Class information for:
Level 1: ELECTRON BEAM ANNEALING//RAFTER//ION BEAM SYNTHESIS IBS

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
23011 305 17.5 63%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
372 16511 SWAMP//OXYGEN PRECIPITATION//GROWN IN DEFECT

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 ELECTRON BEAM ANNEALING Author keyword 15 56% 6% 18
2 RAFTER Address 5 41% 3% 9
3 ION BEAM SYNTHESIS IBS Author keyword 4 67% 1% 4
4 PB DIFFUSION Author keyword 4 67% 1% 4
5 ION BEAM SYNTHESIS Author keyword 4 16% 7% 22
6 AMORPHOUS PRECIPITATES Author keyword 2 67% 1% 2
7 SIC LAYER Author keyword 2 50% 1% 3
8 FNRF Address 2 40% 1% 4
9 SIC ON SI Author keyword 1 38% 1% 3
10 DUAL LOW ENERGY ION IMPLANTATION Author keyword 1 100% 1% 2

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 ELECTRON BEAM ANNEALING 15 56% 6% 18 Search ELECTRON+BEAM+ANNEALING Search ELECTRON+BEAM+ANNEALING
2 ION BEAM SYNTHESIS IBS 4 67% 1% 4 Search ION+BEAM+SYNTHESIS+IBS Search ION+BEAM+SYNTHESIS+IBS
3 PB DIFFUSION 4 67% 1% 4 Search PB+DIFFUSION Search PB+DIFFUSION
4 ION BEAM SYNTHESIS 4 16% 7% 22 Search ION+BEAM+SYNTHESIS Search ION+BEAM+SYNTHESIS
5 AMORPHOUS PRECIPITATES 2 67% 1% 2 Search AMORPHOUS+PRECIPITATES Search AMORPHOUS+PRECIPITATES
6 SIC LAYER 2 50% 1% 3 Search SIC+LAYER Search SIC+LAYER
7 SIC ON SI 1 38% 1% 3 Search SIC+ON+SI Search SIC+ON+SI
8 DUAL LOW ENERGY ION IMPLANTATION 1 100% 1% 2 Search DUAL+LOW+ENERGY+ION+IMPLANTATION Search DUAL+LOW+ENERGY+ION+IMPLANTATION
9 NANOBOULDER 1 100% 1% 2 Search NANOBOULDER Search NANOBOULDER
10 NRRA 1 50% 1% 2 Search NRRA Search NRRA

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 SELF ASSEMBLED SILICON 18 83% 3% 10
2 CARBON IMPLANTATION 6 53% 3% 8
3 BEAM SYNTHESIS 5 17% 8% 25
4 BURIED SIC LAYERS 3 60% 1% 3
5 RESOLVED DISPERSIVE MODE 3 60% 1% 3
6 ARC ION SOURCE 2 44% 1% 4
7 NITRIDE LAYERS 2 24% 2% 6
8 TIB2 COATINGS 2 28% 2% 5
9 3C SIC LAYERS 1 100% 1% 2
10 DEVICE TECHNOLOGIES 1 50% 1% 2

Journals

Reviews

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 RAFTER 5 41% 3.0% 9
2 FNRF 2 40% 1.3% 4
3 UEPTN 1 30% 1.0% 3
4 CEA DSM IRAMIS CNRS 1 50% 0.3% 1
5 CHARACTERISAT NANOELECT STRUCT 1 50% 0.3% 1
6 CNMUNITAT ASSOCIADA 1 50% 0.3% 1
7 ION BEAM MODIFICAT ANAL 1 10% 1.6% 5
8 UNITAT ASSOCIADA CNM 1 22% 0.7% 2
9 IANA 0 33% 0.3% 1
10 MICROSCOPIE ELECT TUNNEL 0 33% 0.3% 1

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000200873 3C SIC//FG NANOTECHNOL//HOLLOW VOID
2 0.0000190821 SIMOX//BURIED OXIDE LAYER//CONTACTLESS I V METHOD
3 0.0000125667 SICF SIC COMPOSITES//SIC SIC COMPOSITES//SICF SIC COMPOSITE
4 0.0000112633 MICROMECH SYST//SELF ORGANIZED MASK//CLUSTER SCI GRP
5 0.0000102479 AMORPHOUS SILICON CARBIDE//SILICON CARBON ALLOYS//A SIC H
6 0.0000095410 SI1 YCY//SI1 X YGEXCY//SICGE
7 0.0000065542 IBIEC//SOLID PHASE EPITAXIAL GROWTH//LATERAL SOLID PHASE EPITAXY
8 0.0000065467 CONVERSION ELECTRON YIELD//SIK EDGE XANES//CRYSTAL TECHNOL DEV
9 0.0000062199 STAINLESS STEEL FILMS//SCI TECH ROUEN//UFR PHYS MAT CONDENSEE MAT
10 0.0000056731 SILICON CARBONITRIDE//SILICON CARBON NITRIDE//SILICON CARBONITRIDE FILM