Class information for:
Level 1: SYNCHROTRON RADIATION STIMULATED ETCHING//SYNCHROTRON RADIATION EXCITED GROWTH//VACUUM UV PHOTOSCI

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
24075 271 18.9 66%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
666 12577 SCANNING TUNNELING MICROSCOPY//ATOM WI LAYERS//VICINAL SINGLE CRYSTAL SURFACES

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 SYNCHROTRON RADIATION STIMULATED ETCHING Author keyword 3 100% 1% 3
2 SYNCHROTRON RADIATION EXCITED GROWTH Author keyword 2 67% 1% 2
3 VACUUM UV PHOTOSCI Address 2 18% 4% 10
4 ETCHED PATTERN Author keyword 1 50% 1% 2
5 SYNCHROTRON RADIATION ETCHING Author keyword 1 50% 1% 2
6 BURIED METAL LAYER SUBSTRATE Author keyword 1 50% 0% 1
7 ELECT ENGN ELECT INFORMAT ENGN Address 1 50% 0% 1
8 ELECTRON STIMULATED REACTION Author keyword 1 50% 0% 1
9 LASER PLASMA SOFT X RAYS Author keyword 1 50% 0% 1
10 LOW TEMPERATURE HOMOEPITAXY Author keyword 1 50% 0% 1

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class		 LCSH search Wikipedia search
1 SYNCHROTRON RADIATION STIMULATED ETCHING 3 100% 1% 3 Search SYNCHROTRON+RADIATION+STIMULATED+ETCHING Search SYNCHROTRON+RADIATION+STIMULATED+ETCHING
2 SYNCHROTRON RADIATION EXCITED GROWTH 2 67% 1% 2 Search SYNCHROTRON+RADIATION+EXCITED+GROWTH Search SYNCHROTRON+RADIATION+EXCITED+GROWTH
3 ETCHED PATTERN 1 50% 1% 2 Search ETCHED+PATTERN Search ETCHED+PATTERN
4 SYNCHROTRON RADIATION ETCHING 1 50% 1% 2 Search SYNCHROTRON+RADIATION+ETCHING Search SYNCHROTRON+RADIATION+ETCHING
5 BURIED METAL LAYER SUBSTRATE 1 50% 0% 1 Search BURIED+METAL+LAYER+SUBSTRATE Search BURIED+METAL+LAYER+SUBSTRATE
6 ELECTRON STIMULATED REACTION 1 50% 0% 1 Search ELECTRON+STIMULATED+REACTION Search ELECTRON+STIMULATED+REACTION
7 LASER PLASMA SOFT X RAYS 1 50% 0% 1 Search LASER+PLASMA+SOFT+X+RAYS Search LASER+PLASMA+SOFT+X+RAYS
8 LOW TEMPERATURE HOMOEPITAXY 1 50% 0% 1 Search LOW+TEMPERATURE+HOMOEPITAXY Search LOW+TEMPERATURE+HOMOEPITAXY
9 ORGANO GERMANIUM 1 50% 0% 1 Search ORGANO+GERMANIUM Search ORGANO+GERMANIUM
10 PARALLEL IRRADIATION 1 50% 0% 1 Search PARALLEL+IRRADIATION Search PARALLEL+IRRADIATION

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 PHYSISORBED SIF4 24 91% 4% 10
2 PHOTOSTIMULATED EVAPORATION 14 65% 5% 13
3 SI EPITAXIAL GROWTH 3 45% 2% 5
4 METALORGANIC SOURCES 2 67% 1% 2
5 STIMULATED EVAPORATION 2 67% 1% 2
6 X RAY PHOTOCHEMISTRY 2 67% 1% 2
7 120 NM 1 100% 1% 2
8 MOLECULAR BEAM SYSTEM 1 50% 1% 2
9 ASSISTED NITRIDATION 1 50% 0% 1
10 DIFFERENT PHASE CONDITIONS 1 50% 0% 1

Journals

Reviews

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 VACUUM UV PHOTOSCI 2 18% 3.7% 10
2 ELECT ENGN ELECT INFORMAT ENGN 1 50% 0.4% 1
3 PL PHYS SUMIYOSHI KU 1 22% 0.7% 2
4 ELECT ELECT ENGN INFORMAT ENGN 0 25% 0.4% 1
5 NEWSUBARU 0 25% 0.4% 1
6 MOL ASSEMBLIES 0 14% 0.4% 1
7 AG CHEM SYNERGET 0 13% 0.4% 1
8 BEHLEN PHYS 225 0 100% 0.4% 1
9 CHEM KAMITOMIOKA 0 100% 0.4% 1
10 INTEGRATED SCI ENGNCHIKUSA KU 0 100% 0.4% 1

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000243466 LASER SCAN LITHOGRAPHY//ADV SCI TECHNOL IND//WORM INJECTION MOLDING
2 0.0000165203 PHYSICOCHIM MOLEC ORSAY//SURFACE STRUCTURE AND ROUGHNESS//DESORPTION INDUCED BY ELECTRON STIMULATION
3 0.0000154631 ANGLE RESOLVED DIET INCLUDING ELECTRON STIMULATED DESORPTION ION ANGULAR DISTRIBUTION ESDIAD//ELECTRON STIMULATED DESORPTION ESD//STIMULATED DESORPTION
4 0.0000154428 HYDROGEN SURFACTANT//AUSTRALIAN COUNCIL EXCELLENCE QUANTUM COM//EXCELLENCE QUANTUM COMPUTAT COMMUN TECHNOL
5 0.0000123685 LASER MICRO CLADDING//FREEFORM FABRICAT S//DIMETHYLALUMINUM HYDRIDE
6 0.0000122162 SILICON TETRAACETATE//F 2 LASER//N2O GAS
7 0.0000107966 CHEMICAL DRY ETCHING//PLASMA NANOTECHNOL PLANT//AFTER CORROSION
8 0.0000091153 TRANSLATIONAL KINETIC ENERGY//POINT DEFECT GENERATION//OXYGEN MOLECULAR BEAM
9 0.0000076843 CORE EXCITATION//PHOTON STIMULATED ION DESORPTION PSID//PHOTON STIMULATED DESORPTION PSD
10 0.0000071709 LIBWE//BACKSIDE ETCHING//LASER INDUCED BACKSIDE WET ETCHING