Class information for:
Level 1: ATOMIC LAYER DEPOSITION//MOLECULAR LAYER DEPOSITION MLD//MOLECULAR LAYER DEPOSITION

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
3427 1912 34.1 78%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
1854 5551 ATOMIC LAYER DEPOSITION//CHEMICAL VAPOR DEPOSITION//MOLECULAR LAYER DEPOSITION MLD

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 ATOMIC LAYER DEPOSITION Author keyword 126 24% 24% 459
2 MOLECULAR LAYER DEPOSITION MLD Author keyword 27 92% 1% 11
3 MOLECULAR LAYER DEPOSITION Author keyword 18 55% 1% 22
4 ALD Author keyword 17 16% 5% 96
5 ATOMIC LAYER DEPOSITION ALD Author keyword 17 23% 3% 65
6 ALUCONE Author keyword 4 75% 0% 3
7 ANGTROM SOLAR Address 4 75% 0% 3
8 COCOON Address 4 38% 0% 8
9 ASTRAL Address 4 31% 1% 10
10 GROWTH PER CYCLE Author keyword 3 100% 0% 3

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 ATOMIC LAYER DEPOSITION 126 24% 24% 459 Search ATOMIC+LAYER+DEPOSITION Search ATOMIC+LAYER+DEPOSITION
2 MOLECULAR LAYER DEPOSITION MLD 27 92% 1% 11 Search MOLECULAR+LAYER+DEPOSITION+MLD Search MOLECULAR+LAYER+DEPOSITION+MLD
3 MOLECULAR LAYER DEPOSITION 18 55% 1% 22 Search MOLECULAR+LAYER+DEPOSITION Search MOLECULAR+LAYER+DEPOSITION
4 ALD 17 16% 5% 96 Search ALD Search ALD
5 ATOMIC LAYER DEPOSITION ALD 17 23% 3% 65 Search ATOMIC+LAYER+DEPOSITION+ALD Search ATOMIC+LAYER+DEPOSITION+ALD
6 ALUCONE 4 75% 0% 3 Search ALUCONE Search ALUCONE
7 GROWTH PER CYCLE 3 100% 0% 3 Search GROWTH+PER+CYCLE Search GROWTH+PER+CYCLE
8 PE ALD 3 50% 0% 4 Search PE+ALD Search PE+ALD
9 PLASMA ENHANCED ALD 3 60% 0% 3 Search PLASMA+ENHANCED+ALD Search PLASMA+ENHANCED+ALD
10 ATOMIC LAYER EPITAXY ALE 3 24% 1% 10 Search ATOMIC+LAYER+EPITAXY+ALE Search ATOMIC+LAYER+EPITAXY+ALE

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 BINARY REACTION SEQUENCE 177 74% 7% 130
2 ALD 42 31% 6% 114
3 SEQUENTIAL SURFACE REACTIONS 27 71% 1% 22
4 BN PARTICLES 27 72% 1% 21
5 TRIMETHYLALUMINUM 16 20% 4% 75
6 VISCOUS FLOW REACTOR 15 88% 0% 7
7 ALCH33 14 100% 0% 7
8 HYDROXYLATED SIO2 13 67% 1% 12
9 DIOXIDE THIN FILMS 13 22% 3% 52
10 ALUMINA TUBULAR MEMBRANES 11 78% 0% 7

Journals

Reviews


Title Publ. year Cit. Active references % act. ref.
to same field
Atomic Layer Deposition: An Overview 2010 1008 208 61%
Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends 2013 159 2284 31%
Catalyst Design with Atomic Layer Deposition 2015 3 216 58%
Atomic Layer Deposition of Metal Sulfide Materials 2015 4 53 30%
Atomic Layer Deposition of Noble Metals and Their Oxides 2014 18 118 49%
Synthesis and surface engineering of complex nanostructures by atomic layer deposition 2007 344 101 41%
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process 2005 889 1046 31%
Tailoring nanoporous materials by atomic layer deposition 2011 60 85 69%
Atomic layer deposition of ZnO: a review 2014 19 260 30%
Organic and inorganic-organic thin film structures by molecular layer deposition: A review 2014 6 103 80%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 ANGTROM SOLAR 4 75% 0.2% 3
2 COCOON 4 38% 0.4% 8
3 ASTRAL 4 31% 0.5% 10
4 EXPT PHYS TECHNOL 3 18% 0.8% 16
5 ADV SUR E TECHNOL 3 45% 0.3% 5
6 PL PHYS SENSORS 3 35% 0.3% 6
7 DARPA INTEGRATED MICRO NANOELE OMECH TRANSD 2 36% 0.3% 5
8 BURLINGTON ENGN S 2147 2 67% 0.1% 2
9 MICRO NANOFABRICAT MINFAB 2 67% 0.1% 2
10 ANGSTROM MICROSTRUCT 2 27% 0.4% 7

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000165283 RUO2//RUOD3//RU
2 0.0000091285 PERMEATION BARRIER//THIN FILM PASSIVATION//KANEKA SKKU INCUBAT
3 0.0000089488 HFO2//HIGH K//METAL GATE
4 0.0000087017 PERFLUORINATED CARBOXYLATES//COPPER CVD//IR AND NMR
5 0.0000078932 TINX FILMS//MAT CHEM COATINGS//TDEAT
6 0.0000059137 CHEM TECHNOL MAT DEVICES ELECT IND//METALLIC EUROPIUM//SHEAR STRESS UNDER HIGH PRESSURE
7 0.0000054709 KAPPA AL2O3//ALUMINA COATINGS//COMBUSTION CHEMICAL VAPOR DEPOSITION
8 0.0000047206 TANTALUM OXIDE//TANTALUM PENTOXIDE//TA2O5
9 0.0000046176 IRIDIUM COATING//IRIDIUM COATINGS//IR COATING
10 0.0000042146 CVD W//FEATURE SCALE MODEL//FOCUS NEW YORK