Class information for:
Level 1: EFFUSION MOLECULAR BEAM//MAXWELLIAN DISTRIBUTION FUNCTION//EBARA CORP

Basic class information

ID Publications Average number
of references
Avg. shr. active
ref. in WoS
25786 224 16.1 36%



Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)



ID, lev.
above
Publications Label for level above
2534 3313 ASTEC VACUUM SCI GRP//SPINNING ROTOR GAUGE//TURBOMOLECULAR PUMP

Terms with highest relevance score



Rank Term Type of term Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ.
in class
1 EFFUSION MOLECULAR BEAM Author keyword 3 100% 1% 3
2 MAXWELLIAN DISTRIBUTION FUNCTION Author keyword 1 50% 1% 2
3 EBARA CORP Address 1 50% 0% 1
4 MODFET STRUCTURES Author keyword 1 50% 0% 1
5 SCROLL TYPE Author keyword 1 50% 0% 1
6 SURFACE PHOTOCHEMICAL KINETICS Author keyword 1 50% 0% 1
7 FREE MOLECULAR FLOW Author keyword 1 12% 2% 5
8 CYLINDRICAL TUBE Author keyword 0 11% 2% 4
9 ADDITIONAL ERRORS Author keyword 0 33% 0% 1
10 ENSEEGUMR 5614 Address 0 33% 0% 1

Web of Science journal categories

Author Key Words



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ.
in class
LCSH search Wikipedia search
1 EFFUSION MOLECULAR BEAM 3 100% 1% 3 Search EFFUSION+MOLECULAR+BEAM Search EFFUSION+MOLECULAR+BEAM
2 MAXWELLIAN DISTRIBUTION FUNCTION 1 50% 1% 2 Search MAXWELLIAN+DISTRIBUTION+FUNCTION Search MAXWELLIAN+DISTRIBUTION+FUNCTION
3 MODFET STRUCTURES 1 50% 0% 1 Search MODFET+STRUCTURES Search MODFET+STRUCTURES
4 SCROLL TYPE 1 50% 0% 1 Search SCROLL+TYPE Search SCROLL+TYPE
5 SURFACE PHOTOCHEMICAL KINETICS 1 50% 0% 1 Search SURFACE+PHOTOCHEMICAL+KINETICS Search SURFACE+PHOTOCHEMICAL+KINETICS
6 FREE MOLECULAR FLOW 1 12% 2% 5 Search FREE+MOLECULAR+FLOW Search FREE+MOLECULAR+FLOW
7 CYLINDRICAL TUBE 0 11% 2% 4 Search CYLINDRICAL+TUBE Search CYLINDRICAL+TUBE
8 ADDITIONAL ERRORS 0 33% 0% 1 Search ADDITIONAL+ERRORS Search ADDITIONAL+ERRORS
9 GAS SAMPLING PROBE 0 33% 0% 1 Search GAS+SAMPLING+PROBE Search GAS+SAMPLING+PROBE
10 QUADRUPOLE FILTER 0 33% 0% 1 Search QUADRUPOLE+FILTER Search QUADRUPOLE+FILTER

Key Words Plus



Rank Web of Science journal category Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ.
in class
1 THERMAL ENERGY IONS 6 100% 2% 4
2 EFFUSION MOLECULAR BEAM 2 67% 1% 2
3 GROWTH UNIFORMITY 2 67% 1% 2
4 EVAPORATION CONDENSATION PROCESSES 1 100% 1% 2
5 MULTICHANNEL ARRAYS 1 33% 1% 3
6 BEAM SOURCES 1 40% 1% 2
7 CAPILLARY ARRAY 1 50% 0% 1
8 MODE ABSORPTION LINE 1 50% 0% 1
9 DIFFERENTIAL ELECTRON SCATTERING 0 33% 0% 1
10 SCANNING PHOTOLUMINESCENCE 0 33% 0% 1

Journals

Reviews



Title Publ. year Cit. Active
references
% act. ref.
to same field
KNUDSEN-FLOW 75 YEARS ON - THE CURRENT STATE-OF-THE-ART FOR FLOW OF RAREFIED-GASES IN TUBES AND SYSTEMS 1986 52 23 70%
OPTICAL CHARACTERIZATION IN MICROELECTRONICS MANUFACTURING 1994 6 68 3%

Address terms



Rank Address term Relevance score
(tfidf)
Class's shr.
of term's tot.
occurrences
Shr. of publ.
in class containing
term
Num. of
publ.
in class
1 EBARA CORP 1 50% 0.4% 1
2 ENSEEGUMR 5614 0 33% 0.4% 1
3 IMAGERIE OPT PL 0 17% 0.4% 1
4 CNRSUMR 5614 THERMODYNAM PHYSICOCHIM MET 0 11% 0.4% 1
5 B120 ENGN 0 100% 0.4% 1
6 CNRS THERMODYNAM PHYSIOCHIM MET 0 100% 0.4% 1
7 EPITAXIE AVANCEE 0 100% 0.4% 1
8 SEMICOND ELE MAT TECHNOL GRP 0 100% 0.4% 1
9 SYSTEMIZED PROD BUSINESS 0 100% 0.4% 1
10 TECHNO DEV 0 100% 0.4% 1

Related classes at same level (level 1)



Rank Relatedness score Related classes
1 0.0000201405 TURBOMOLECULAR PUMP//DRY SCROLL VACUUM PUMP//TURBOMOLECULAR PUMP TMP
2 0.0000177986 VACUUM METROLOGY//SPINNING ROTOR GAUGE//IONIZATION GAUGE
3 0.0000076706 ALPHA RECURRENCE//RESTRICTED MEAN VALUE PROPERTY//ALPHA TRANSIENCE
4 0.0000072888 INALAS INP//INALAS ALLOYS//INALAS ALASSB
5 0.0000070862 CEAIRFUS//LESIAOBSERV PARIS MEUDON//NRC HERZBERG ASTRON ASTROPHYS
6 0.0000067066 ENERGY RESOLVED MASS SPECTROSCOPY//TRIODE ION PLATING//HOLLOW CATHODE ARC PLASMA
7 0.0000064009 CSPBCL3//SATURATOR EFFICIENCY//INTELLIGENT HVAC CONTROL
8 0.0000057900 ASTEC VACUUM SCI GRP//NEG//TIZRV
9 0.0000056512 AVLIS//ATOMIC VAPOR LASER ISOTOPE SEPARATION//LASER ISOTOPE SEPARATION
10 0.0000055361 GAS BREMSSTRAHLUNG//FIRST OPTICS ENCLOSURE//SECONDARY GAS BREMSSTRAHLUNG