Class information for:
Level 1: LASER SCAN LITHOGRAPHY//ADV SCI TECHNOL IND//WORM INJECTION MOLDING

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
29207 156 12.3 64%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
1859 5530 NANOIMPRINT//NANOIMPRINT LITHOGRAPHY//UV NANOIMPRINT

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 LASER SCAN LITHOGRAPHY Author keyword 6 80% 3% 4
2 ADV SCI TECHNOL IND Address 5 12% 26% 41
3 WORM INJECTION MOLDING Author keyword 3 100% 2% 3
4 HELICAL PATTERN Author keyword 3 60% 2% 3
5 SUBSTRATE TEMPERATURE DEPENDENCE Author keyword 3 60% 2% 3
6 INSIDE LITHOGRAPHY Author keyword 2 67% 1% 2
7 NEWSUBARU SPRING 8 Address 2 67% 1% 2
8 SYNCHROTRON RADIATION ABLATION Author keyword 2 67% 1% 2
9 ADV SCI TECHNOL IND LASTI Address 1 38% 2% 3
10 RESIST COATING Author keyword 1 38% 2% 3

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class		 LCSH search Wikipedia search
1 LASER SCAN LITHOGRAPHY 6 80% 3% 4 Search LASER+SCAN+LITHOGRAPHY Search LASER+SCAN+LITHOGRAPHY
2 WORM INJECTION MOLDING 3 100% 2% 3 Search WORM+INJECTION+MOLDING Search WORM+INJECTION+MOLDING
3 HELICAL PATTERN 3 60% 2% 3 Search HELICAL+PATTERN Search HELICAL+PATTERN
4 SUBSTRATE TEMPERATURE DEPENDENCE 3 60% 2% 3 Search SUBSTRATE+TEMPERATURE+DEPENDENCE Search SUBSTRATE+TEMPERATURE+DEPENDENCE
5 INSIDE LITHOGRAPHY 2 67% 1% 2 Search INSIDE+LITHOGRAPHY Search INSIDE+LITHOGRAPHY
6 SYNCHROTRON RADIATION ABLATION 2 67% 1% 2 Search SYNCHROTRON+RADIATION+ABLATION Search SYNCHROTRON+RADIATION+ABLATION
7 RESIST COATING 1 38% 2% 3 Search RESIST+COATING Search RESIST+COATING
8 FLUID FILTER 1 100% 1% 2 Search FLUID+FILTER Search FLUID+FILTER
9 HELICAL PATTERNING 1 100% 1% 2 Search HELICAL+PATTERNING Search HELICAL+PATTERNING
10 LASER SCAN EXPOSURE 1 100% 1% 2 Search LASER+SCAN+EXPOSURE Search LASER+SCAN+EXPOSURE

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 SPIRAL MICROCOIL 5 63% 3% 5
2 FLUID FILTERS 3 100% 2% 3
3 LASER SCAN LITHOGRAPHY 3 100% 2% 3
4 METAL ROLLER 2 67% 1% 2
5 MICRO COIL 2 67% 1% 2
6 FINE PIPES 1 100% 1% 2
7 POLYTETRAFLUOROETHYLENE SURFACE 1 100% 1% 2
8 FLUOROPOLYMER THIN FILMS 1 24% 3% 4
9 STEPPED ROTATING LITHOGRAPHY 1 40% 1% 2
10 LIGA PROCESS 1 14% 3% 5

Journals

Reviews


Title Publ. year Cit. Active
references		 % act. ref.
to same field
Synchrotron radiation direct photo etching of polymers 2004 16 67 12%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 ADV SCI TECHNOL IND 5 12% 26% 41
2 NEWSUBARU SPRING 8 2 67% 1.3% 2
3 ADV SCI TECHNOL IND LASTI 1 38% 1.9% 3
4 UBIQUITOUS MEMS MICROENGN 1 50% 0.6% 1
5 QUANTUM EQUIPMENT TECHNOL 1 19% 1.9% 3
6 ENGN MECH SYST ENGN 1 22% 1.3% 2
7 ADV SCI ENGN IND 0 33% 0.6% 1
8 SHIMOYAMA 0 33% 0.6% 1
9 ADV MANU TURING 0 25% 0.6% 1
10 NEWSUBARU 0 25% 0.6% 1

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000257783 SU 8//ZNCL2 NACL KCL//DEVICE TECHNOL GRP
2 0.0000244711 PROBE CARD//POROUS SILICON MICROMACHINING//VERTICAL ACTIVE DEVICES
3 0.0000243466 SYNCHROTRON RADIATION STIMULATED ETCHING//SYNCHROTRON RADIATION EXCITED GROWTH//VACUUM UV PHOTOSCI
4 0.0000129254 SINGLE BUNCH ELECTRON BEAM//PHASING SYSTEM//SUBHARMONIC BUNCHER
5 0.0000108123 BIOMACHINING//MATRIX EXPOSURE//LIGHT VALVE DISPLAYS
6 0.0000091560 UNDULATORS//INSERTION DEVICES//SUPERCONDUCTING UNDULATOR
7 0.0000090379 FLUOROCARBON FILMS//FLUORINATED AMORPHOUS CARBON//A C F
8 0.0000090258 STENCIL LITHOGRAPHY//STRESS INDUCED DEFORMATION//RESIST SPRAY COATING
9 0.0000079365 LASER IMPLANTATION//LASER INDUCED POLYMER FILMS//MOLECULAR JET
10 0.0000076678 ABT BTE//TWO PHASE HELIUM//SUPERFERRIC MAGNETS