Class information for:
Level 1: MICROMIRROR//VARIABLE OPTICAL ATTENUATOR VOA//VERTICAL COMBDRIVES

Basic class information

ID Publications Average number
of references
Avg. shr. active
ref. in WoS
4626 1680 18.4 59%



Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)



ID, lev.
above
Publications Label for level above
358 16774 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//SENSORS AND ACTUATORS A-PHYSICAL//JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Terms with highest relevance score



Rank Term Type of term Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 MICROMIRROR Author keyword 45 31% 7% 122
2 VARIABLE OPTICAL ATTENUATOR VOA Author keyword 24 52% 2% 33
3 VERTICAL COMBDRIVES Author keyword 14 100% 0% 7
4 OPTICAL MICROELECTROMECHANICAL SYSTEMS MEMS Author keyword 11 60% 1% 12
5 MICROELECTROMECHANICAL SYSTEMS MEMS Author keyword 10 11% 5% 90
6 VERTICAL COMB Author keyword 9 64% 1% 9
7 VARIABLE OPTICAL ATTENUATOR Author keyword 9 28% 2% 28
8 SCANNING MICROMIRRORS Author keyword 8 100% 0% 5
9 THERMAL ACTUATORS Author keyword 8 45% 1% 13
10 ELECTROTHERMAL ACTUATORS Author keyword 7 53% 1% 9

Web of Science journal categories

Author Key Words



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
LCSH search Wikipedia search
1 MICROMIRROR 45 31% 7% 122 Search MICROMIRROR Search MICROMIRROR
2 VARIABLE OPTICAL ATTENUATOR VOA 24 52% 2% 33 Search VARIABLE+OPTICAL+ATTENUATOR+VOA Search VARIABLE+OPTICAL+ATTENUATOR+VOA
3 VERTICAL COMBDRIVES 14 100% 0% 7 Search VERTICAL+COMBDRIVES Search VERTICAL+COMBDRIVES
4 OPTICAL MICROELECTROMECHANICAL SYSTEMS MEMS 11 60% 1% 12 Search OPTICAL+MICROELECTROMECHANICAL+SYSTEMS+MEMS Search OPTICAL+MICROELECTROMECHANICAL+SYSTEMS+MEMS
5 MICROELECTROMECHANICAL SYSTEMS MEMS 10 11% 5% 90 Search MICROELECTROMECHANICAL+SYSTEMS+MEMS Search MICROELECTROMECHANICAL+SYSTEMS+MEMS
6 VERTICAL COMB 9 64% 1% 9 Search VERTICAL+COMB Search VERTICAL+COMB
7 VARIABLE OPTICAL ATTENUATOR 9 28% 2% 28 Search VARIABLE+OPTICAL+ATTENUATOR Search VARIABLE+OPTICAL+ATTENUATOR
8 SCANNING MICROMIRRORS 8 100% 0% 5 Search SCANNING+MICROMIRRORS Search SCANNING+MICROMIRRORS
9 THERMAL ACTUATORS 8 45% 1% 13 Search THERMAL+ACTUATORS Search THERMAL+ACTUATORS
10 ELECTROTHERMAL ACTUATORS 7 53% 1% 9 Search ELECTROTHERMAL+ACTUATORS Search ELECTROTHERMAL+ACTUATORS

Key Words Plus



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 MICROMIRRORS 25 38% 3% 52
2 LARGE SCAN ANGLE 21 90% 1% 9
3 VOA 21 85% 1% 11
4 BEAM ELECTROTHERMAL ACTUATORS 20 59% 1% 22
5 TORSION MIRRORS 19 64% 1% 18
6 LARGE FORCE 15 88% 0% 7
7 OPTICAL SCANNER 14 51% 1% 20
8 FIBEROPTIC ATTENUATOR 14 100% 0% 7
9 VARIABLE OPTICAL ATTENUATOR 12 39% 1% 24
10 MICRO XY STAGE 12 86% 0% 6

Journals

Reviews



Title Publ. year Cit. Active references % act. ref.
to same field
MEMS Laser Scanners: A Review 2014 8 64 67%
Optical MEMS for lightwave communication 2006 136 128 48%
Shrinking design of a MEMS optical scanner having four torsion beams and arms 2010 7 9 89%
Micromachining for optical and optoelectronic systems 1997 194 56 52%
A review of fabrication processes for vertical comb drives 2012 2 24 92%
The future of MEMS in telecommunications networks 2000 88 11 45%
Micro robot system with moving micro-car driven by electrostatic comb-drive actuators 2010 0 3 100%
A novel dual-screen projection system using a balance-type micromirror with a piezoelectric actuator 2013 0 16 88%
Reduction of Zernike wavefront errors using a micromirror array 2005 1 4 75%
Dynamics of micromechatronics and its applications to information systems 1999 0 1 100%

Address terms



Rank Address term Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 PHOTON INFORMAT PROC SYST 4 27% 0.8% 13
2 PRECIS MFG ASSEMBLY 3 100% 0.2% 3
3 NANOMECH ENGN 3 50% 0.2% 4
4 MICROMECH SYST GRP 3 60% 0.2% 3
5 MICROSYST GRP 3 24% 0.6% 10
6 MICROSYST PHOTON 2 19% 0.7% 11
7 OPT SEMICONDUCTOR DEVICES SECT 2 67% 0.1% 2
8 MICROSYST TECHNOL INITIAT 2 50% 0.2% 3
9 ELE OOPT SECT 2 25% 0.4% 6
10 MICRO NANO SYST INITIAT 2 23% 0.4% 6

Related classes at same level (level 1)



Rank Relatedness score Related classes
1 0.0000182271 MODIFIED COUPLE STRESS THEORY//PULL IN INSTABILITY//DYNAMIC PULL IN INSTABILITY
2 0.0000135027 ACCELERATION SWITCH//INERTIAL SWITCH//CONSTANT FORCE MECHANISM
3 0.0000131078 SEMICONDUCTOR DBR//MICROMACHINED FILTER//TUNABLE CIRCUITS DEVICES
4 0.0000115273 ELECTROSTATIC MOTOR//ELECTROSTATIC MICROMOTORS//MICROMOTOR
5 0.0000095399 ADV MICRO NANOSYST//MICROGRIPPER//NANOMANIPULATION
6 0.0000089440 ROUTING DEVICES//SURFACE STABILISED FERROELECTRIC LIQUID CRYSTALS//MULTI MODE INTERFERENCE EFFECT
7 0.0000084710 RF MEMS//RF MICROELECTROMECHANICAL SYSTEMS MEMS//DIELECTRIC CHARGING
8 0.0000084708 MEASUREMENT SENSOR TECHNOL//ME EI//MICROELECT ELECT RUMENTAT
9 0.0000083661 MICROMAGNETS//COPTP//BIDIRECTIONAL ACTUATOR
10 0.0000080307 STRIP BENDING TEST//MEMS PROD//HIGH CYCLE FATIGUE TEST