Class information for:
Level 1: CONE DEFECT//DYED RESIST//NITRIDE BUBBLES

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
34107 78 15.7 38%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
2557 3267 INTERFACIAL SILICON EMISSION//SILICON OXIDATION//GENIE URBAIN ENVIRONM

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 CONE DEFECT Author keyword 1 50% 1% 1
2 DYED RESIST Author keyword 1 50% 1% 1
3 NITRIDE BUBBLES Author keyword 1 50% 1% 1
4 DEVELOPMENT TECHNIQUE Author keyword 0 33% 1% 1
5 RESIST RESIDUE Author keyword 0 33% 1% 1
6 PATTERN DEFORMATION Author keyword 0 18% 3% 2
7 DEVELOPMENT RATE MEASUREMENT SYSTEM Author keyword 0 25% 1% 1
8 LITHOGRAPHY SIMULATIONS Author keyword 0 25% 1% 1
9 CARL Author keyword 0 11% 3% 2
10 CHEMICAL AMPLIFICATION RESIST Author keyword 0 11% 3% 2

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class		 LCSH search Wikipedia search
1 CONE DEFECT 1 50% 1% 1 Search CONE+DEFECT Search CONE+DEFECT
2 DYED RESIST 1 50% 1% 1 Search DYED+RESIST Search DYED+RESIST
3 NITRIDE BUBBLES 1 50% 1% 1 Search NITRIDE+BUBBLES Search NITRIDE+BUBBLES
4 DEVELOPMENT TECHNIQUE 0 33% 1% 1 Search DEVELOPMENT+TECHNIQUE Search DEVELOPMENT+TECHNIQUE
5 RESIST RESIDUE 0 33% 1% 1 Search RESIST+RESIDUE Search RESIST+RESIDUE
6 PATTERN DEFORMATION 0 18% 3% 2 Search PATTERN+DEFORMATION Search PATTERN+DEFORMATION
7 DEVELOPMENT RATE MEASUREMENT SYSTEM 0 25% 1% 1 Search DEVELOPMENT+RATE+MEASUREMENT+SYSTEM Search DEVELOPMENT+RATE+MEASUREMENT+SYSTEM
8 LITHOGRAPHY SIMULATIONS 0 25% 1% 1 Search LITHOGRAPHY+SIMULATIONS Search LITHOGRAPHY+SIMULATIONS
9 CARL 0 11% 3% 2 Search CARL Search CARL
10 CHEMICAL AMPLIFICATION RESIST 0 11% 3% 2 Search CHEMICAL+AMPLIFICATION+RESIST Search CHEMICAL+AMPLIFICATION+RESIST

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 DEPROTECTION KINETICS 1 50% 1% 1
2 HIGH TEMPERATURE POLYIMIDES 0 13% 1% 1
3 CARL PROCESS 0 100% 1% 1
4 FE75CR5P8C10SI2 0 100% 1% 1
5 INTRINSIC OPTICAL CONSTANTS 0 100% 1% 1

Journals

Reviews

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 OR VIII 23 0 100% 1.3% 1

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000174635 ION BEAM THINNING//MAT SCI PROD TECHNOL//TECHNOL PLANNING CENT ELECT S
2 0.0000120940 APEX RADIUS//GRP MAT NANOESTRUCT//TIP FABRICATION
3 0.0000107535 OPTICAL SCATTEROMETRY//DIMENSIONAL STANDARDS//LINEWIDTH MONITORING
4 0.0000090730 HOBA2CU3O7 X//HIGH TEMPERATURE SUPERCONDUCTOR PREPARATION//POLYMER CHELATE
5 0.0000087293 POLYAMIDE HYDRAZIDES//POLYHYDRAZIDE//POLYHYDRAZIDES
6 0.0000086768 PHYSICOCHIM MOLEC ORSAY//SURFACE STRUCTURE AND ROUGHNESS//DESORPTION INDUCED BY ELECTRON STIMULATION
7 0.0000079654 PHARMACEUT SCI 11 SEIRYO MACHI//EXTRA WEAK CHEMILUMINESCENCE//ELECTROSPUN NYLON 6
8 0.0000078426 INTERFACIAL SILICON EMISSION//SILICON OXIDATION//LOW TEMPERATURE SILICON OXIDATION
9 0.0000073606 HITACHI ADM//SOLAR CELL METALLIZATION//
10 0.0000070897 HISTORY OF CHROMATOGRAPHY//MS TSWETT//RADIAL SPREAD