-Implanted Crystalline Si 2010 8 74 64%
A SYSTEMATIC ANALYSIS OF DEFECTS IN ION-IMPLANTED SILICON 1988 323 51 55%
Trends in semiconductor defect engineering at the nanoscale 2010 10 204 35%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 SWAMP 40 79% 0.8% 26
2 ION IMPLANTAT GRP 15 67% 0.5% 14
3 IMETEM 13 25% 1.5% 46
4 MATIS 9 17% 1.5% 45
5 PARAMETR CONDUCT IMPLANT 8 100% 0.2% 5
6 E ELECT 5 55% 0.2% 6
7 FRONT END PROD 4 75% 0.1% 3
8 PETRO PHYS GRP 4 75% 0.1% 3
9 IMM SEZ CATANIA 4 36% 0.3% 8
10 IT COMPUTAT ELECT 3 100% 0.1% 3

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000198171 ULTRAVIOLET LIGHT DETECTORS//ORIENTATION OF MOLECULES//BORON CHEMICAL VAPOR DEPOSITION
2 0.0000152347 ELECT MAT DEVICES NANOSTRUCT//L DLTS//CNR IMM MATIS
3 0.0000150898 IBIEC//SOLID PHASE EPITAXIAL GROWTH//LATERAL SOLID PHASE EPITAXY
4 0.0000108313 RANGE PARAMETERS//SOFT ERROR MAPPING//HIGH ENERGY ION IMPLANTATION
5 0.0000095276 ION CUT//SURFACE BLISTERING//SMART CUT
6 0.0000081780 CLUSTER OF DEFECTS//GROUP II ELEMENTS//SI CD
7 0.0000073050 ELECTRONIC RADIATION//RUMENTAT MESU//CROSS SECTIONAL SEM
8 0.0000071382 FILM EDGE//SHAPE ENGINEERING//SILICON TECHNOLOGIES
9 0.0000063922 LIFETIME CONTROL//SEMI INSULATING MATERIALS//POWER DIODES
10 0.0000055959 AS IMPURITY//CONDUCTING POLYMER BLENDS//GROUND WATER TREATMENT