Class information for:
Level 1: EUV LITHOG//SOFT XRAY MICROSCOPY//XRAY OPT

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
2562 2136 19.0 59%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
1490 7092 EUV LITHOG//UNDULATORS//SPECTROMICROSCOPY

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 EUV LITHOG Address 38 93% 1% 14
2 SOFT XRAY MICROSCOPY Address 27 92% 1% 11
3 XRAY OPT Address 20 20% 4% 87
4 PRECIS OPT ENGN Address 17 29% 2% 50
5 X RAY EUV OPTICS Author keyword 13 62% 1% 13
6 GOLD Address 12 59% 1% 13
7 SOFT X RAY RANGE Author keyword 11 100% 0% 6
8 SIBERIAN SR Address 11 69% 0% 9
9 SCHWARZSCHILD OPTICS Author keyword 10 63% 0% 10
10 DC DE Address 9 83% 0% 5

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 X RAY EUV OPTICS 13 62% 1% 13 Search X+RAY+EUV+OPTICS Search X+RAY+EUV+OPTICS
2 SOFT X RAY RANGE 11 100% 0% 6 Search SOFT+X+RAY+RANGE Search SOFT+X+RAY+RANGE
3 SCHWARZSCHILD OPTICS 10 63% 0% 10 Search SCHWARZSCHILD+OPTICS Search SCHWARZSCHILD+OPTICS
4 X RAY MULTILAYER 9 83% 0% 5 Search X+RAY+MULTILAYER Search X+RAY+MULTILAYER
5 MULTILAYER MIRRORS 8 26% 1% 27 Search MULTILAYER+MIRRORS Search MULTILAYER+MIRRORS
6 EXTREME ULTRAVIOLET 6 12% 2% 50 Search EXTREME+ULTRAVIOLET Search EXTREME+ULTRAVIOLET
7 SOFT X RAY MULTILAYERS 6 71% 0% 5 Search SOFT+X+RAY+MULTILAYERS Search SOFT+X+RAY+MULTILAYERS
8 EUV MULTILAYER 5 55% 0% 6 Search EUV+MULTILAYER Search EUV+MULTILAYER
9 MO SI 4 24% 1% 16 Search MO+SI Search MO+SI
10 APERIODIC MULTILAYER 4 67% 0% 4 Search APERIODIC+MULTILAYER Search APERIODIC+MULTILAYER

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 MO SI MULTILAYERS 75 64% 3% 73
2 MO SI 47 52% 3% 64
3 X RAY MIRRORS 46 59% 2% 51
4 MIRRORS 30 12% 11% 240
5 SUB QUARTERWAVE MULTILAYERS 18 89% 0% 8
6 W SI MULTILAYERS 17 79% 1% 11
7 W C MULTILAYERS 17 100% 0% 8
8 MULTILAYER MIRRORS 16 31% 2% 43
9 LAYERED SYNTHETIC MICROSTRUCTURES 16 61% 1% 17
10 W C 15 68% 1% 13

Journals

Reviews


Title Publ. year Cit. Active references % act. ref.
to same field
Nanometer interface and materials control for multilayer EUV-optical applications 2011 28 104 70%
X-RAY INTERACTIONS - PHOTOABSORPTION, SCATTERING, TRANSMISSION, AND REFLECTION AT E=50-30,000 EV, Z=1-92 1993 2768 25 20%
Extreme ultraviolet lithography: A review 2007 29 39 49%
Properties of ultrathin films appropriate for optics capping layers exposed to high energy photon irradiation 2008 33 78 38%
Thin film and surface characterization by specular X-ray reflectivity 1997 132 140 20%
Recent Activities on Extreme Ultraviolet Lithography in NewSUBARU 2013 2 22 64%
Reactive diffusion in multilayer metal/silicon nanostructures 2011 6 79 51%
X-ray Optics 2012 0 1 100%
Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands 2012 1 59 58%
CHARACTERIZATION OF X-UV MULTILAYERS BY GRAZING-INCIDENCE X-RAY REFLECTOMETRY 1988 87 16 56%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 EUV LITHOG 38 93% 0.7% 14
2 SOFT XRAY MICROSCOPY 27 92% 0.5% 11
3 XRAY OPT 20 20% 4.1% 87
4 PRECIS OPT ENGN 17 29% 2.3% 50
5 GOLD 12 59% 0.6% 13
6 SIBERIAN SR 11 69% 0.4% 9
7 DC DE 9 83% 0.2% 5
8 LUXOR 8 50% 0.6% 12
9 SYNCHROTRON LIGHT SOURCE BEAMLINE X24C 6 100% 0.2% 4
10 ADV SCI TECHNOL IND 6 12% 2.0% 43

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000180008 PHOTON MICROFABRICAT//APLANATIC OPTICS//MCP OPTICS
2 0.0000128412 COLLECTOR OPTICS//ADV INTERDISCIPLINARY SCI//MAT EXTREME ENVIRONM
3 0.0000103324 NEUTRON SPECULAR REFLECTION//MAGNETIC REFERENCE LAYER//PHASE PROBLEM
4 0.0000091087 HALF BRIGHTNESS DOSE//UNIDAD RADIAC IONIZANTES//ASOCIAC EUROTOM
5 0.0000083750 X RAY MICROSCOPY//FRESNEL ZONE PLATES//RONTGENPHYS
6 0.0000083558 SPACE NANOTECHNOL//FREESTANDING TRANSMISSION GRATING//SINGLE ORDER DIFFRACTION
7 0.0000073776 GASSENDI//FRONT ENDS//VARIED LINE SPACING GRATINGS
8 0.0000064857 RESIST SENSITIVITY//MATH CHEM ENGN//RECTIFICATION PROPERTY
9 0.0000056937 OPTICAL LITHOGRAPHY//PHASE SHIFTING MASK//BOTTOM ANTIREFLECTIVE COATINGS
10 0.0000053489 TOTAL EXTERNAL REFLECTION//X RAY STANDING WAVES//LAYERED SYNTHETIC MICROSTRUCTURES