Class information for: |
Basic class information |
| ID | Publications | Average number of references |
Avg. shr. active ref. in WoS |
|---|---|---|---|
| 28155 | 173 | 16.7 | 60% |
Classes in level above (level 2) |
| ID, lev. above |
Publications | Label for level above |
|---|---|---|
| 740 | 11887 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//MICROELECTRONIC ENGINEERING//JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY |
Terms with highest relevance score |
| Rank | Term | Type of term | Relevance score (tfidf) |
Class's shr. of term's tot. occurrences |
Shr. of publ. in class containing term |
Num. of publ. in class |
|---|---|---|---|---|---|---|
| 1 | NANOPYRAMID ARRAY | Author keyword | 1 | 33% | 1% | 2 |
| 2 | DOPANT ION IMPLANTATION | Author keyword | 1 | 50% | 1% | 1 |
| 3 | FIS SUPERFICIES INTER ES | Address | 1 | 50% | 1% | 1 |
| 4 | IN SITU EELS | Author keyword | 1 | 50% | 1% | 1 |
| 5 | INORGANIC ELECTRON BEAM RESIST | Author keyword | 1 | 50% | 1% | 1 |
| 6 | NANO APERTURE ARRAY | Author keyword | 1 | 50% | 1% | 1 |
| 7 | SILICON QUANTUM WIRE | Author keyword | 1 | 50% | 1% | 1 |
| 8 | VACANCY CHAIN | Author keyword | 1 | 50% | 1% | 1 |
| 9 | ADV WASTE EMISS MANAGMENT | Address | 0 | 33% | 1% | 1 |
| 10 | FERROMAGNETIC NANOCRYSTALS | Author keyword | 0 | 33% | 1% | 1 |
Web of Science journal categories |
Author Key Words |
| Rank | Web of Science journal category | Relevance score (tfidf) |
Class's shr. of term's tot. occurrences |
Shr. of publ. in class containing term |
Num. of publ. in class |
LCSH search | Wikipedia search |
|---|---|---|---|---|---|---|---|
| 1 | NANOPYRAMID ARRAY | 1 | 33% | 1% | 2 | Search NANOPYRAMID+ARRAY | Search NANOPYRAMID+ARRAY |
| 2 | DOPANT ION IMPLANTATION | 1 | 50% | 1% | 1 | Search DOPANT+ION+IMPLANTATION | Search DOPANT+ION+IMPLANTATION |
| 3 | IN SITU EELS | 1 | 50% | 1% | 1 | Search IN+SITU+EELS | Search IN+SITU+EELS |
| 4 | INORGANIC ELECTRON BEAM RESIST | 1 | 50% | 1% | 1 | Search INORGANIC+ELECTRON+BEAM+RESIST | Search INORGANIC+ELECTRON+BEAM+RESIST |
| 5 | NANO APERTURE ARRAY | 1 | 50% | 1% | 1 | Search NANO+APERTURE+ARRAY | Search NANO+APERTURE+ARRAY |
| 6 | SILICON QUANTUM WIRE | 1 | 50% | 1% | 1 | Search SILICON+QUANTUM+WIRE | Search SILICON+QUANTUM+WIRE |
| 7 | VACANCY CHAIN | 1 | 50% | 1% | 1 | Search VACANCY+CHAIN | Search VACANCY+CHAIN |
| 8 | FERROMAGNETIC NANOCRYSTALS | 0 | 33% | 1% | 1 | Search FERROMAGNETIC+NANOCRYSTALS | Search FERROMAGNETIC+NANOCRYSTALS |
| 9 | KNOCK ON DISPLACEMENT | 0 | 33% | 1% | 1 | Search KNOCK+ON+DISPLACEMENT | Search KNOCK+ON+DISPLACEMENT |
| 10 | NANO ETCHING | 0 | 33% | 1% | 1 | Search NANO+ETCHING | Search NANO+ETCHING |
Key Words Plus |
| Rank | Web of Science journal category | Relevance score (tfidf) |
Class's shr. of term's tot. occurrences |
Shr. of publ. in class containing term |
Num. of publ. in class |
|---|---|---|---|---|---|
| 1 | A1001 | 1 | 50% | 1% | 1 |
| 2 | AMORPHOUS ALUMINUM OXIDE | 1 | 50% | 1% | 1 |
| 3 | SPUTTERING EVENTS | 1 | 50% | 1% | 1 |
| 4 | MODIFIED GEL FILMS | 0 | 33% | 1% | 1 |
| 5 | POINT DEFECT PROPERTIES | 0 | 13% | 2% | 3 |
| 6 | TITANIUM OXIDATION | 0 | 20% | 1% | 1 |
| 7 | DISPLACEMENT THRESHOLD | 0 | 17% | 1% | 1 |
| 8 | ENGINEERING STRAINED SILICON | 0 | 100% | 1% | 1 |
| 9 | NANOPYRAMID ARRAY NPA | 0 | 100% | 1% | 1 |
Journals |
Reviews |
| Title | Publ. year | Cit. | Active references |
% act. ref. to same field |
|---|---|---|---|---|
| The application of the scanning electron microscope to microfabrication and nanofabrication | 2004 | 0 | 4 | 50% |
| THE CENTER-FOR-MICROANALYSIS-OF-MATERIALS | 1985 | 0 | 5 | 40% |
Address terms |
| Rank | Address term | Relevance score (tfidf) |
Class's shr. of term's tot. occurrences |
Shr. of publ. in class containing term |
Num. of publ. in class |
|---|---|---|---|---|---|
| 1 | FIS SUPERFICIES INTER ES | 1 | 50% | 0.6% | 1 |
| 2 | ADV WASTE EMISS MANAGMENT | 0 | 33% | 0.6% | 1 |
| 3 | MICRO RUMENTS SYST | 0 | 13% | 1.2% | 2 |
| 4 | ADV WASTER EMISS MANAGEMENT | 0 | 13% | 0.6% | 1 |
| 5 | DESARROLLO TECNOL IND QUIM CONICET | 0 | 100% | 0.6% | 1 |
| 6 | NANOSTRUCT TECHNOL GRP | 0 | 100% | 0.6% | 1 |
Related classes at same level (level 1) |
| Rank | Relatedness score | Related classes |
|---|---|---|
| 1 | 0.0000213169 | MICROMECH SYST//SELF ORGANIZED MASK//CLUSTER SCI GRP |
| 2 | 0.0000188415 | PODOLSK BRANCH//TUNGSTEN ATOMS//PENTAGONAL CRYSTALS |
| 3 | 0.0000148749 | PHOTOMASK//IC EQUIPMENT//PROXIMITY EFFECT CORRECTION |
| 4 | 0.0000126457 | ELECTRON BEAM INDUCED DEPOSITION//FOCUSED ELECTRON BEAM INDUCED DEPOSITION//FOCUSED ION BEAM CHEMICAL VAPOR DEPOSITION FIB CVD |
| 5 | 0.0000124942 | ELECTRONIC RADIATION//RUMENTAT MESU//CROSS SECTIONAL SEM |
| 6 | 0.0000124800 | IRON NEODYMIUM BORON ALLOY//RADIATION INDUCED AMORPHIZATION//ZIRCONIUM BASED ALLOY |
| 7 | 0.0000111900 | TRANSLATIONAL KINETIC ENERGY//POINT DEFECT GENERATION//OXYGEN MOLECULAR BEAM |
| 8 | 0.0000102506 | EFTEM//ENERGY FILTERING TRANSMISSION ELECTRON MICROSCOPY EFTEM//SPECTRUM IMAGING |
| 9 | 0.0000100123 | SUPERIONIC CRYSTALS//BISMUTH NIOBATES//CHEM KOMI |
| 10 | 0.0000097346 | HYDROGEN SILSESQUIOXANE//HSQ//HSQ RESIST |