Class information for:
Level 1: MEV ION IMPLANTATION//ACTIVATION EFFICIENCY//COLD IMPLANTS

Basic class information

ID Publications Average number
of references
Avg. shr. active
ref. in WoS
5865 1495 17.9 50%



Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)



ID, lev.
above
Publications Label for level above
260 18934 GAAS ON SI//GAAS SI//GAINP

Terms with highest relevance score



Rank Term Type of term Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ.
in class
1 MEV ION IMPLANTATION Author keyword 3 35% 1% 8
2 ACTIVATION EFFICIENCY Author keyword 3 57% 0% 4
3 COLD IMPLANTS Author keyword 1 50% 0% 2
4 ELECTRON ANNEALING Author keyword 1 100% 0% 2
5 GA OUT DIFFUSION Author keyword 1 100% 0% 2
6 III N V Author keyword 1 100% 0% 2
7 RF DISSIPATION LOSS Author keyword 1 100% 0% 2
8 AIIIBV SEMICONDUCTORS Author keyword 1 30% 0% 3
9 ELECTRICAL ISOLATION Author keyword 1 19% 0% 5
10 IMPLANT ISOLATION Author keyword 1 40% 0% 2

Web of Science journal categories

Author Key Words



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ.
in class
LCSH search Wikipedia search
1 MEV ION IMPLANTATION 3 35% 1% 8 Search MEV+ION+IMPLANTATION Search MEV+ION+IMPLANTATION
2 ACTIVATION EFFICIENCY 3 57% 0% 4 Search ACTIVATION+EFFICIENCY Search ACTIVATION+EFFICIENCY
3 COLD IMPLANTS 1 50% 0% 2 Search COLD+IMPLANTS Search COLD+IMPLANTS
4 ELECTRON ANNEALING 1 100% 0% 2 Search ELECTRON+ANNEALING Search ELECTRON+ANNEALING
5 GA OUT DIFFUSION 1 100% 0% 2 Search GA+OUT+DIFFUSION Search GA+OUT+DIFFUSION
6 III N V 1 100% 0% 2 Search III+N+V Search III+N+V
7 RF DISSIPATION LOSS 1 100% 0% 2 Search RF+DISSIPATION+LOSS Search RF+DISSIPATION+LOSS
8 AIIIBV SEMICONDUCTORS 1 30% 0% 3 Search AIIIBV+SEMICONDUCTORS Search AIIIBV+SEMICONDUCTORS
9 ELECTRICAL ISOLATION 1 19% 0% 5 Search ELECTRICAL+ISOLATION Search ELECTRICAL+ISOLATION
10 IMPLANT ISOLATION 1 40% 0% 2 Search IMPLANT+ISOLATION Search IMPLANT+ISOLATION

Key Words Plus



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 IV ELEMENTS 11 100% 0% 6
2 THERMAL ANNEALED INP 6 80% 0% 4
3 HIGH RESISTIVITY 6 33% 1% 15
4 AS DUAL IMPLANTS 6 100% 0% 4
5 SHALLOW P LAYER 6 100% 0% 4
6 ALAS GAAS HETEROSTRUCTURES 4 75% 0% 3
7 ELECTRICAL ISOLATION 4 23% 1% 14
8 CO IMPLANT 3 100% 0% 3
9 DEPENDENT ELECTRICAL ACTIVATION 3 100% 0% 3
10 HIGH RESISTIVITY REGIONS 3 100% 0% 3

Journals

Reviews



Title Publ. year Cit. Active references % act. ref.
to same field
ION-IMPLANTATION IN III-V SEMICONDUCTOR TECHNOLOGY 1993 57 132 67%
IMPLANTATION IN INP TECHNOLOGY 1989 4 38 74%
THE ROLE OF DEFECTS IN THE DIFFUSION AND ACTIVATION OF IMPURITIES IN ION-IMPLANTED SEMICONDUCTORS 1984 16 41 68%
ION-IMPLANTATION DOPING OF SEMICONDUCTORS 1988 6 28 43%
ION-IMPLANTATION DOPING OF SEMICONDUCTORS 1988 4 28 43%
FAST DIFFUSION IN SEMICONDUCTORS 1988 36 48 13%
SPUTTER DEPTH PROFILING OF MICROELECTRONIC STRUCTURES 1983 41 153 22%
CW BEAM PROCESSING OF GALLIUM-ARSENIDE 1984 0 17 71%
PROSPECTS FOR ION-BOMBARDMENT AND ION-IMPLANTATION IN GAAS AND INP DEVICE FABRICATION 1981 32 7 43%
AUGER TECHNIQUES IN ANALYTICAL-CHEMISTRY - A REVIEW 1983 14 15 13%

Address terms



Rank Address term Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ.
in class
1 ELECT ENGN COMP MATH 1 33% 0.1% 2
2 CAI IMPLANTAC ION 1 50% 0.1% 1
3 ESCUELA TECNOL INFORMAC 1 50% 0.1% 1
4 SURREY ION BEAM PL 1 50% 0.1% 1
5 WESTERN REG RUMENTAT 1 50% 0.1% 1
6 3IT 1 22% 0.1% 2
7 SURREY ION BEAM PLICAT 1 12% 0.3% 4
8 ELE ENGN BUNKYO KU 0 33% 0.1% 1
9 SAITAMA TORY 0 25% 0.1% 1
10 MICRO NANOELECT DEVICES 0 20% 0.1% 1

Related classes at same level (level 1)



Rank Relatedness score Related classes
1 0.0000142434 LUMILEDS LIGHTING//ZINC DIFFUSION//ACCEPTOR DIFFUSION
2 0.0000132141 QUANTUM WELL INTERMIXING//QUANTUM WELL INTERDIFFUSION//IMPURITY FREE DISORDERING
3 0.0000124684 FE DOPED INP//PHOSPHORUS VAPOR PRESSURE//WAFER ANNEALING
4 0.0000113456 AMORPHOUS III V SEMICONDUCTORS//GAAS1 XNX THIN FILMS//SUNAG
5 0.0000102546 IBIEC//SOLID PHASE EPITAXIAL GROWTH//LATERAL SOLID PHASE EPITAXY
6 0.0000098849 ATSUGI ELECT COMMUN S FUNCT DEVICE DEV//INTEGRATED PROD BUSINESS UNIT//SINGLE VOLTAGE SUPPLY
7 0.0000082327 EL2//CARBON ACCEPTOR//SEMI INSULATING GALLIUM ARSENIDE
8 0.0000080981 CARBON DOPING//CBR4//C DOPED GAAS
9 0.0000080131 OVAL DEFECTS//SEEIE//GA AS BI SOLUTION
10 0.0000079881 CHANNELED PARTICLE//NONEQUILIBRIUM STATISTICAL THERMODYNAMICS//QUASITEMPERATURE