Class information for:
Level 1: PIN CHUCK//VACUUM PIN CHUCK//WAFER FLATNESS

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
34356 73 9.4 47%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
2847 2446 INTERFACIAL SHEARS//MICROBENDING LOSS//RAPID THERMAL PROCESSING RTP

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 PIN CHUCK Author keyword 9 67% 11% 8
2 VACUUM PIN CHUCK Author keyword 8 100% 7% 5
3 WAFER FLATNESS Author keyword 4 33% 14% 10
4 CHUCKING ACCURACY Author keyword 3 100% 4% 3
5 FLATTENING ABILITY Author keyword 3 100% 4% 3
6 PIN PITCH Author keyword 3 100% 4% 3
7 PIN DIAMETER Author keyword 3 60% 4% 3
8 OSCILLATION SPEED CONTROL Author keyword 2 67% 3% 2
9 ELECTROSTATIC CHUCK Author keyword 2 22% 11% 8
10 KASADO Address 1 50% 3% 2

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 PIN CHUCK 9 67% 11% 8 Search PIN+CHUCK Search PIN+CHUCK
2 VACUUM PIN CHUCK 8 100% 7% 5 Search VACUUM+PIN+CHUCK Search VACUUM+PIN+CHUCK
3 WAFER FLATNESS 4 33% 14% 10 Search WAFER+FLATNESS Search WAFER+FLATNESS
4 CHUCKING ACCURACY 3 100% 4% 3 Search CHUCKING+ACCURACY Search CHUCKING+ACCURACY
5 FLATTENING ABILITY 3 100% 4% 3 Search FLATTENING+ABILITY Search FLATTENING+ABILITY
6 PIN PITCH 3 100% 4% 3 Search PIN+PITCH Search PIN+PITCH
7 PIN DIAMETER 3 60% 4% 3 Search PIN+DIAMETER Search PIN+DIAMETER
8 OSCILLATION SPEED CONTROL 2 67% 3% 2 Search OSCILLATION+SPEED+CONTROL Search OSCILLATION+SPEED+CONTROL
9 ELECTROSTATIC CHUCK 2 22% 11% 8 Search ELECTROSTATIC+CHUCK Search ELECTROSTATIC+CHUCK
10 MASK CHUCK 1 100% 3% 2 Search MASK+CHUCK Search MASK+CHUCK

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 PIN CHUCK 2 67% 3% 2
2 EUV RETICLE 1 50% 1% 1
3 FOCUS DRIFT 0 33% 1% 1
4 RETICLES 0 10% 3% 2
5 ARF LASER LITHOGRAPHY 0 100% 1% 1
6 BACKSIDE PARTICLES 0 100% 1% 1
7 ELECTROSTATIC CHUCKING 0 100% 1% 1
8 WAFER CHUCK 0 100% 1% 1

Journals

Reviews

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 KASADO 1 50% 2.7% 2
2 CIVIL ENGN STRUCT ENGN MECH MAT 1 50% 1.4% 1
3 MICRO SYST INTEGRAT S 1 50% 1.4% 1
4 IOF 0 14% 4.1% 3
5 WAFER BUSINESS UNIT 0 100% 1.4% 1

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000293642 MEASUREMENT ENGN SENSOR TECHNOL//PHYS TECHNOL LOW DIMENS STRUCT//PLANAR MICROCAVITIES
2 0.0000206911 INTERFACIAL SHEARS//NON LOCAL STRESS CURVATURE RELATIONS//NON UNIFORM MISFIT STRAIN
3 0.0000172963 DIFFUSION TEMPERATURE//DEVICE FUNCT SECT//TWO DIMENSIONAL DEVICE SIMULATION
4 0.0000131429 CHAIR PHYS CHEM 2//CRYSTAL REORIENTATION//NON PYROPHORIC
5 0.0000113118 HIGH TEMPERATURE BATTERY//SODIUM SULFUR BATTERY//MOLTEN SODIUM
6 0.0000099438 ELECTRODE EFFECTS//POSITIVE ION DEPLETION//SECT INORGAN MAT
7 0.0000093817 SODERBERG ANODE//ANODE MASS//BI MATERIAL EXTRUSION
8 0.0000086041 BERNOULLI GRIPPER//LIMP MATERIAL//ROBOTIC HANDLING
9 0.0000084079 DRY ADHESIVE//GECKO//DRY ADHESION
10 0.0000080304 AEROSOL DEPOSITION METHOD//AEROSOL DEPOSITION//AEROSOL DEPOSITION METHOD ADM