Class information for:
Level 1: 3C SIC//FG NANOTECHNOL//HOLLOW VOID

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
6069 1467 19.0 68%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
1001 9900 SILICON CARBIDE//4H SIC//SIC

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 3C SIC Author keyword 37 27% 8% 118
2 FG NANOTECHNOL Address 21 65% 1% 20
3 HOLLOW VOID Author keyword 17 100% 1% 8
4 MONOMETHYLSILANE Author keyword 15 54% 1% 19
5 FT2M Address 12 75% 1% 9
6 POLY SIC Author keyword 10 63% 1% 10
7 ZENTRUM MIKRO NANOTECHNOL Address 8 34% 1% 20
8 HYDROGEN PLASMA SPUTTERING Author keyword 8 62% 1% 8
9 3C SIC FILM Author keyword 6 80% 0% 4
10 POLY 3C SIC Author keyword 6 53% 1% 8

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 3C SIC 37 27% 8% 118 Search 3C+SIC Search 3C+SIC
2 HOLLOW VOID 17 100% 1% 8 Search HOLLOW+VOID Search HOLLOW+VOID
3 MONOMETHYLSILANE 15 54% 1% 19 Search MONOMETHYLSILANE Search MONOMETHYLSILANE
4 POLY SIC 10 63% 1% 10 Search POLY+SIC Search POLY+SIC
5 HYDROGEN PLASMA SPUTTERING 8 62% 1% 8 Search HYDROGEN+PLASMA+SPUTTERING Search HYDROGEN+PLASMA+SPUTTERING
6 3C SIC FILM 6 80% 0% 4 Search 3C+SIC+FILM Search 3C+SIC+FILM
7 POLY 3C SIC 6 53% 1% 8 Search POLY+3C+SIC Search POLY+3C+SIC
8 TRIODE PLASMA CVD 4 67% 0% 4 Search TRIODE+PLASMA+CVD Search TRIODE+PLASMA+CVD
9 3C SIC HETEROEPITAXY 4 50% 0% 6 Search 3C+SIC+HETEROEPITAXY Search 3C+SIC+HETEROEPITAXY
10 SICOI 4 50% 0% 6 Search SICOI Search SICOI

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 3C SIC FILMS 26 53% 2% 35
2 1 3 DISILABUTANE 26 87% 1% 13
3 BETA SIC FILMS 17 68% 1% 15
4 SIC FILMS 17 34% 3% 41
5 CUBIC SIC FILMS 17 72% 1% 13
6 BETA SIC SI100 INTERFACES 14 100% 0% 7
7 MONOMETHYLSILANE 12 56% 1% 15
8 HETEROEPITAXIAL GROWTH 11 14% 5% 75
9 C2H4 BEAM 11 100% 0% 6
10 HYDROGEN CHLORIDE GASES 11 100% 0% 6

Journals

Reviews


Title Publ. year Cit. Active references % act. ref.
to same field
3C-SiC Heteroepitaxial Growth on Silicon: The Quest for Holy Grail 2015 1 111 75%
Silicon carbide for microelectromechanical systems 2000 80 100 52%
Micro- and nanomechanical structures for silicon carbide MEMS and NEMS 2008 31 130 47%
Advances in silicon carbide science and technology at the micro- and nanoscales 2013 15 222 29%
Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications 2007 145 454 18%
SiC sensors: a review 2007 65 58 36%
Silicon carbide and silicon carbide-based structures - The physics of epitaxy 2002 62 53 21%
Prospects of chemical vapor grown silicon carbide thin films using halogen-free single sources in nuclear reactor applications: A review 2013 3 83 39%
RECENT DEVELOPMENTS IN SIC SINGLE-CRYSTAL ELECTRONICS 1992 171 61 31%
Multi-Scale Simulation of Nucleation and Growth of Nanoscale SiC on Si 2012 1 99 42%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 FG NANOTECHNOL 21 65% 1.4% 20
2 FT2M 12 75% 0.6% 9
3 ZENTRUM MIKRO NANOTECHNOL 8 34% 1.4% 20
4 FESTKORPERELEKTR 5 44% 0.5% 8
5 QUAL EVALUAT CHEM ANAL 4 67% 0.3% 4
6 MICROSENSOR ACTUATOR TECHNOL 4 50% 0.4% 6
7 NOVASIC 4 38% 0.5% 8
8 MICROFABRICAT 3 17% 1.1% 16
9 SEMICOND SCI ENGN 3 60% 0.2% 3
10 PURIFIED MAT 2 38% 0.3% 5

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000200873 ELECTRON BEAM ANNEALING//RAFTER//ION BEAM SYNTHESIS IBS
2 0.0000172990 AMORPHOUS SILICON CARBIDE//SILICON CARBON ALLOYS//A SIC H
3 0.0000168306 SIMA//HEXAGONAL SURFACES//DSMDRECAMSPCSI
4 0.0000154645 MICROPIPE//SUBLIMATION GROWTH//MICROPIPES
5 0.0000139097 ISOTHERMAL CHEMICAL VAPOR INFILTRATION//PRESSURE PULSED CHEMICAL VAPOR INFILTRATION//3D IMAGE BASED MODELING
6 0.0000100781 OHMIC CONTACT//OHMIC CONTACTS//P TYPE SIC
7 0.0000093244 IN FRANTZEVICH PROBLEMS MAT SCI//GROWTH TECHNIQUES//SEMICOND HETEROSTRUCT
8 0.0000092598 SI1 YCY//SI1 X YGEXCY//SICGE
9 0.0000084428 SIC NANOWIRES//SILICON CARBIDE NANOWIRES//SIC NANORODS
10 0.0000076343 4H SIC//SILICON CARBIDE SIC//BIPOLAR JUNCTION TRANSISTORS BJTS