Class information for:
Level 1: TUNGSTEN NITRIDE//WNX//GRP MAT ENGN SUPERFICIES

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
16516 584 20.3 60%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
1792 5778 DIFFUSION BARRIER//ELECTROMIGRATION//CU METALLIZATION

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 TUNGSTEN NITRIDE Author keyword 26 47% 7% 41
2 WNX Author keyword 8 70% 1% 7
3 GRP MAT ENGN SUPERFICIES Address 5 47% 1% 8
4 POLYMETAL GATE Author keyword 4 75% 1% 3
5 W SI N Author keyword 4 56% 1% 5
6 W B C N THIN FILM Author keyword 3 100% 1% 3
7 TUNGSTEN CARBON Author keyword 3 50% 1% 4
8 TUNGSTEN OXYNITRIDE Author keyword 3 50% 1% 4
9 ETUDE MILIEUX NANOMETR Address 2 67% 0% 2
10 SOUR MEDIUM Author keyword 2 67% 0% 2

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 TUNGSTEN NITRIDE 26 47% 7% 41 Search TUNGSTEN+NITRIDE Search TUNGSTEN+NITRIDE
2 WNX 8 70% 1% 7 Search WNX Search WNX
3 POLYMETAL GATE 4 75% 1% 3 Search POLYMETAL+GATE Search POLYMETAL+GATE
4 W SI N 4 56% 1% 5 Search W+SI+N Search W+SI+N
5 W B C N THIN FILM 3 100% 1% 3 Search W+B+C+N+THIN+FILM Search W+B+C+N+THIN+FILM
6 TUNGSTEN CARBON 3 50% 1% 4 Search TUNGSTEN+CARBON Search TUNGSTEN+CARBON
7 TUNGSTEN OXYNITRIDE 3 50% 1% 4 Search TUNGSTEN+OXYNITRIDE Search TUNGSTEN+OXYNITRIDE
8 SOUR MEDIUM 2 67% 0% 2 Search SOUR+MEDIUM Search SOUR+MEDIUM
9 WCX 2 50% 1% 3 Search WCX Search WCX
10 DIFFUSION BARRIER METAL 1 100% 0% 2 Search DIFFUSION+BARRIER+METAL Search DIFFUSION+BARRIER+METAL

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 WNX FILMS 23 79% 3% 15
2 TUNGSTEN CARBIDE FILMS 17 79% 2% 11
3 CL 4CH3CNWNPR PR I 14 100% 1% 7
4 TUNGSTEN NITRIDE FILMS 9 64% 2% 9
5 CL 4RCNWNC3H5 6 80% 1% 4
6 POLYMETAL GATE 6 100% 1% 4
7 WNX 4 47% 1% 7
8 DEPOSITED TUNGSTEN FILMS 4 67% 1% 4
9 COPPER METALLIZATION 4 13% 5% 31
10 WNXCY 4 75% 1% 3

Journals

Reviews

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 GRP MAT ENGN SUPERFICIES 5 47% 1.4% 8
2 ETUDE MILIEUX NANOMETR 2 67% 0.3% 2
3 SCI GENIE SUR ES CNRS URA 1402 1 100% 0.3% 2
4 EIVT 1 50% 0.2% 1
5 EQUIPE ELECT SOLIDES 1 50% 0.2% 1
6 GRP RECH ENERGET MILIEUX IONISESPOLITECH ORLEANS 1 50% 0.2% 1
7 IST FIS PLASMA P CALDIROLA CNR 1 50% 0.2% 1
8 NW SERV OFF 1 50% 0.2% 1
9 PHYS ENERGY HARVEST 1 50% 0.2% 1
10 UMR 6606GRP RECH ENERGET MILIEUX IONISES 1 50% 0.2% 1

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000261336 CVD W//FEATURE SCALE MODEL//FOCUS NEW YORK
2 0.0000260170 W TI THIN FILMS//WTI THIN FILMS//SURFACE LASER TREATMENT
3 0.0000186539 DIFFUSION BARRIER//CU METALLIZATION//TANTALUM NITRIDE
4 0.0000128796 DELTA MON//MOLYBDENUM NITRIDE//MOLYBDENUM NITRIDE COATINGS
5 0.0000098566 TINX FILMS//MAT CHEM COATINGS//TDEAT
6 0.0000094926 AMERG//PHYS PROCEDES VIDE//INTRINSIC STRESS
7 0.0000089145 TITANIUM NITRIDE//ZIRCONIUM NITRIDE//ZIRCONIUM OXYNITRIDE
8 0.0000078166 CHROMIUM NITRIDE//TIALN//SUPERHARDNESS EFFECT
9 0.0000070351 ATSUGI ELECT COMMUN S FUNCT DEVICE DEV//INTEGRATED PROD BUSINESS UNIT//SINGLE VOLTAGE SUPPLY
10 0.0000061051 DIAMOND LIKE CARBON//DLC//DLC COATINGS