Class information for:
Level 1: ALUMINUM NITRIDE//FILM BULK ACOUSTIC RESONATOR//ALUMINIUM NITRIDE

Basic class information

ID Publications Average number
of references
Avg. shr. active
ref. in WoS
3587 1876 19.7 63%



Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)



ID, lev.
above
Publications Label for level above
1236 8540 IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL//SURFACE ACOUSTIC WAVE//PIEZOELECT DEVICE

Terms with highest relevance score



Rank Term Type of term Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 ALUMINUM NITRIDE Author keyword 38 18% 10% 196
2 FILM BULK ACOUSTIC RESONATOR Author keyword 27 78% 1% 18
3 ALUMINIUM NITRIDE Author keyword 26 26% 4% 84
4 FILM BULK ACOUSTIC RESONATOR FBAR Author keyword 21 78% 1% 14
5 ALN Author keyword 17 12% 7% 135
6 FBAR Author keyword 16 28% 3% 47
7 ALN FILMS Author keyword 15 62% 1% 16
8 ALN FILM Author keyword 13 51% 1% 18
9 ALN THIN FILM Author keyword 13 51% 1% 18
10 ALN THIN FILMS Author keyword 12 58% 1% 14

Web of Science journal categories

Author Key Words



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
LCSH search Wikipedia search
1 ALUMINUM NITRIDE 38 18% 10% 196 Search ALUMINUM+NITRIDE Search ALUMINUM+NITRIDE
2 FILM BULK ACOUSTIC RESONATOR 27 78% 1% 18 Search FILM+BULK+ACOUSTIC+RESONATOR Search FILM+BULK+ACOUSTIC+RESONATOR
3 ALUMINIUM NITRIDE 26 26% 4% 84 Search ALUMINIUM+NITRIDE Search ALUMINIUM+NITRIDE
4 FILM BULK ACOUSTIC RESONATOR FBAR 21 78% 1% 14 Search FILM+BULK+ACOUSTIC+RESONATOR+FBAR Search FILM+BULK+ACOUSTIC+RESONATOR+FBAR
5 ALN 17 12% 7% 135 Search ALN Search ALN
6 FBAR 16 28% 3% 47 Search FBAR Search FBAR
7 ALN FILMS 15 62% 1% 16 Search ALN+FILMS Search ALN+FILMS
8 ALN FILM 13 51% 1% 18 Search ALN+FILM Search ALN+FILM
9 ALN THIN FILM 13 51% 1% 18 Search ALN+THIN+FILM Search ALN+THIN+FILM
10 ALN THIN FILMS 12 58% 1% 14 Search ALN+THIN+FILMS Search ALN+THIN+FILMS

Key Words Plus



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 AIN FILMS 114 83% 3% 64
2 ALUMINUM NITRIDE FILMS 52 50% 4% 75
3 AIN 51 27% 9% 163
4 ALUMINUM NITRIDE 45 15% 14% 271
5 ALN THIN FILMS 39 45% 4% 66
6 ALN FILMS 35 42% 4% 66
7 FBAR 21 71% 1% 17
8 BAW RESONATORS 17 63% 1% 17
9 NITRIDE THIN FILMS 14 12% 6% 110
10 FBARS 14 100% 0% 7

Journals

Reviews



Title Publ. year Cit. Active
references
% act. ref.
to same field
Development of piezoelectric thin film resonator and its impact on future wireless communication systems 2005 52 6 100%
Piezoelectric microelectromechanical resonant sensors for chemical and biological detection 2012 22 63 44%
Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview 2014 3 51 29%
Nitriding of 6061T6 aluminium by plasma immersion ion implantation at low energy 2010 1 4 75%
Nitriding of 6061T6 aluminium by plasma immersion ion implantation at low energy 2010 0 4 75%
Deposition of aluminum nitride thin film on Si(111) by KrF excimer laser and its characterizations 2008 3 17 29%
Application of Fourier transform infrared spectroscopy to nanostructured materials surface characterization - Study of an aluminum nitride powder prepared via chemical synthesis 1996 1 22 32%
Filament-activated chemical vapour deposition of nitride thin films 1996 2 36 22%

Address terms



Rank Address term Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ. in
class
1 COMMON COURSE 7 57% 0.4% 8
2 QINGDAO TERAHERTZ TECHNOL 6 35% 0.8% 15
3 GRP MICROSISTEMAS MAT ELECT 5 50% 0.4% 7
4 ON SITE SENSING DIAG 4 38% 0.5% 9
5 PHYS MILIEUX IONISES PLICAT 4 20% 1.0% 19
6 GMME CEMDATIC 3 57% 0.2% 4
7 ON SITE SENSING DIAGNOSIS 3 42% 0.3% 5
8 SENMC 2 67% 0.1% 2
9 UMR 7040 2 13% 0.7% 13
10 IMRI 2 22% 0.4% 7

Related classes at same level (level 1)



Rank Relatedness score Related classes
1 0.0000134549 UNIDIRECTIONAL TRANSDUCER//BGS WAVE//SAW GRATING REFLECTOR
2 0.0000125356 SCANDIUM NITRIDE//YN//TRAITEMENT SUR E SCI MAT
3 0.0000097597 ALUMINUM NITRIDE//ALN POWDER//ALN CERAMIC
4 0.0000093443 LIGAO2//AMORPHOUS GAN//NON POLAR NITRIDES
5 0.0000088681 SEMICONDUCTING ALUMINUM COMPOUNDS//CERAM OPERAT//ALGAN
6 0.0000062187 SI111 SUBSTRATES//SI111 SUBSTRATE//ALN BUFFER
7 0.0000059751 THERMOELASTIC DAMPING//MICROMECHANICAL RESONATOR//THERMOELASTIC DISSIPATION
8 0.0000051481 CUBIC GAN//FB PHYS 6//HEXAGONAL GAN
9 0.0000043676 MESOSCOP LOW DIMENS PHYS//ACOUSTOELECTRIC CURRENT//FILM BONDING
10 0.0000040578 LOVE WAVE//VACUUM MICROELECT//ST CUT QUARTZ