Class information for:
Level 1: MEASUREMENT ENGN SENSOR TECHNOL//PHYS TECHNOL LOW DIMENS STRUCT//PLANAR MICROCAVITIES

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
22037 339 13.7 58%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
2847 2446 INTERFACIAL SHEARS//MICROBENDING LOSS//RAPID THERMAL PROCESSING RTP

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 MEASUREMENT ENGN SENSOR TECHNOL Address 2 67% 1% 2
2 PHYS TECHNOL LOW DIMENS STRUCT Address 2 67% 1% 2
3 PLANAR MICROCAVITIES Author keyword 2 67% 1% 2
4 PYROMETRIC INTERFEROMETRY Author keyword 2 43% 1% 3
5 OPTICAL FLUX MONITORING Author keyword 1 50% 1% 2
6 IN SITU GROWTH CONTROL Author keyword 1 50% 0% 1
7 INGAAS QUANTUM WELL LASERS Author keyword 1 50% 0% 1
8 MULTI QUANTUM WELLS MQWS Author keyword 1 50% 0% 1
9 SUBSTRATE TEMPERATURE MEASUREMENT Author keyword 1 50% 0% 1
10 TEMPERATURE COEFFICIENT OF REFRACTIVE INDEX Author keyword 1 50% 0% 1

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class		 LCSH search Wikipedia search
1 PLANAR MICROCAVITIES 2 67% 1% 2 Search PLANAR+MICROCAVITIES Search PLANAR+MICROCAVITIES
2 PYROMETRIC INTERFEROMETRY 2 43% 1% 3 Search PYROMETRIC+INTERFEROMETRY Search PYROMETRIC+INTERFEROMETRY
3 OPTICAL FLUX MONITORING 1 50% 1% 2 Search OPTICAL+FLUX+MONITORING Search OPTICAL+FLUX+MONITORING
4 IN SITU GROWTH CONTROL 1 50% 0% 1 Search IN+SITU+GROWTH+CONTROL Search IN+SITU+GROWTH+CONTROL
5 INGAAS QUANTUM WELL LASERS 1 50% 0% 1 Search INGAAS+QUANTUM+WELL+LASERS Search INGAAS+QUANTUM+WELL+LASERS
6 MULTI QUANTUM WELLS MQWS 1 50% 0% 1 Search MULTI+QUANTUM+WELLS+MQWS Search MULTI+QUANTUM+WELLS+MQWS
7 SUBSTRATE TEMPERATURE MEASUREMENT 1 50% 0% 1 Search SUBSTRATE+TEMPERATURE+MEASUREMENT Search SUBSTRATE+TEMPERATURE+MEASUREMENT
8 TEMPERATURE COEFFICIENT OF REFRACTIVE INDEX 1 50% 0% 1 Search TEMPERATURE+COEFFICIENT+OF+REFRACTIVE+INDEX Search TEMPERATURE+COEFFICIENT+OF+REFRACTIVE+INDEX
9 VACUUM THIN FILM DEPOSITION 1 50% 0% 1 Search VACUUM+THIN+FILM+DEPOSITION Search VACUUM+THIN+FILM+DEPOSITION
10 DIRECT FREQUENCY MODULATION 0 33% 0% 1 Search DIRECT+FREQUENCY+MODULATION Search DIRECT+FREQUENCY+MODULATION

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 SUBSTRATE TEMPERATURE MEASUREMENT 8 75% 2% 6
2 DELAYED DESORPTION 8 100% 1% 5
3 INTERFEROMETRIC THERMOMETRY 4 67% 1% 4
4 BAND EDGE THERMOMETRY 2 67% 1% 2
5 PYROMETRIC INTERFEROMETRY 2 43% 1% 3
6 SUBSTRATE HEATER 2 43% 1% 3
7 DEPOSITION PROCESS CONTROL 1 50% 1% 2
8 UF DISCHARGE 1 100% 1% 2
9 V LAYERED STRUCTURES 1 100% 1% 2
10 WAFER TEMPERATURES 1 40% 1% 2

Journals

Reviews


Title Publ. year Cit. Active
references		 % act. ref.
to same field
State of the art in thin film thickness and deposition rate monitoring sensors 2005 29 39 18%
Progress and issues in e-beam and other top down nanolithography 2013 2 44 16%
Laser interferometric thermometry of semiconductors and dielectrics 1998 1 27 59%
Laser thermometry of solids in plasma (Review) 2000 0 49 37%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 MEASUREMENT ENGN SENSOR TECHNOL 2 67% 0.6% 2
2 PHYS TECHNOL LOW DIMENS STRUCT 2 67% 0.6% 2
3 NIGHT VIS 0 33% 0.3% 1
4 NORTEL 0 33% 0.3% 1
5 MBE OPERAT 0 25% 0.3% 1
6 MICROELECT INFORMAT SCI 0 25% 0.3% 1
7 ES CORE TECHNOL DEV 0 17% 0.3% 1
8 YAMANASHI TECHNOL DEV 0 13% 0.3% 1
9 SYST ENG 0 11% 0.3% 1
10 ADV EPITAXY 0 100% 0.3% 1

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000293642 PIN CHUCK//VACUUM PIN CHUCK//WAFER FLATNESS
2 0.0000189408 SURFACE PHOTOABSORPTION//REFLECTANCE ANISOTROPY SPECTROSCOPY//REFLECTION ANISOTROPY SPECTROSCOPY
3 0.0000139766 RAPID THERMAL PROCESSING RTP//RAPID THERMAL PROCESSING//CTOD FRACTURE TOUGHNESS TESTING
4 0.0000088149 REFLECTION MASS SPECTROMETRY//2D ISLAND//INTERFACE DISORDER
5 0.0000078047 AVLIS//ATOMIC VAPOR LASER ISOTOPE SEPARATION//LASER ISOTOPE SEPARATION
6 0.0000073229 ATOMIC HYDROGEN CLEANING//ECR HYDROGEN PLASMA//IN SITU VACUUM PROCESS
7 0.0000061887 SPECTRAL EMISSIVITY//MULTISPECTRAL RADIATION THERMOMETRY//SINTESIS ESTUDIO MAT
8 0.0000055788 ARGYRODITES//GEOTECH VARAZDIN//ARGYRODITE
9 0.0000052760 THERMAL RADIATION CALORIMETRY//GLASS MIXING//CONTINUOUS LAMINAR FLOW
10 0.0000048171 SELECTIVE REMOVAL OF ATOMS//MACROPOROUS CHAR//COMPOSITE ION BEAM IRRADIATION