Publikationer av Kristinn Gylfason

Refereegranskade

Artiklar

[1]

L.-L. Lai et al., "3D Printing of Glass Micro-Optics with Subwavelength Features on Optical Fiber Tips," ACS Nano, vol. 18, no. 16, s. 10788-10797, 2024.

[2]

Y. Li et al., "Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process," Nanoscale, 2023.

[3]

N. Quack et al., "Integrated silicon photonic MEMS," MICROSYSTEMS & NANOENGINEERING, vol. 9, no. 1, 2023.

[4]

X. Fan et al., "Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors," ACS Applied Nano Materials, vol. 7, no. 1, s. 102-109, 2023.

[5]

P.-H. Huang et al., "Three-dimensional printing of silica glass with sub-micrometer resolution," Nature Communications, vol. 14, no. 1, 2023.

[6]

A. Enrico et al., "Ultrafast and Resist-Free Nanopatterning of 2D Materials by Femtosecond Laser Irradiation," ACS Nano, vol. 17, no. 9, s. 8041-8052, 2023.

[7]

P. Edinger et al., "Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase," Optics Express, vol. 31, no. 4, s. 6540-6551, 2023.

[8]

L. Van Iseghem et al., "Low power optical phase shifter using liquid crystal actuation on a silicon photonics platform," Optical Materials Express, vol. 12, no. 6, s. 2181-2198, 2022.

[9]

H. Sattari et al., "Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process," JOURNAL OF OPTICAL MICROSYSTEMS, vol. 2, no. 04, 2022.

[10]

S. Parhizkar et al., "Two-Dimensional Platinum Diselenide Waveguide-Integrated Infrared Photodetectors," ACS Photonics, vol. 9, no. 3, s. 859-867, 2022.

[11]

G. Jo et al., "Wafer-level hermetically sealed silicon photonic MEMS," Photonics Research, vol. 10, no. 2, s. A14-A21, 2022.

[12]

S. Schröder et al., "A large-area single-filament infrared emitter and its application in a spectroscopic ethanol gas sensing system," Microsystems and Nanoengineering, vol. 7, no. 1, 2021.

[13]

A. Y. Takabayashi et al., "Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch," Journal of microelectromechanical systems, vol. 30, no. 2, s. 322-329, 2021.

[14]

A. Quellmalz et al., "Large-area integration of two-dimensional materials and their heterostructures by wafer bonding," Nature Communications, vol. 12, no. 1, 2021.

[15]

P. Edinger et al., "Silicon photonic microelectromechanical phase shifters for scalable programmable photonics," Optics Letters, vol. 46, no. 22, s. 5671-5674, 2021.

[16]

F. Ottonello Briano et al., "Carbon dioxide absorption spectroscopy with a mid-infrared silicon photonic waveguide," Optics Letters, vol. 45, no. 1, s. 109-112, 2020.

[17]

C. Errando-Herranz et al., "MEMS for Photonic Integrated Circuits," IEEE Journal of Selected Topics in Quantum Electronics, vol. 26, no. 2, s. 1-16, 2020.

[18]

N. Quack et al., "MEMS-Enabled Silicon Photonic Integrated Devices and Circuits," IEEE Journal of Quantum Electronics, vol. 56, no. 1, 2020.

[19]

A. D. Smith et al., "Carbon-Based Electrode Materials for Microsupercapacitors in Self-Powering Sensor Networks : Present and Future Development," Sensors, vol. 19, no. 19, 2019.

[20]

C. Errando-Herranz, N. Le Thomas och K. Gylfason, "Low-power optical beam steering by microelectromechanical waveguide gratings," Optics Letters, vol. 44, no. 4, s. 855-858, 2019.

[21]

X. Wang et al., "Wafer-Level Vacuum Sealing by Transfer Bonding of Silicon Caps for Small Footprint and Ultra-Thin MEMS Packages," Journal of microelectromechanical systems, vol. 28, no. 3, s. 460-471, 2019.

[22]

A. Quellmalz et al., "Influence of Humidity on Contact Resistance in Graphene Devices," ACS Applied Materials and Interfaces, vol. 10, no. 48, s. 41738-41746, 2018.

[23]

C. Errando-Herranz, S. Das och K. Gylfason, "Suspended polarization beam splitter on silicon-on-insulator," Optics Express, vol. 26, no. 3, s. 2675-2681, 2018.

[24]

N. Sandström et al., "Batch fabrication of polymer microfluidic cartridges for QCM sensor packaging by direct bonding," Journal of Micromechanics and Microengineering, vol. 27, no. 12, 2017.

[25]

M. A. Baghban et al., "Bragg gratings in thin-film LiNbO₃ waveguides," Optics Express, vol. 25, no. 26, s. 32323-32332, 2017.

[26]

P. Minzioni et al., "Roadmap for optofluidics," Journal of Optics, vol. 19, 2017.

[27]

F. Ottonello Briano et al., "A sub-μs thermal time constant electrically driven Pt nanoheater: thermo-dynamic design and frequency characterization," Applied Physics Letters, vol. 108, no. 19, 2016.

[28]

C. Errando-Herranz et al., "Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter," Optics Letters, vol. 40, no. 15, s. 3556-3559, 2015.

[29]

F. Ottonello Briano et al., "High-frequency sub-wavelength IR thermal source," Proceedings of SPIE, the International Society for Optical Engineering, vol. 9133, s. 91331D-1-91331D-6, 2014.

[30]

J. Álvarez et al., "Real time optical immunosensing with flow-through porous alumina membranes," Sensors and actuators. B, Chemical, vol. 202, s. 834-839, 2014.

[31]

F. Saharil et al., "Dry adhesive bonding of nanoporous inorganic membranes to microfluidic devices using the OSTE(+) dual-cure polymer," Journal of Micromechanics and Microengineering, vol. 23, no. 2, s. 025021, 2013.

[32]

C. Errando-Herranz et al., "Integration of microfluidics with grating coupled silicon photonic sensors by one-step combined photopatterning and molding of OSTE," Optics Express, vol. 21, no. 18, s. 21293-21298, 2013.

[33]

H. Xu et al., "Modulated fluorescence of colloidal quantum dots embedded in a porous alumina membrane," Journal of Physical Chemistry B, vol. 177, no. 45, s. 14151-14156, 2013.

[34]

A. C. Fischer et al., "3D Free-Form Patterning of Silicon by Ion Implantation, Silicon Deposition, and Selective Silicon Etching," Advanced Functional Materials, vol. 22, no. 19, s. 4004-4008, 2012.

[35]

K. B. Gylfason et al., "Process considerations for layer-by-layer 3D patterning of silicon, using ion implantation, silicon deposition, and selective silicon etching," Journal of Vacuum Science & Technology B, vol. 30, no. 6, s. 06FF05, 2012.

[36]

M. Antelius, K. B. Gylfason och H. Sohlström, "An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics," Optics Express, vol. 19, no. 4, s. 3592-3598, 2011.

[37]

C. F. Carlborg et al., "A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips," Lab on a Chip, vol. 10, no. 3, s. 281-290, 2010.

[38]

K. Gylfason et al., "On-chip temperature compensation in an integrated slot-waveguide ring resonator refractive index sensor array," Optics Express, vol. 18, no. 4, s. 3226-3237, 2010.

[39]

A. Kazmierczak et al., "Light coupling and distribution for Si3N4/SiO2 integrated multichannel single-mode sensing system," Optical Engineering : The Journal of SPIE, vol. 48, no. 1, 2009.

[40]

J. S. Agustsson et al., "Growth, coalescence, and electrical resistivity of thin Pt films grown by dc magnetron sputtering on SiO2," Applied Surface Science, vol. 254, no. 22, s. 7356-7360, 2008.

[41]

G. Maire et al., "High efficiency silicon nitride surface grating couplers," Optics Express, vol. 16, no. 1, s. 328-333, 2008.

[42]

C. A. Barrios et al., "Label-free optical biosensing with slot-waveguides," Optics Letters, vol. 33, no. 7, s. 708-710, 2008.

[43]

C. A. Barrios et al., "Reconfiguration of microring resonators by liquid adhesion," Applied Physics Letters, vol. 93, no. 20, 2008.

[44]

C. A. Barrios et al., "Slot-waveguide biochemical sensor (vol 32, pg 2080, 2007)," Optics Letters, vol. 33, no. 21, s. 2554-2555, 2008.

[45]

L. Vivien et al., "Vertical multiple-slot waveguide ring resonators in silicon nitride," Optics Express, vol. 16, no. 22, s. 17237-17242, 2008.

[46]

U. B. Arnalds et al., "A magnetron sputtering system for the preparation of patterned thin films and in situ thin film electrical resistance measurements," Review of Scientific Instruments, vol. 78, no. 10, s. 103901, 2007.

[47]

C. A. Barrios et al., "Demonstration of slot-waveguide structures on silicon nitride / silicon oxide platform," Optics Express, vol. 15, no. 11, s. 6846-6856, 2007.

[48]

C. A. Barrios et al., "Slot-waveguide biochemical sensor," Optics Letters, vol. 32, no. 21, s. 3080-3082, 2007.

[49]

K. B. Gylfason et al., "In-situ resistivity measurements during growth of ultra-thin Cr_0.7Mo_0.3," Thin Solid Films, vol. 515, no. 2, s. 583-586, 2006.

[50]

K. B. Gylfason et al., "Ion-acoustic solitary waves in a high power pulsed magnetron sputtering discharge," Journal of Physics D : Applied Physics, vol. 38, no. 18, s. 3417-3421, 2005.

Konferensbidrag

[51]

Y. Li et al., "Design and fabrication of a 4-terminal in-plane nanoelectromechanical relay," i Transducers2023 - The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Kyoto, June 25-29, 2023, 2023.

[52]

U. Khan et al., "Low power actuators for programmable photonic processors," i AI and Optical Data Sciences IV, 2023.

[53]

L.-L. Lai et al., "Picoliter-volume refractive index sensor 3D-printed in silica glass on an optical fiber tip," i 2023 Conference on Lasers and Electro-Optics, CLEO 2023, 2023.

[54]

W. Bogaerts et al., "Scaling programmable silicon photonics circuits," i Silicon Photonics XVIII, 2023.

[55]

P. Edinger et al., "A Bistable Silicon Photonic Mems Phase Switch For Nonvolatile Photonic Circuits," i MEMS 2022, 2022.

[56]

P. Edinger et al., "Add-drop silicon ring resonator with low-power MEMS tuning of phase and coupling," i 2022 Conference on Lasers and Electro-Optics, CLEO 2022 : Proceedings, 2022.

[57]

P. Edinger et al., "Add-drop silicon ring resonator with low-power MEMS tuning of phase and coupling," i Optics InfoBase Conference Papers, 2022.

[58]

A. Y. Takabayashi et al., "Compact Integrated Silicon Photonic Mems Power Coupler For Programmable Photonics," i 2022 IEEE 35Th International Conference On Micro Electro Mechanical Systems Conference (MEMS), 2022, s. 216-219.

[59]

N. Negm et al., "Graphene waveguide-integrated thermal infrared emitter," i Device Research Conference - Conference Digest, DRC, 2022.

[60]

U. Khan et al., "Large scale programmable photonic circuits using silicon photonic MEMS," i Optics InfoBase Conference Papers, 2022.

[61]

U. Khan et al., "Large scale programmable photonic circuits using silicon photonic MEMS," i 2022 Conference on Lasers and Electro-Optics, CLEO 2022 : Proceedings, 2022.

[62]

P.-S. Lin et al., "Low-concentration detection of CO₂ using suspended silicon waveguides in the mid-IR," i 2022 Conference on Lasers and Electro-Optics, CLEO 2022 : Proceedings, 2022.

[63]

P.-S. Lin et al., "Low-concentration detection of CO₂ using suspended silicon waveguides in the mid-IR," i Optics InfoBase Conference Papers, 2022.

[64]

U. Khan et al., "MORPHIC : MEMS enhanced silicon photonics for programmable photonics," i Integrated Photonics Platforms Ii, 2022.

[65]

W. Bogaerts et al., "Programmable Photonic Circuits powered by Silicon Photonic MEMS Technology," i Photonic Networks and Devices, Networks 2022, 2022.

[66]

W. Bogaerts et al., "Programmable silicon photonic circuits powered by MEMS," i Proceedings of SPIE - The International Society for Optical Engineering, 2022.

[67]

A. Quellmalz et al., "Wafer-scale integration of layered 2D materials by adhesive wafer bonding," i Proceedings of SPIE - The International Society for Optical Engineering, 2022.

[68]

A. Y. Takabayashi et al., "Continuously Tunable Silicon Photonic Mems 2 X 2 Power Coupler," i 2021 21St International Conference On Solid-State Sensors, Actuators and Microsystems (Transducers), 2021, s. 447-450.

[69]

W. Bogaerts et al., "Low-Power Electro-Optic Actuators for Large-Scale Programmable Photonic Circuits," i 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings, 2021.

[70]

W. Bogaerts et al., "Low-power electro-optic actuators for large-scale programmable photonic circuits," i Optics InfoBase Conference Papers, 2021.

[71]

H. Sattari et al., "Low-voltage silicon photonic mems switch with vertical actuation," i 2021 34th ieee international conference on micro electro mechanical systems (mems 2021), 2021, s. 298-301.

[72]

W. Bogaerts et al., "Programmable photonic circuits using silicon photonic MEMS," i Optics InfoBase Conference Papers, 2021.

[73]

N. Quack et al., "Scalable Nano-Opto-Electromechanical Systems in Silicon Photonics," i 2021 IEEE Photonics Conference, IPC 2021 - Proceedings, 2021.

[74]

H. Sattari et al., "Silicon Photonic MEMS Add-Drop Filter," i 2020 european conference on optical communications (ecoc), 2021.

[75]

P. Edinger et al., "Silicon photonic MEMS phase shifter with mu s time constant built on a foundry platform," i 2021 Conference On Lasers And Electro-Optics (CLEO), 2021.

[76]

P. Edinger et al., "Silicon photonic MEMS phase shifter with µs time constant built on a foundry platform," i Optics InfoBase Conference Papers, 2021.

[77]

P. Edinger et al., "Silicon photonic MEMS phase shifter with µs time constant built on a foundry platform," i 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings, 2021.

[78]

A. Quellmalz et al., "Stacking of Two-Dimensional Materials to Large-Area Heterostructures by Wafer Bonding," i 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings, 2021.

[79]

A. Quellmalz et al., "Stacking of Two-Dimensional Materials to Large-Area Heterostructures by Wafer Bonding," i CLEO: Science and Innovations 2021, 2021.

[80]

A. Quellmalz et al., "Stacking of two-dimensional materials to large-area heterostructures by wafer bonding," i Optics InfoBase Conference Papers, 2021.

[81]

K. Rajendran et al., "Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform," i 2021 IEEE 17Th International Conference On Group Iv Photonics (GFP 2021), 2021.

[82]

S. Parhizkar et al., "Waveguide-Integrated Photodetectors based on 2D Platinum Diselenide," i 2021 Device Research Conference (DRC), 2021.

[83]

P. Edinger et al., "Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics," i Optics InfoBase Conference Papers, 2020.

[84]

P. Edinger et al., "Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics," i 2020 conference on lasers and electro-optics (cleo), 2020.

[85]

A. Quellmalz et al., "Large-scale Integration of 2D Material Heterostructures by Adhesive Bonding," i 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems, 2020.

[86]

F. Ottonello-Briano, C. Errando-Herranz och K. Gylfason, "On-chip dispersion spectroscopy of CO2 using a mid-infrared microring resonator," i Proceedings of 2020 CLEO Technical Conference, 2020.

[87]

K. Gylfason et al., "On-chip spectroscopy of CO2 with MIR waveguides," i Optics InfoBase Conference Papers, 2020.

[88]

F. Ottonello-Briano et al., "Carbon Dioxide Sensing with Low-confinementHigh-sensitivity Mid-IR SiliconWaveguides," i Conference on Lasers and Electro-Optics 2019 : CLEO: Science and Innovations, 2019.

[89]

N. Quack et al., "Exploiting Mechanics at the Micro- and Nanoscale for Efficient Reconfiguration of Photonic Integrated Circuits," i IEEE Photonics Society Summer Topical Meeting Series 2019, SUM 2019, 2019, s. 1-1.

[90]

P. Edinger, C. Errando-Herranz och K. Gylfason, "Low-loss MEMS phase shifter for large scale reconfigurable silicon photonics," i 2019 IEEE 32nd international conference on micro electro mechanical systems (MEMS), 2019, s. 919-921.

[91]

P. Edinger, C. Errando-Herranz och K. Gylfason, "Reducing Actuation Nonlinearity of MEMS Phase Shifters for Reconfigurable Photonic Circuits," i 2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2019.

[92]

N. Quack et al., "Silicon Photonic MEMS : Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits," i 2019 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC), 2019.

[93]

N. Quack et al., "Silicon photonic MEMS : Exploiting mechanics at the nanoscale to enhance photonic integrated circuits," i Optics InfoBase Conference Papers, 2019.

[94]

A. Quellmalz et al., "Wafer-Scale Transfer of Graphene by Adhesive Wafer Bonding," i 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), 2019, s. 257-259.

[95]

S. J. Bleiker et al., "Adhesive Wafer Bonding for Heterogeneous System Integration," i ECS Meeting Abstracts, 2018.

[96]

C. Errando-Herranz et al., "New dynamic silicon photonic components enabled by MEMS technology," i Proceedings Volume 10537, Silicon Photonics XIII, 2018.

[97]

F. Ottonello Briano et al., "A fast uncooled infrared nanobolometer featuring a hybrid-plasmonic cavity for enhanced optical responsivity," i 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, January 22-26, 2017, 2017.

[98]

C. Errando-Herranz, P. Edinger och K. Gylfason, "Dynamic dispersion tuning of silicon photonic waveguides by microelectromechanical actuation," i Optics InfoBase Conference Papers, 2017.

[99]

C. Errando-Herranz, P. Edinger och K. B. Gylfason, "Dynamic dispersion tuning of silicon photonicwaveguides by microelectromechanical actuation," i CLEO: Science and Innovations, 2017, 2017, s. SW1N. 3.

[100]

C. Errando-Herranz et al., "MEMS tunable silicon photonic grating coupler for post-assembly optimization of fiber-to-chip coupling," i Micro Electro Mechanical Systems (MEMS), 2017 30th IEEE International Conference on, 2017, s. 293-296.

[101]

M. A. Baghban et al., "Waveguide Gratings in Thin-Film Lithium Niobate on Insulator," i CLEO: 2017, OSA Technical Digest, 2017.

[102]

M. A. Baghban et al., "Waveguide Gratings in Thin-Film Lithium Niobate on Insulator," i 2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE & EUROPEAN QUANTUM ELECTRONICS CONFERENCE (CLEO/EUROPE-EQEC), 2017.

[103]

C. Errando-Herranz et al., "A Low-power MEMS Tunable Photonic Ring Resonator for Reconfigurable Optical Networks," i Proceedings of The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Estoril, Portugal. Jan 2015, 2015, s. 53-56.

[104]

C. Errando-Herranz et al., "A MEMS tunable photonic ring resonator with small footprint and large free spectral range," i Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on, 2015, s. 1001-1004.

[105]

J. Alvarez et al., "A Real Time Immunoassay in Alumina Membranes," i SENSORS, 2014 IEEE, 2014, s. 1760-1763.

[106]

A. C. Fischer et al., "3D printing of silicon micro and nano structures by ion implantation, silicon deposition, and selective silicon etching," i Technical Paper - Society of Manufacturing Engineers, 2013.

[107]

C. Errando-Herranz et al., "Biocompatibility of OSTE polymers studied by cell growth experiments," i Proceedings of the 17th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (microTAS), 2013.

[108]

C. Errando-Herranz et al., "Integration Of Polymer Microfluidic Channels, Vias, And Connectors With Silicon Photonic Sensors By One-Step Combined Photopatterning And Molding Of OSTE," i Proceedings of the 2013 17th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers), 2013, s. 1613-1616.

[109]

C. Errando-Herranz et al., "Integration of polymer microfluidics with silicon photonic biosensors by one-step combined photopatterning and molding of OSTE," i Medicinteknikdagarna 2013; Stockholm, Sverige, 1-2 oktober, 2013, 2013.

[110]

V. J. Dubois et al., "A single-lithography SOI rib waveguide sensing circuit with apodized low back-reflection surface grating fiber coupling," i SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS III, 2012, s. 84311-84311.

[111]

F. Saharil et al., "Dry Transfer Bonding of Porous Silicon Membranes to OSTE(+) Polymer Microfluidic Devices," i Proceedings IEEE International Conference on Micro Electro MechanicalSystems (MEMS), 2012, s. 232-234.

[112]

A. C. Fischer et al., "Layer-by-layer 3D printing of Si micro- and nanostructures by Si deposition, ion implantation and selective Si etching," i 12th IEEE Conference on Nanotechnology (IEEE-NANO), 2012, 2012, s. 1-4.

[113]

J. Pierer et al., "Photonic sensing of food allergy : integration and miniaturization," i Smart Systems Integration, 2012.

[114]

K. B. Gylfason, A. Mola Romero och H. Sohlström, "Reducing the temperature sensitivity of SOI waveguide-based biosensors," i Silicon Photonics and Photonic Integrated Circuits III, 2012, s. 84310-84310.

[115]

K. B. Gylfason, "Nanophotonic biosensors for point of care diagnostics," i Medicinteknikdagarna, Linköping, Sweden, October 11-12, 2011, 2011.

[116]

K. B. Gylfason et al., "A packaged optical slot-waveguide ring resonator sensor array for multiplex assays in Labs-on-Chip," i Medicinteknikdagarna, Umeå, Sweden, October 6-7, 2010., 2010.

[117]

D. Hill et al., "Microfluidic and Transducer Technologies for Lab on a Chip Applications," i 2010 ANNUAL INTERNATIONAL CONFERENCE OF THE IEEE ENGINEERING IN MEDICINE AND BIOLOGY SOCIETY (EMBC), 2010, s. 305-307.

[118]

H. Sohlström, K. B. Gylfason och D. Hill, "Real-time label-free biosensing with integrated planar waveguide ring-resonators," i SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS II, 2010, s. 77190B-1-77190B-15.

[119]

K. B. Gylfason et al., "A packaged optical slot-waveguide ring resonator sensor array for multiplex assays in labs-on-chip," i Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 2009, s. 2004-2006.

[120]

A. Kazmierczak et al., "Analyse de la tolérance de l’alignement d’un circuit de distribution optique intégré pour une application de capteur multiparamétrique jetable," i Journées Nationales d’Optique Guidée (JNOG), 2009, s. 289-291.

[121]

L. Vivien et al., "Experimental demonstration of vertical multiple-slot waveguide ring resonators," i SPIE Photonics West, 24 - 29 January 2009, San Jose Convention Center, San Jose, California, USA, 2009.

[122]

J. S. Agustsson et al., "Electrical resistivity and morphology of ultra thin Pt films grown by dc magnetron sputtering on SiO(2)," i Journal of Physics Conference Series, 2008.

[123]

A. Kazmierczak et al., "High quality optical microring resonators in Si₃N ₄/SiO₂," i Proceedings of the 14th European Conference on Integrated Optics - ECIO'08 Eindhoven, 2008, s. 313-316.

[124]

C. A. Barrios et al., "Integrated slot-waveguide microresonator for biochemical sensing," i Proceedings Europtrode IX, 2008.

[125]

K. B. Gylfason et al., "Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis," i Micro Total Analysis Systems (muTAS), 2008, s. 399-401.

[126]

G. Maire et al., "Tolerance analysis of high efficiency silicon nitride surface grating couplers," i SPIE Photonics Europe. Strasbourg, France. 7 - 11 April 2008, 2008.

[127]

D. Hill et al., "Ultrahigh Sensitivity Slot-Waveguide Biosensor on a Highly Integrated Chip for Simultaneous Diagnosis of Multiple Diseases," i 2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, 2008, s. 52-53.

[128]

L. Vivien et al., "A high efficiency silicon nitride grating coupler," i 2007 4th IEEE International Conference on Group IV Photonics, 2007, s. 157-159.

[129]

C. Barrios et al., "Integrated Si₃N₄/SiO₂ Slot-Waveguide Microresonators," i 33rd European Conference and Exhibition of Optical Communication (ECOC), 2007. Berlin, Germany. 16-20 Sept. 2007, 2007.

[130]

J. T. Gudmundsson et al., "Plasma Dynamics in an Unipolar Pulsed Magnetron Sputtering Discharge," i 57th Gaseous Electronics Conference, September 26-29, 2004, Shannon, The Republic of Ireland, 2004.

[131]

K. B. Gylfason et al., "Ultra-thin Lattice Matched Cr_xMo_1-x/MgO Multilayers," i 51st International Symposium of the American Vacuum Society, Anaheim , CA , USA, 2004., 2004.

Kapitel i böcker

[132]

C. Errando-Herranz och K. B. Gylfason, "Photonic ring resonators for biosensing," i Nanodevices for Photonics and Electronics : Advances and Applications, : Pan Stanford Publishing, 2016, s. 385-424.

Icke refereegranskade

Konferensbidrag

[133]

G. Jo et al., "Wafer-level Hermetic Sealing of Silicon Photonic MEMS by Direct Metal-to-Metal Bonding," i WaferBond’22 Conference of Wafer Bonding for Microsystems, 3D- and Wafer Level Integration, October 5-6, 2022., 2022.

[134]

G. Jo et al., "Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMS," i Proceedings SPIE OPTO 6-12 march 2021 silicon photonics XVI, 2021.

[135]

L. Van Iseghem et al., "Liquid crystal phase shifter integrated in a silicon photonics platform," i Proceedings of the 22nd European Conference on Integrated Optics (ECIO) 2020, 2020.

[136]

W. Bogaerts et al., "MORPHIC : Programmable Photonic Circuits enabled by Silicon Photonic MEMS," i Proceedings Volume 11285 SPIE OPTO - 1-6 February 2020 Silicon Photonics XV, 2020.

[137]

N. Quack et al., "MEMS-based silicon photonic integrated devices and circuits," i ECIO 2019, Ghent, Belgium (2019), 2019.

[138]

U. Khan et al., "The MORPHIC Project: Enabling large scale programmable photonic circuits using MEMS," i Photonics Ireland, 2018.

[139]

B. Abasahl et al., "Towards Low-Power Reconfigurable Photonic ICs Based on MEMS Technology," i Australian Institute of Physics Congress, 2018.

[140]

K. B. Gylfason et al., "Integration of polymer based microfluidics with silicon photonics for biosensing applications," i The 2015 E-MRS Fall Meeting and Exhibit, Warsaw, Poland., 2015.

[141]

F. Saharil et al., "Dry adhesive bonding of porous membranes to microstructured silicon wafers using the OSTE(+) dual-cure polymer," i Proceedings of the 10th Micronano System Workshop (MSW 2014), 2014.

[142]

F. Saharil et al., "Dry adhesive bonding of porous alumina membranes to microstructured silicon wafers using the OSTE(+) dual-cure polymer," i Proceedings of the International Conference on Wafer Bonding, 2013.

[143]

A. C. Fischer et al., "3D Patterning of Si Micro and Nano Structures by Focused Ion Beam Implantation, Si Deposition and Selective Si Etching," i The 56th International Conference on Electron, Ion, Photon Beam Technolog (EIPBN), 2012.

[144]

M. Antelius, K. B. Gylfason och H. Sohlström, "An apodized surface grating coupler enabling single lithography silicon photonic nanowire sensors," i Micronano System Workshop, MSW 2012, Linköping, May 9-10, 2012.

[145]

K. B. Gylfason, M. Antelius och H. Sohlström, "An apodized surface grating coupler enabling the fabrication of silicon photonic nanowire sensor circuits in one lithography step," i Proceedings IEEE International Conference on Solid-State Sensors, Actuators,and Microsystems (Transducers), 2011, s. 1539-1541.

[146]

K. B. Gylfason et al., "A packaged optical slot-waveguide ring resonator sensor array for multiplex assays in Labs-on-Chip," i 8th Micronano System Workshop, 2010.

[147]

K. B. Gylfason et al., "Athermal Optical Slot-Waveguides for Temperature Insensitive Biosensing," i The 8th Micronano System Workshop. Stockholm, SWE. 04 May 2010 - 05 May 2010, 2010.

[148]

N. Sandström et al., "Lab-on-a-chip microsystems for point-of-care diagnostics," i 1st International scientific conference on Microfluidics in bioanalytical research and diagnostics, 2010, s. 34-35.

[149]

N. Sandström et al., "Microfluidic systems for point-of-care diagnostics," i 8th Micronano System Workshop, MSW 2010, 2010.

[150]

K. B. Gylfason et al., "Optical slot-waveguide micro-ring resonators for biosensing," i International Label-Free Biosensing Workshop. Enschede, the Netherlands. April 8-9 2008, 2008.

[151]

C. F. Carlborg et al., "Ultrahigh sensitivity slot-waveguide biosensor on a highly integrated chip for simultaneous diagnosis of multiple diseases," i Medicinteknikdagarna, Gothenburg, 2008, 2008.

[152]

J. S. Agustsson et al., "Hydrogen uptake in MgO thin films grown by reactive magnetron sputtering," i 53rd International Symposium of the American Vacuum Society, November 12-17, San Francisco, CA, USA, 2006, 2006.

[153]

J. S. Agustsson et al., "Electrical properties of thin MgO films," i Thirteenth International Congress on Thin Films (ICTF-13), Stockholm, Sweden, 2005., 2005.