Class information for:
Level 1: ELECTROLYTIC COPPER ADDITION//BCL3 PLASMA//FIS CHIM SUPERFICI INTER E

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
33323 94 18.9 74%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
1317 8022 ELECT DEVICES MAT TECHNOL//PLASMA ETCHING//SIO2 ETCHING

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 ELECTROLYTIC COPPER ADDITION Author keyword 1 100% 2% 2
2 BCL3 PLASMA Author keyword 1 50% 1% 1
3 FIS CHIM SUPERFICI INTER E Address 1 50% 1% 1
4 FUME ETCHING Author keyword 1 50% 1% 1
5 HYDROGEN CONTAINING PLASMA Author keyword 1 50% 1% 1
6 INSITU XPS Author keyword 1 50% 1% 1
7 INDIUM TIN OXIDE ITO FILMS Author keyword 0 25% 1% 1
8 PATTERN SAPPHIRE Author keyword 0 25% 1% 1
9 POROUS ZNO Author keyword 0 25% 1% 1
10 BCL3 AR Author keyword 0 20% 1% 1

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class		 LCSH search Wikipedia search
1 ELECTROLYTIC COPPER ADDITION 1 100% 2% 2 Search ELECTROLYTIC+COPPER+ADDITION Search ELECTROLYTIC+COPPER+ADDITION
2 BCL3 PLASMA 1 50% 1% 1 Search BCL3+PLASMA Search BCL3+PLASMA
3 FUME ETCHING 1 50% 1% 1 Search FUME+ETCHING Search FUME+ETCHING
4 HYDROGEN CONTAINING PLASMA 1 50% 1% 1 Search HYDROGEN+CONTAINING+PLASMA Search HYDROGEN+CONTAINING+PLASMA
5 INSITU XPS 1 50% 1% 1 Search INSITU+XPS Search INSITU+XPS
6 INDIUM TIN OXIDE ITO FILMS 0 25% 1% 1 Search INDIUM+TIN+OXIDE+ITO+FILMS Search INDIUM+TIN+OXIDE+ITO+FILMS
7 PATTERN SAPPHIRE 0 25% 1% 1 Search PATTERN+SAPPHIRE Search PATTERN+SAPPHIRE
8 POROUS ZNO 0 25% 1% 1 Search POROUS+ZNO Search POROUS+ZNO
9 BCL3 AR 0 20% 1% 1 Search BCL3+AR Search BCL3+AR
10 OPTICAL AND ELECTRICAL PROPERTY 0 20% 1% 1 Search OPTICAL+AND+ELECTRICAL+PROPERTY Search OPTICAL+AND+ELECTRICAL+PROPERTY

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 NF3 BASED GAS MIXTURES 0 33% 1% 1
2 ZNMGO GROWTH 0 33% 1% 1
3 ETCHING MECHANISM 0 25% 1% 1
4 CH4 H 2 0 11% 2% 2
5 PIEZOELECTRIC FILM 0 20% 1% 1
6 AR CL 2 0 100% 1% 1

Journals

Reviews

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 FIS CHIM SUPERFICI INTER E 1 50% 1.1% 1
2 MEMS MICROSENSORS GRP 0 17% 1.1% 1
3 BIOCERAM GRP 0 11% 1.1% 1
4 PLASMA LASER INTERACT PHYS 0 100% 1.1% 1
5 POWER SUPPLY BRANCH 0 100% 1.1% 1

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000231942 SOCIOTECHNO SCI TECHNOL//N GAN//GALLIUM HYDROXIDE
2 0.0000212889 INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCHING//TI HARD MASK//CL 2 BASED PLASMA
3 0.0000188748 SYST CONTROL INTEGRAT//LEHRSTUHL PHOTON TECHNOL//LASER SCRIBING
4 0.0000186170 ELECT DEVICES MAT TECHNOL//SIO2 ETCHING//PLASMA ETCHING
5 0.0000123180 INDIUM TIN OXIDE//ITO//INDIUM TIN OXIDE ITO
6 0.0000112176 AL DOPED ZNO//GA DOPED ZNO//ZNOAL
7 0.0000109575 P TYPE ZNO//ZNO//ZNO FILMS
8 0.0000094554 FUJIMI KU//GAAS OXIDE//REACTIVE ION BEAM ETCHING
9 0.0000088424 TYPE304 STAINLESS STEEL//INDIUM OXIDE CERAMICS//HYDROCHLORIC ACID REGENERATION
10 0.0000087375 UV PHOTODETECTOR//ULTRAVIOLET PHOTODETECTOR//PHOTOCONDUCTIVE UV DETECTOR