Class information for:
Level 1: INDUCTIVELY COUPLED PLASMA ETCH//SIC C COMPOSITE//SIC C

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
29643 149 21.3 25%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
886 10744 SURFACE AND INTERFACE ANALYSIS//AUGER PHOTOELECTRON COINCIDENCE SPECTROSCOPY APECS//IMFP

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 INDUCTIVELY COUPLED PLASMA ETCH Author keyword 1 50% 1% 1
2 SIC C COMPOSITE Author keyword 1 50% 1% 1
3 SIC C Author keyword 0 25% 1% 1
4 O CIENCIA MAT Address 0 14% 1% 1
5 LIMITER MATERIALS Author keyword 0 11% 1% 1
6 30 NM MOLYBDENUM GATES Author keyword 0 100% 1% 1
7 BORON CARBIDE EROSION Author keyword 0 100% 1% 1
8 COMPOUND SEMICONDUCTOR TRANSISTORS Author keyword 0 100% 1% 1
9 ELE ON MICROSCOPY NANO Address 0 100% 1% 1
10 FUNCTIONALLY GRADED NANOSTRUCTURED MATERIALS Author keyword 0 100% 1% 1

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class		 LCSH search Wikipedia search
1 INDUCTIVELY COUPLED PLASMA ETCH 1 50% 1% 1 Search INDUCTIVELY+COUPLED+PLASMA+ETCH Search INDUCTIVELY+COUPLED+PLASMA+ETCH
2 SIC C COMPOSITE 1 50% 1% 1 Search SIC+C+COMPOSITE Search SIC+C+COMPOSITE
3 SIC C 0 25% 1% 1 Search SIC+C Search SIC+C
4 LIMITER MATERIALS 0 11% 1% 1 Search LIMITER+MATERIALS Search LIMITER+MATERIALS
5 30 NM MOLYBDENUM GATES 0 100% 1% 1 Search 30+NM+MOLYBDENUM+GATES Search 30+NM+MOLYBDENUM+GATES
6 BORON CARBIDE EROSION 0 100% 1% 1 Search BORON+CARBIDE+EROSION Search BORON+CARBIDE+EROSION
7 COMPOUND SEMICONDUCTOR TRANSISTORS 0 100% 1% 1 Search COMPOUND+SEMICONDUCTOR+TRANSISTORS Search COMPOUND+SEMICONDUCTOR+TRANSISTORS
8 FUNCTIONALLY GRADED NANOSTRUCTURED MATERIALS 0 100% 1% 1 Search FUNCTIONALLY+GRADED+NANOSTRUCTURED+MATERIALS Search FUNCTIONALLY+GRADED+NANOSTRUCTURED+MATERIALS
9 IN SITU NUCLEATION AND GROWTH 0 100% 1% 1 Search IN+SITU+NUCLEATION+AND+GROWTH Search IN+SITU+NUCLEATION+AND+GROWTH
10 TIN COATED STAINLESS STEEL 0 100% 1% 1 Search TIN+COATED+STAINLESS+STEEL Search TIN+COATED+STAINLESS+STEEL

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 HYDROGENATED AMORPHOUS SI 1 50% 1% 1
2 BEAM INDUCED FRAGMENTATION 0 14% 1% 1

Journals

Reviews


Title Publ. year Cit. Active references % act. ref.
to same field
SURFACE CHARACTERIZATION 1983 16 883 3%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 O CIENCIA MAT 0 14% 0.7% 1
2 ELE ON MICROSCOPY NANO 0 100% 0.7% 1
3 KHARKIV POLITECH 0 100% 0.7% 1
4 KHIPT 0 100% 0.7% 1
5 PLASMA TECHNOL ENTERTAINMENT 0 100% 0.7% 1

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000138389 DEBYE SUR E SCI//VANTHOFF//ACOUSTO OPTIC CRYSTAL
2 0.0000091462 LINEAR RAMAN SPECTROSCOPY//AUTOMOBILE EXHAUST GASES//
3 0.0000085882 INDOOR APPLICATION//PIPV//INTEGRATED TYPE
4 0.0000084176 ELECTRICAL PASSIVATION OF STRUCTURAL DEFECTS//GAAS DIODE//TRIPLE CRYSTAL DIFFRACTOMETRY
5 0.0000073613 LASER DYE SOLVENTS//SUB WAVELENGTH DIFFRACTION GRATING//DISPERSION FORMULAS
6 0.0000072901 PLASMA CONFINEMENT SPATIALLY PERIODIC FIELD//MAGNETIC CUSP//MECH SYST ENGN COURSE
7 0.0000069636 ASSOC EURATOM PLASM HYS//EURATOM FUS ASSOC CULHAM//ASSOC EURATOM PHYS
8 0.0000067520 EPITAXIAL AL2O3//AL2O3 ON SI//DENVER AEROSP TECH OPERAT
9 0.0000064714 NANOMETRIC CRYSTALS//TG DTA MEASUREMENT//X RAY SCANNING ANALYTICAL MICROSCOPY XSAM
10 0.0000063972 COLLOIDAL CENTER//PHOTOVOLTA METROL//SOLID SOLUTIONS WITH FLUORITE STRUCTURE